中国物理B ›› 2003, Vol. 12 ›› Issue (11): 1257-1260.doi: 10.1088/1009-1963/12/11/313

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Intertwisted fibrillar diamond-like carbon films prepared by electron cyclotron resonance microwave plasma enhanced chemical vapour deposition

杨武保, 王久丽, 张谷令, 范松华, 刘赤子, 杨思泽   

  1. Institute of Physics, Chinese Academy of Sciences, Beijing 100080, China
  • 收稿日期:2003-02-28 修回日期:2003-06-03 出版日期:2003-11-16 发布日期:2005-03-16
  • 基金资助:
    Project supported by the National Natural Science Foundation of China (Grant No 50071068).

Intertwisted fibrillar diamond-like carbon films prepared by electron cyclotron resonance microwave plasma enhanced chemical vapour deposition

Yang Wu-Bao (杨武保), Wang Jiu-Li (王久丽), Zhang Gu-Ling (张谷令), Fan Song-Hua (范松华), Liu Chi-Zi (刘赤子), Yang Si-Ze (杨思泽)   

  1. Institute of Physics, Chinese Academy of Sciences, Beijing 100080, China
  • Received:2003-02-28 Revised:2003-06-03 Online:2003-11-16 Published:2005-03-16
  • Supported by:
    Project supported by the National Natural Science Foundation of China (Grant No 50071068).

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摘要： In this paper, the structures, optical and mechanical properties of diamond-like carbon films are studied, which are prepared by a self-fabricated electron cyclotron resonance microwave plasma chemical vapour deposition method at room temperature in the ambient gases of mixed acetylene and nitrogen. The morphology and microstructure of the processed film are characterized by the atomic force microscope image, Raman spectra and middle Fourier transform infrared transmittance spectra, which reveal that there is an intertwisted fibrillar diamond-like structure in the film and the film is mainly composed of sp^3 CH, sp^3 C—C, sp^2 C═C, C═N and C_{60}. The film micro-hardness and bulk modulus are measured by a nano-indenter and the refractive constant and deposition rate are also calculated.

Abstract: In this paper, the structures, optical and mechanical properties of diamond-like carbon films are studied, which are prepared by a self-fabricated electron cyclotron resonance microwave plasma chemical vapour deposition method at room temperature in the ambient gases of mixed acetylene and nitrogen. The morphology and microstructure of the processed film are characterized by the atomic force microscope image, Raman spectra and middle Fourier transform infrared transmittance spectra, which reveal that there is an intertwisted fibrillar diamond-like structure in the film and the film is mainly composed of sp$^3$ CH, sp$^3$ C—C, sp$^2$ C═C, C═N and C$_{60}$. The film micro-hardness and bulk modulus are measured by a nano-indenter and the refractive constant and deposition rate are also calculated.

Key words: ECR microwave plasma, diamond-like carbon films, AFM, FTIR

中图分类号:  (Thin film structure and morphology)

  • 68.55.-a
81.15.Gh (Chemical vapor deposition (including plasma-enhanced CVD, MOCVD, ALD, etc.)) 68.37.Ps (Atomic force microscopy (AFM)) 78.30.Hv (Other nonmetallic inorganics) 78.20.-e (Optical properties of bulk materials and thin films) 76.40.+b (Diamagnetic and cyclotron resonances)