Hot-embossing fabrication of chalcogenide glasses rib waveguide for mid-infrared molecular sensing

doi:10.1088/1674-1056/26/2/024213

中国物理B ›› 2017, Vol. 26 ›› Issue (2): 24213-024213.doi: 10.1088/1674-1056/26/2/024213

• ELECTROMAGNETISM, OPTICS, ACOUSTICS, HEAT TRANSFER, CLASSICAL MECHANICS, AND FLUID DYNAMICS • 上一篇下一篇

Hot-embossing fabrication of chalcogenide glasses rib waveguide for mid-infrared molecular sensing

Ting-Yang Yan(颜庭阳), Xiang Shen(沈祥), Rong-Ping Wang(王荣平), Guo-Xiang Wang(王国祥), Shi-Xun Dai(戴世勋), Tie-Feng Xu(徐铁峰), Qiu-Hua Nie(聂秋华)

1 Laboratory of Infrared Material and Devices, Advanced Technology Research Institute, Ningbo University, Ningbo 315211, China;
2 Key Laboratory of Photoelectric Materials and Devices of Zhejiang Province, Ningbo 315211, China;
3 The Australian National University, Canberra, ACT 2600, Australia

收稿日期:2016-09-20 修回日期:2016-12-05 出版日期:2017-02-05 发布日期:2017-02-05
通讯作者: Xiang Shen E-mail:shenxiang@nbu.edu.cn
基金资助:
Project supported by the National Natural Science Foundation of China (Grant No. 61377061), the Public Project of Zhejiang Province, China (Grant No. 2014C31146), and sponsored by K. C. Wong Magna Fund in Ningbo University, China.

Hot-embossing fabrication of chalcogenide glasses rib waveguide for mid-infrared molecular sensing

Ting-Yang Yan(颜庭阳)^1,2, Xiang Shen(沈祥)^1,2, Rong-Ping Wang(王荣平)³, Guo-Xiang Wang(王国祥)^1,2, Shi-Xun Dai(戴世勋)^1,2, Tie-Feng Xu(徐铁峰)^1,2, Qiu-Hua Nie(聂秋华)^1,2

1 Laboratory of Infrared Material and Devices, Advanced Technology Research Institute, Ningbo University, Ningbo 315211, China;
2 Key Laboratory of Photoelectric Materials and Devices of Zhejiang Province, Ningbo 315211, China;
3 The Australian National University, Canberra, ACT 2600, Australia

Received:2016-09-20 Revised:2016-12-05 Online:2017-02-05 Published:2017-02-05
Contact: Xiang Shen E-mail:shenxiang@nbu.edu.cn
Supported by:
Project supported by the National Natural Science Foundation of China (Grant No. 61377061), the Public Project of Zhejiang Province, China (Grant No. 2014C31146), and sponsored by K. C. Wong Magna Fund in Ningbo University, China.

摘要/Abstract

摘要： Chalcogenide glasses have shown promise in fabricating mid infrared (MIR) photonic sensing devices due to their excellent optical properties in MIR. In addition, the glass transition temperature of chalcogenide glasses are generally low, making them ideal to create the high-throughput patterns of micro-scale structures based on hot embossing that is alternative to the standard lithographic technology. In this paper, we outline the research progress in the chalcogenide waveguide based on the hot embossing method, and discuss the problems remaining to be solved and the possible solutions.

关键词: chalcogenide glasses, hot embossing, rib waveguides, MIR sensing

Abstract: Chalcogenide glasses have shown promise in fabricating mid infrared (MIR) photonic sensing devices due to their excellent optical properties in MIR. In addition, the glass transition temperature of chalcogenide glasses are generally low, making them ideal to create the high-throughput patterns of micro-scale structures based on hot embossing that is alternative to the standard lithographic technology. In this paper, we outline the research progress in the chalcogenide waveguide based on the hot embossing method, and discuss the problems remaining to be solved and the possible solutions.

Key words: chalcogenide glasses, hot embossing, rib waveguides, MIR sensing

中图分类号: (Optical waveguides and couplers)

42.79.Gn

42.82.Cr (Fabrication techniques; lithography, pattern transfer) 71.23.Cq (Amorphous semiconductors, metallic glasses, glasses) 07.07.Df (Sensors (chemical, optical, electrical, movement, gas, etc.); remote sensing)

颜庭阳, 沈祥, 王荣平, 王国祥, 戴世勋, 徐铁峰, 聂秋华. Hot-embossing fabrication of chalcogenide glasses rib waveguide for mid-infrared molecular sensing[J]. 中国物理B, 2017, 26(2): 24213-024213.

