中国物理B ›› 2005, Vol. 14 ›› Issue (6): 1181-1184.doi: 10.1088/1009-1963/14/6/021

• CLASSICAL AREAS OF PHENOMENOLOGY • 上一篇    下一篇

Formation of arrayed holes on metal foil and metal film by multibeam interfering femtosecond laser beams

赵全忠, 邱建荣, 赵崇军, 姜雄伟, 朱从善   

  1. Photon Craft Project, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences and Japan Science and Technology Agency, Shanghai 201800, China
  • 收稿日期:2004-09-16 修回日期:2004-11-24 出版日期:2005-05-27 发布日期:2005-05-27
  • 基金资助:
    Project supported by the National Natural Science Foundation of China (Grant No: 50125208), Shanghai Science and Technology Committee (Grant No: 04dz05112), China Postdoctoral Science Foundation, and K. C. Wong Education Foundation, Hong Kong.

Formation of arrayed holes on metal foil and metal film by multibeam interfering femtosecond laser beams

Zhao Quan-Zhong (赵全忠), Qiu Jian-Rong (邱建荣), Zhao Chong-Jun (赵崇军), Jiang Xiong-Wei (姜雄伟), Zhu Cong-Shan (朱从善)   

  1. Photon Craft Project, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences and Japan Science and Technology Agency, Shanghai 201800, China
  • Received:2004-09-16 Revised:2004-11-24 Online:2005-05-27 Published:2005-05-27
  • Supported by:
    Project supported by the National Natural Science Foundation of China (Grant No: 50125208), Shanghai Science and Technology Committee (Grant No: 04dz05112), China Postdoctoral Science Foundation, and K. C. Wong Education Foundation, Hong Kong.

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摘要： We report on an optical interference method to fabricate arrayed holes on metal nickel foil and aluminum film deposited on glass substrate by means of five-beam interference of femtosecond laser pulses. Optical microscope and scanning electron microscope observations revealed that arrayed holes of micrometer-order are fabricated on both metal foil and metal film. The present technique allows one-step, large-area, micrometer processing of metal materials for potential industrial applications.

Abstract: We report on an optical interference method to fabricate arrayed holes on metal nickel foil and aluminum film deposited on glass substrate by means of five-beam interference of femtosecond laser pulses. Optical microscope and scanning electron microscope observations revealed that arrayed holes of micrometer-order are fabricated on both metal foil and metal film. The present technique allows one-step, large-area, micrometer processing of metal materials for potential industrial applications.

Key words: array microstructure, interference, femtosecond laser, diffractive beam splitter

中图分类号:  (Fabrication techniques; lithography, pattern transfer)

  • 42.82.Cr
42.65.Re (Ultrafast processes; optical pulse generation and pulse compression) 42.70.Hj (Laser materials) 68.37.Hk (Scanning electron microscopy (SEM) (including EBIC))