中国物理B ›› 2016, Vol. 25 ›› Issue (8): 88105-088105.doi: 10.1088/1674-1056/25/8/088105

• INTERDISCIPLINARY PHYSICS AND RELATED AREAS OF SCIENCE AND TECHNOLOGY • 上一篇    下一篇

Correlation of polishing-induced shallow subsurface damages with laser-induced gray haze damages in fused silica optics

Xiang He(何祥), Heng Zhao(赵恒), Gang Wang(王刚), Peifan Zhou(周佩璠), Ping Ma(马平)   

  1. Chengdu Fine Optical Engineering Research Center, Chengdu 610041, China
  • 收稿日期:2016-03-05 修回日期:2016-04-15 出版日期:2016-08-05 发布日期:2016-08-05
  • 通讯作者: Ping Ma E-mail:map@263.net

Correlation of polishing-induced shallow subsurface damages with laser-induced gray haze damages in fused silica optics

Xiang He(何祥), Heng Zhao(赵恒), Gang Wang(王刚), Peifan Zhou(周佩璠), Ping Ma(马平)   

  1. Chengdu Fine Optical Engineering Research Center, Chengdu 610041, China
  • Received:2016-03-05 Revised:2016-04-15 Online:2016-08-05 Published:2016-08-05
  • Contact: Ping Ma E-mail:map@263.net

摘要:

Laser-induced damage in fused silica optics greatly restricts the performances of laser facilities. Gray haze damage, which is always initiated on ceria polished optics, is one of the most important damage morphologies in fused silica optics. In this paper, the laser-induced gray haze damages of four fused silica samples polished with CeO2, Al2O3, ZrO2, and colloidal silica slurries are investigated. Four samples all present gray haze damages with much different damage densities. Then, the polishing-induced contaminant and subsurface damages in four samples are analyzed. The results reveal that the gray haze damages could be initiated on the samples without Ce contaminant and are inclined to show a tight correlation with the shallow subsurface damages.

关键词: laser-induced damage, polishing, subsurface damage, fused silica

Abstract:

Laser-induced damage in fused silica optics greatly restricts the performances of laser facilities. Gray haze damage, which is always initiated on ceria polished optics, is one of the most important damage morphologies in fused silica optics. In this paper, the laser-induced gray haze damages of four fused silica samples polished with CeO2, Al2O3, ZrO2, and colloidal silica slurries are investigated. Four samples all present gray haze damages with much different damage densities. Then, the polishing-induced contaminant and subsurface damages in four samples are analyzed. The results reveal that the gray haze damages could be initiated on the samples without Ce contaminant and are inclined to show a tight correlation with the shallow subsurface damages.

Key words: laser-induced damage, polishing, subsurface damage, fused silica

中图分类号:  (Pulsed laser ablation deposition)

  • 81.15.Fg
61.80.Ba (Ultraviolet, visible, and infrared radiation effects (including laser radiation)) 81.65.Ps (Polishing, grinding, surface finishing) 42.70.Ce (Glasses, quartz)