Ting-Yang Yan(颜庭阳), Xiang Shen(沈祥), Rong-Ping Wang(王荣平), Guo-Xiang Wang(王国祥), Shi-Xun Dai(戴世勋), Tie-Feng Xu(徐铁峰), Qiu-Hua Nie(聂秋华). Hot-embossing fabrication of chalcogenide glasses rib waveguide for mid-infrared molecular sensing[J]. Chin. Phys. B, 2017, 26(2): 24213-024213.

参考文献 39

[1]	Seddon A B 2011 Int. J. Appl. Glass Sci. 2 177
[2]	Tsay C, Mujagić E, Madsen C K, Gmachl C F and Arnold C B 2010 Opt. Express 18 15523
[3]	Ródenas A, Martin G, Arezki B, Psaila N, Jose G, Jha A, Labadie L, Kern P, Kar A and Thomson R 2012 Opt. Lett. 37 392
[4]	Zakery A and Elliott S R 2003 J. Non-Cryst. Solids 330 1
[5]	Eggleton B J, Luther-Davies B and Richardson K 2011 Nat. Photon. 5 141
[6]	Charrier J, Brandily M L, Lhermite H, Michel K, Bureau B, Verger F and Nazabal V 2012 Sensors and Actuators B 173 468
[7]	Anne M L, Keirsse J, Nazabal V, Hyodo K, Inoue S, Boussard-Pledel C, Lhermite H, Charrier J, Yanakata K Loreal O, Person J L, Colas F, Compére C and Bureau B 2009 Sensors 9 7398
[8]	Bessonov A F, Gudzenko A I, Deryugin L N, Komotskii V A, Pogosov G A, Sotin V E and Terichev V F 1976 Sov. J. Quantum Electron. 6 1248
[9]	Viens J F, Meneghini C, Villeneuve A, Galstian T V, Knystautas E J, Duguay M A, Richardson K A and Cardinal T 2002 J. Lightwave Technol. 17 1184
[10]	Choi D Y, Madden S, Bulla D, Rode A, Wang R P and Luthe-Davies B 2011 Phys. Status Solidi C 8 3183
[11]	Hu J, Tarasov V, Carlie N, Petit L, Agarwal A, Richardson K and Kimerling L 2008 Opt. Mater. 30 1560
[12]	Ruan Y L, Li W T, Jarvis R, Madsen N, Rode A and Luther-Davies B 2004 Opt. Express 12 5140
[13]	Madden S J, Choi D Y, Bulla D A, Rode A V, Luther-Davies B, Ta'eed V G, Pelusi M D and Eggleton B J 2007 Opt. Express 15 14414
[14]	Chou S Y, Krauss P R and Renstrom P J 1995 Appl. Phys. Lett. 67 3114
[15]	Chou S Y, Krauss P R and Renstrom P J 1996 J. Vac. Sci. Technol. B 14 4129
[16]	Guo L J 2004 J. Phys. D: Appl. Phys. 37 R123
[17]	Schift H 2008 J. Vac. Sci. Technol. B 26 458
[18]	Yoon K B, Choi C-G and Han S-P 2004 Jpn. J. Appl. Phys. 43 3450
[19]	Seddon A, Pan W, Furniss D, Miller C, Rowe H, Zhang D, McBrearty E, Zhang Y, Loni A and Sewell P 2006 J. Non-Cryst. Solids 352 2515
[20]	Pan W J, Furniss D, Rowe H, Miller C A, Loni A, Sewell P, Benson T M and Seddon A B 2007 J. Non-Cryst. Solids 353 1302
[21]	Pan W J, Rowe H, Zhang D K, Zhang Y J, Loni A, Furniss D, Sewell P, Benson T M and Seddon A B 2008 Microw. Opt. Technol. Lett. 50 1961
[22]	Lian Z G, Pan W J, Furniss D, Benson T M, Seddon A B, Kohoutek T, Orava J and Wagner T 2009 Opt. Lett. 34 1234
[23]	Abdel-Moneim N S, Mellor C J, Benson T M, Furniss D and Seddon A B 2015 Opt. Quantum Electron. 47 351
[24]	Han T, Madden S, Bulla D and Luther-Davies B 2010 Opt. Express 18 19286
[25]	Han T, Madden S, Debbarma S and Luther-Davies B 2011 Opt. Express 19 25447
[26]	Seddon A B, Abdel-Moneim N S, Zhang L, Pan W J, Furniss D, Mellor C J, Kohoutek T, Orava J, Wagner T and Benson T M 2014 Opt. Eng. 53 71824
[27]	Orava J, Kohoutek T, Greer A L and Fudouzi H 2011 Opt. Mater. Express 1 796
[28]	Viheriälä J, Niemi T, Kontio J, Rytkönen T and Pessa M 2007 Electron. Lett. 43 150
[29]	Musgraves J D, Richardson K and Jain H 2011 Opt. Mater. Express 1 921
[30]	Baker N J, Lee H W, Littler I C, de Sterke C M, Eggleton B J, Choi D-Y, Madden S and Luther-Davies B 2006 Opt. Express 14 9451
[31]	Miura K, Qiu J, Inouye H, Mitsuyu T and Hirao K 1997 Appl. Phys. Lett. 71 3329
[32]	Galstyan T V, Viens J F, Villeneuve A, Richardson K and Duguay M 1997 J. Lightwave Technol. 15 1343
[33]	Miura K, Inouye H, Qiu J, Mitsuyu T and Hirao K 1998 Nucl. Instrum. Methods Phys. Res., Sect. B 141 726
[34]	Seddon A B 1995 J. Non-Cryst. Solids 184 44
[35]	Zakery A and Elliott S R 2007 Optical nonlinearities in chalcogenide glasses and their applications (Berlin/Heidelberg: Springer) pp. 1-201
[36]	Vigreux-Bercovici C, Labadie L, Broquin J E, Kern P and Pradel A 2005 J. Optoelectron. Adv. Mater. 7 2625
[37]	Balan V, Vigreux C and Pradel A 2004 J. Optoelectron. Adv. Mater. 6 875
[38]	Zou Y, Lin H, Li L, Danto S, Musgraves J D, Richardson K and Hu J 2013 CLEO: Science and Innovations, June 9-14, 2013, San Jose, California, USA, CTh1J. 5
[39]	Schmid H and Michel B 2000 Macromolecules 33 3042

