Fabrication of Al air-bridge on coplanar waveguide

doi:10.1088/1674-1056/27/10/100310

中国物理B ›› 2018, Vol. 27 ›› Issue (10): 100310-100310.doi: 10.1088/1674-1056/27/10/100310

• SPECIAL TOPIC—Recent advances in thermoelectric materials and devices • 上一篇下一篇

Fabrication of Al air-bridge on coplanar waveguide

Zhen-Chuan Jin(金震川), Hai-Teng Wu(吴海腾), Hai-Feng Yu(于海峰), Yang Yu(于扬)

National Laboratory of Solid State Microstructures, School of Physics, Nanjing University, Nanjing 210093, China

收稿日期:2018-05-04 修回日期:2018-06-21 出版日期:2018-10-05 发布日期:2018-10-05
通讯作者: Hai-Feng Yu E-mail:hfyu@nju.edu.cn
基金资助:
Project supported by the National Key Research and Development Program of China (Grant No. 2016YFA0301802) and the National Natural Science Foundation of China (Grant Nos. 11474152, 11274156, 11504165, and 61521001).

Fabrication of Al air-bridge on coplanar waveguide

Zhen-Chuan Jin(金震川), Hai-Teng Wu(吴海腾), Hai-Feng Yu(于海峰), Yang Yu(于扬)

National Laboratory of Solid State Microstructures, School of Physics, Nanjing University, Nanjing 210093, China

Received:2018-05-04 Revised:2018-06-21 Online:2018-10-05 Published:2018-10-05
Contact: Hai-Feng Yu E-mail:hfyu@nju.edu.cn
Supported by:
Project supported by the National Key Research and Development Program of China (Grant No. 2016YFA0301802) and the National Natural Science Foundation of China (Grant Nos. 11474152, 11274156, 11504165, and 61521001).

摘要/Abstract

摘要：

Superconducting coplanar waveguide (CPW) can be widely used as two-dimensional (2D) resonator, transmission line or feedline, providing an important component for superconducting quantum circuit which is a promising candidate for quantum information processing. Due to the discontinuities and asymmetries in the ground planes, CPW usually exhibits the spurious resonance, which is a common source of decoherence in circuit quantum electrodynamics experiments. To mitigate the spurious resonance, we fabricated superconducting aluminum air-bridges on Nb CPW. The fabricated air-bridges are approximately 3 μ high and up to 120 μ long. Compared with other methods, the fabrication procedures of our air-bridges are simpler, and the air-bridge can withstand strong ultrasound.

关键词: air-bridge, fabrication, superconducting coplanar waveguide

Abstract:

Key words: air-bridge, fabrication, superconducting coplanar waveguide

中图分类号: (Quantum computation architectures and implementations)

03.67.Lx

42.82.Cr (Fabrication techniques; lithography, pattern transfer) 85.25.-j (Superconducting devices)

金震川, 吴海腾, 于海峰, 于扬. Fabrication of Al air-bridge on coplanar waveguide[J]. 中国物理B, 2018, 27(10): 100310-100310.

Zhen-Chuan Jin(金震川), Hai-Teng Wu(吴海腾), Hai-Feng Yu(于海峰), Yang Yu(于扬). Fabrication of Al air-bridge on coplanar waveguide[J]. Chin. Phys. B, 2018, 27(10): 100310-100310.

