中国物理B ›› 2009, Vol. 18 ›› Issue (10): 4292-4297.doi: 10.1088/1674-1056/18/10/033

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Experimental study on microdeposition of the copper thin film by femtosecond laser-induced forward transfer

杨丽1, 王清月2   

  1. (1)Civil Aviation University of China, Tianjin 300300, China;Ultrafast Laser Laboratory, School of Precision Instruments and Optoelectronics Engineering, Tianjin University, and Laboratory of Optoelectronic Information Technical Science, EMC, Tianjin 3000; (2)Ultrafast Laser Laboratory, School of Precision Instruments and Optoelectronics Engineering, Tianjin University, and Laboratory of Optoelectronic Information Technical Science, EMC, Tianjin 300072, China
  • 收稿日期:2009-03-29 修回日期:2009-06-07 出版日期:2009-10-20 发布日期:2009-10-20
  • 基金资助:
    Project supported by the Key Grant Project of the Ministry of Education of the People's Republic of China (Grant No 10410), National Natural Science Fundation of China (Grant No 60572168) and Science Research Start-up Fund of Civil Aviation University of

Experimental study on microdeposition of the copper thin film by femtosecond laser-induced forward transfer

Yang Li(杨丽)a)b)† and Wang Ching-Yue(王清月)b)   

  1. a Civil Aviation University of China, Tianjin 300300, China; b Ultrafast Laser Laboratory, School of Precision Instruments and Optoelectronics Engineering, Tianjin University, and Laboratory of Optoelectronic Information Technical Science, EMC, Tianjin 300072, China
  • Received:2009-03-29 Revised:2009-06-07 Online:2009-10-20 Published:2009-10-20
  • Supported by:
    Project supported by the Key Grant Project of the Ministry of Education of the People's Republic of China (Grant No 10410), National Natural Science Fundation of China (Grant No 60572168) and Science Research Start-up Fund of Civil Aviation University of

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摘要： The morphologies of the deposited dots on the 40~nm-thick copper film by the femtosecond laser-induced forward transfer that depend on the irradiated laser fluence have been studied, and the variations of orderliness of the diameter of deposited dots on the quartz substrate and forward ablated dot on the donor substrate with increasing pulse fluence have been obtained experimentally. The experimental results show that a thinner copper film would generate larger-sized ablated dot and deposited dot at the threshold fluence for transfer. By x-ray diffraction measurement, it is demonstrated that the crystal form of the transferred copper films is unaltered and the size of the crystallites is diminished.

Abstract: The morphologies of the deposited dots on the 40 nm-thick copper film by the femtosecond laser-induced forward transfer that depend on the irradiated laser fluence have been studied, and the variations of orderliness of the diameter of deposited dots on the quartz substrate and forward ablated dot on the donor substrate with increasing pulse fluence have been obtained experimentally. The experimental results show that a thinner copper film would generate larger-sized ablated dot and deposited dot at the threshold fluence for transfer. By x-ray diffraction measurement, it is demonstrated that the crystal form of the transferred copper films is unaltered and the size of the crystallites is diminished.

Key words: femtosecond laser, laser-induced forward transfer, thin film, ablation, deposition

中图分类号:  (Thin film structure and morphology)

  • 68.55.-a
78.47.-p (Spectroscopy of solid state dynamics) 81.15.Fg (Pulsed laser ablation deposition)