中国物理B ›› 2022, Vol. 31 ›› Issue (12): 128105-128105.doi: 10.1088/1674-1056/ac9823
Dongli Zhang(张冬利)†, Mingxiang Wang(王明湘), and Huaisheng Wang(王槐生)
Dongli Zhang(张冬利)†, Mingxiang Wang(王明湘), and Huaisheng Wang(王槐生)
摘要: The negative gate bias stress (NBS) reliability of n-type polycrystalline silicon (poly-Si) thin-film transistors (TFTs) with a distinct defective grain boundary (GB) in the channel is investigated. Results show that conventional NBS degradation with negative shift of the transfer curves is absent. The on-state current is decreased, but the subthreshold characteristics are not affected. The gate bias dependence of the drain leakage current at Vds of 5.0 V is suppressed, whereas the drain leakage current at Vds of 0.1 V exhibits obvious gate bias dependence. As confirmed via TCAD simulation, the corresponding mechanisms are proposed to be trap state generation in the GB region, positive-charge local formation in the gate oxide near the source and drain, and trap state introduction in the gate oxide.
中图分类号: (Amorphous semiconductors)