Similarity principle of microwave argon plasma at low pressure

doi:10.1088/1674-1056/27/8/085206

中国物理B ›› 2018, Vol. 27 ›› Issue (8): 85206-085206.doi: 10.1088/1674-1056/27/8/085206

• PHYSICS OF GASES, PLASMAS, AND ELECTRIC DISCHARGES • 上一篇下一篇

Similarity principle of microwave argon plasma at low pressure

Xiao-Yu Han(韩晓宇), Jun-Hong Wang(王均宏), Mei-E Chen(陈美娥), Zhan Zhang(张展), Zheng Li(李铮), Yu-Jian Li(李雨键)

Institute of Lightwave Technology, Beijing Jiaotong University, Beijing, China

收稿日期:2018-02-27 修回日期:2018-04-01 出版日期:2018-08-05 发布日期:2018-08-05
通讯作者: Jun-Hong Wang E-mail:wangjunh@bjtu.edu.cn
基金资助:
Project supported by the National Natural Science Foundation of China (Grant No. 61331002), the National Key Basic Research Program of China (Grant No. 2013CB328903), and the Fundamental Research Funds for the Central Universities, China (Grant No. W15JB00510).

Similarity principle of microwave argon plasma at low pressure

Xiao-Yu Han(韩晓宇), Jun-Hong Wang(王均宏), Mei-E Chen(陈美娥), Zhan Zhang(张展), Zheng Li(李铮), Yu-Jian Li(李雨键)

Institute of Lightwave Technology, Beijing Jiaotong University, Beijing, China

Received:2018-02-27 Revised:2018-04-01 Online:2018-08-05 Published:2018-08-05
Contact: Jun-Hong Wang E-mail:wangjunh@bjtu.edu.cn
Supported by:
Project supported by the National Natural Science Foundation of China (Grant No. 61331002), the National Key Basic Research Program of China (Grant No. 2013CB328903), and the Fundamental Research Funds for the Central Universities, China (Grant No. W15JB00510).

摘要/Abstract

摘要： In order to validate the similarity principle of microwave breakdown, a two-dimensional (2D) fluid model of low-pressure microwave argon plasma is established and solved by the finite-element method. Proportional conditions are used in this model to build three different breakdown processes that meet the premise of a similarity principle, and these breakdown processes are called “similar cases” in this paper. Similar cases have proportionately sized breakdown regions, where the ratio of frequency of incident microwave f to gas pressure p (f/p), and the reduced field E/p in them are kept the same. All the important physical parameters such as electron density, electron temperature, and reduced electric field can be obtained from the simulation of this model. The results show that the parameters between similar cases are in constant ratio without changing with time, which means that the similarity principle is also valid in microwave breakdown.

Abstract: In order to validate the similarity principle of microwave breakdown, a two-dimensional (2D) fluid model of low-pressure microwave argon plasma is established and solved by the finite-element method. Proportional conditions are used in this model to build three different breakdown processes that meet the premise of a similarity principle, and these breakdown processes are called “similar cases” in this paper. Similar cases have proportionately sized breakdown regions, where the ratio of frequency of incident microwave f to gas pressure p (f/p), and the reduced field E/p in them are kept the same. All the important physical parameters such as electron density, electron temperature, and reduced electric field can be obtained from the simulation of this model. The results show that the parameters between similar cases are in constant ratio without changing with time, which means that the similarity principle is also valid in microwave breakdown.

中图分类号: (High-frequency and RF discharges)

52.80.Pi

52.65.-y (Plasma simulation) 51.50.+v (Electrical properties) 52.50.Sw (Plasma heating by microwaves; ECR, LH, collisional heating)

韩晓宇, 王均宏, 陈美娥, 张展, 李铮, 李雨键. Similarity principle of microwave argon plasma at low pressure[J]. 中国物理B, 2018, 27(8): 85206-085206.

Xiao-Yu Han(韩晓宇), Jun-Hong Wang(王均宏), Mei-E Chen(陈美娥), Zhan Zhang(张展), Zheng Li(李铮), Yu-Jian Li(李雨键). Similarity principle of microwave argon plasma at low pressure[J]. Chin. Phys. B, 2018, 27(8): 85206-085206.

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Similarity principle of microwave argon plasma at low pressure

Similarity principle of microwave argon plasma at low pressure

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