中国物理B ›› 2003, Vol. 12 ›› Issue (11): 1257-1260.doi: 10.1088/1009-1963/12/11/313
杨武保, 王久丽, 张谷令, 范松华, 刘赤子, 杨思泽
Yang Wu-Bao (杨武保), Wang Jiu-Li (王久丽), Zhang Gu-Ling (张谷令), Fan Song-Hua (范松华), Liu Chi-Zi (刘赤子), Yang Si-Ze (杨思泽)
摘要: In this paper, the structures, optical and mechanical properties of diamond-like carbon films are studied, which are prepared by a self-fabricated electron cyclotron resonance microwave plasma chemical vapour deposition method at room temperature in the ambient gases of mixed acetylene and nitrogen. The morphology and microstructure of the processed film are characterized by the atomic force microscope image, Raman spectra and middle Fourier transform infrared transmittance spectra, which reveal that there is an intertwisted fibrillar diamond-like structure in the film and the film is mainly composed of sp^3 CH, sp^3 C—C, sp^2 C═C, C═N and C_{60}. The film micro-hardness and bulk modulus are measured by a nano-indenter and the refractive constant and deposition rate are also calculated.
中图分类号: (Thin film structure and morphology)