Hot-embossing fabrication of chalcogenide glasses rib waveguide for mid-infrared molecular sensing

Hot-embossing fabrication of chalcogenide glasses rib waveguide for mid-infrared molecular sensing

RichHTML

PDF (PC)

赞

可视化

摘要/Abstract

引用本文

使用本文

参考文献 39

相关文章 5

Metrics

本文评价

推荐阅读 0

[1]	张潇予, 陈飞飞, 章向华, 季伟. Research progress of third-order optical nonlinearity of chalcogenide glasses[J]. 中国物理B, 2018, 27(8): 84208-084208.
[2]	杨安平, 邱嘉桦, 张鸣杰, 孙明阳, 杨志勇. Mid-infrared luminescence of Dy³⁺-doped Ga₂S₃-Sb₂S₃-CsI chalcohalide glasses[J]. 中国物理B, 2018, 27(7): 77105-077105.
[3]	韦宁宁, 杨振, 潘宏波, 张凡, 刘永兴, 王荣平, 沈祥, 戴世勋, 聂秋华. Variable angle spectroscopic ellipsometry and its applications in determining optical constants of chalcogenide glasses in infrared[J]. 中国物理B, 2018, 27(6): 67802-067802.
[4]	许思维, 王荣平, 杨志勇, 王丽, Luther-Davies Barry. Homopolar bonds in Se-rich Ge—As—Se chalcogenide glasses[J]. 中国物理B, 2016, 25(5): 57105-057105.
[5]	王振伟, 王学锋, 刘春玲, 赵修建, 向红, 余家国, 龚旗煌, 顾少轩. Structure dependence of ultrafast third-order optical nonlinearity for Ge—Ga—Cd sulfide glasses[J]. 中国物理B, 2005, 14(3): 551-555.