参考文献 19

[1]	Wendin G 2017 Rep. Prog. Phys. 80 106001 doi: 10.1088/1361-6633/aa7e1a
[2]	Devoret M H and Schoelkopf R J 2013 Science 339 1169 doi: 10.1126/science.1231930
[3]	Gu X, Kockum A F, Miranowicz A, Liu Y X and Nori F 2017 Phys. Rep. 718
[4]	Blais A, Huang R S, Wallraff A, Girvin S M and Schoelkopf R J 2004 Phys. Rev. A 69 062320 doi: 10.1103/PhysRevA.69.062320
[5]	You J Q and Nori F 2003 Phys. Rev. B 68 064509 doi: 10.1103/PhysRevB.68.064509
[6]	Koch J, Yu T M, Gambetta J, Houck A A, Schuster D I, Majer J, Blais A, Devoret M H, Girvin S M and Schoelkopf R J 2007 Phys. Rev. A 76 042319 doi: 10.1103/PhysRevA.76.042319
[7]	Wen C P 1969 IEEE Trans. Microwave Theory Techniq. 17 1087 doi: 10.1109/TMTT.1969.1127105
[8]	Wallraff A, Schuster D I, Blais A, Frunzio L, Majer J, Girvin S M and Schoelkopf R J 2005 Phys. Rev. Lett. 95 060501 doi: 10.1103/PhysRevLett.95.060501
[9]	Majer J, Chow J M, Gambetta J M, Koch J, Johnson B R, Schreier J A, Frunzio L, Schuster D I, Houck A A, Wallraff A, Blais A, Devoret M H, Girvin S M and Schoelkopf R J 2007 Nature 449 443 doi: 10.1038/nature06184
[10]	Ponchak G E, Papapolymerou J and Tentzeris M M 2005 IEEE Trans. Microwave Theory Techniq. 53 713 doi: 10.1109/TMTT.2004.840571
[11]	Liaw H J and Merkelo H 1997 IEEE Circ. Dev. Mag. 13 22 doi: 10.1109/101.646555
[12]	Schuster C and Fichtner W 2001 IEEE Trans. Electromagn. Compat. 43 416 doi: 10.1109/15.974621
[13]	Harokopus W and Katehi P 1991 IEEE MTT-S Int. Microwave Symp. Dig. 743-746
[14]	Houck A A, Schreier J A, Johnson B R, Chow J M, Koch J, Gambetta J M, Schuster D I, Frunzio L, Devoret M H, Girvin S M and Schoelkopf R J 2008 Phys. Rev. Lett. 101 080502 doi: 10.1103/PhysRevLett.101.080502
[15]	Chen Zijun, Megrant A, Kelly J, Barends R, Bochmann J, Chen Yu, Chiaro B, Dunsworth A, Jeffrey E, Mutus J Y, O'Malley P J J, Neill C, Roushan P, Sank D, Vainsencher A, Wenner J, White T C, Cleland A N and Martinis J M 2014 Appl. Phys. Lett. 104 052602 doi: 10.1063/1.4863745
[16]	Lankwarden Y J Y, Endo A, Baselmans J J A and Bruijn M P 2012 J. Low Temp. Phys. 167 367 doi: 10.1007/s10909-012-0503-0
[17]	Dunsworth A, Megrant A, Barends R, Chen Yu, Chen Zijun, Chiaro B, Fowler A, Foxen B, Jeffrey E, Kelly J, Klimov P V, Lucero E, Mutus J Y, Neeley M, Neill C, Quintana C,Roushan P, Sank D,Vainsencher A, Wenner J, White T C, Neven H and Martinis J M 2018 Appl. Phys. Lett. 112 0563502
[18]	Abuwasib M, Krantz P and Delsing P 2013 J. Vac. Sci. Tech. B 31 031601
[19]	Dhakal R, Wang Cong, Kim Eun-Seong and Kimb Nam-Young 2015 Appl. Phys. Lett. 106 073702 doi: 10.1063/1.4909545

Fabrication of Al air-bridge on coplanar waveguide

Fabrication of Al air-bridge on coplanar waveguide

RichHTML

PDF (PC)

赞

可视化

摘要/Abstract

引用本文

使用本文

参考文献 19

相关文章 15

Metrics

本文评价

推荐阅读 0

[1]	Le Zhou(周乐), Hongwen Zhang(张洪文), Qian Zhao(赵倩), and Weiping Cai(蔡伟平). Onion-structured transition metal dichalcogenide nanoparticles by laser fabrication in liquids and atmospheres[J]. 中国物理B, 2022, 31(7): 76106-076106.
[2]	Zi-Xi Pei(裴子玺), Wei-Gui Guo(郭伟贵), and Xiang-Gang Qiu(邱祥冈). Dynamic vortex Mott transition in triangular superconducting arrays[J]. 中国物理B, 2022, 31(3): 37404-037404.
[3]	Ke He(何珂). Molecular beam epitaxy growth of quantum devices[J]. 中国物理B, 2022, 31(12): 126804-126804.
[4]	Hang Su(苏杭), Kun Zhu(朱坤), Jing Qin(钦敬), Mengyao Li(李梦瑶), Yulin Zuo(左郁琳), Yunzheng Wang(王允正), Yinggang Wu(吴迎港), Jiawei Cao(曹佳维), and Guolong Li(李国龙). Large-area fabrication: The next target of perovskite light-emitting diodes[J]. 中国物理B, 2021, 30(8): 88502-088502.
[5]	Hong-Jun Zhang(张宏俊), Ji Wen(文继), Zhao-Hong Mo(莫钊洪), Hong-Rui Liu(刘鸿瑞), Xiao-Dong Wang(汪小东), Zhong-Hua Xiong(熊忠华), Jin-Wen Zhang(张锦文), and Mao-Bing Shuai(帅茂兵). Design, fabrication, and characterization of Ti/Au transition-edge sensor with different dimensions of suspended beams[J]. 中国物理B, 2021, 30(11): 117401-117401.
[6]	Feifan Su(宿非凡), Zhaohua Yang(杨钊华), Shoukuan Zhao(赵寿宽), Haisheng Yan(严海生), Ziting Wang(王子婷), Xiaohui Song(宋小会), Ye Tian(田野), and Shiping Zhao(赵士平). Fabrication and characterization of superconducting multiqubit device with niobium base layer[J]. 中国物理B, 2021, 30(10): 100304-100304.
[7]	宋志朋, 雷宝, 曹云, 戚竞, 彭浩, 汪琴, 黄立, 路红亮, 林晓, 王业亮, 杜世萱, 高鸿钧. Epitaxial fabrication of two-dimensional TiTe₂ monolayer on Au(111) substrate with Te as buffer layer[J]. 中国物理B, 2019, 28(5): 56801-056801.
[8]	王伟奇, 吉利, 李红轩, 刘晓红, 周惠娣, 陈建敏. Controllable fabrication of self-organized nano-multilayers in copper-carbon films[J]. 中国物理B, 2019, 28(3): 36802-036802.
[9]	宿非凡, 王子婷, 徐晖凯, 赵寿宽, 严海生, 杨钊华, 田野, 赵士平. Nb-based Josephson parametric amplifier for superconducting qubit measurement[J]. 中国物理B, 2019, 28(11): 110303-110303.
[10]	刘墨南, 李木天, 杨罕, 孙洪波. Etching-assisted femtosecond laser microfabrication[J]. 中国物理B, 2018, 27(9): 94212-094212.
[11]	冯静静, 祝薇, 邓元. An overview of thermoelectric films: Fabrication techniques, classification, and regulation methods[J]. 中国物理B, 2018, 27(4): 47210-047210.
[12]	黄克强, 郭秋江, 宋超, 郑亚锐, 邓辉, 吴玉林, 金贻荣, 朱晓波, 郑东宁. Fabrication and characterization of ultra-low noise narrow and wide band Josephson parametric amplifiers[J]. 中国物理B, 2017, 26(9): 94203-094203.
[13]	刘乐, 徐林林, 张华, 陈明. Laser-induced convenient fabrication of CdS nanocages with super-adsorption capability for methyl blue solution[J]. 中国物理B, 2017, 26(8): 85206-085206.
[14]	郑佳欣, 马晓华, 卢阳, 赵博超, 张恒爽, 张濛, 陈丽香, 朱青, 郝跃. The coupling effect of air-bridges on broadband spiral inductors in SiC-based MMIC technology[J]. 中国物理B, 2017, 26(8): 88401-088401.
[15]	张晋新, 贺朝会, 郭红霞, 李培, 郭宝龙, 吴宪祥. Three-dimensional simulation of fabrication process-dependent effects on single event effects of SiGe heterojunction bipolar transistor[J]. 中国物理B, 2017, 26(8): 88502-088502.