A functional probe with bowtie aperture and bull's eye structure for nanolithograph

doi:10.1088/1674-1056/21/10/107302

中国物理B ›› 2012, Vol. 21 ›› Issue (10): 107302-107302.doi: 10.1088/1674-1056/21/10/107302

• CONDENSED MATTER: ELECTRONIC STRUCTURE, ELECTRICAL, MAGNETIC, AND OPTICAL PROPERTIES • 上一篇下一篇

A functional probe with bowtie aperture and bull's eye structure for nanolithograph

王硕^a, 李旭峰^b, 王乔^a, 郭英楠^a, 潘石^a

a School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116024, China;
b School of Applied Science, Taiyuan University of Science and Technology, Taiyuan 030024, China

收稿日期:2012-02-22 修回日期:2012-06-12 出版日期:2012-09-01 发布日期:2012-09-01
基金资助:
Project supported by the National Natural Science Foundation of China (Grant Nos. 10974025 and 61137005).

A functional probe with bowtie aperture and bull's eye structure for nanolithograph

Wang Shuo (王硕)^a, Li Xu-Feng (李旭峰)^b, Wang Qiao (王乔)^a, Guo Ying-Yan (郭英楠)^a, Pan Shi (潘石)^a

a School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116024, China;
b School of Applied Science, Taiyuan University of Science and Technology, Taiyuan 030024, China

Received:2012-02-22 Revised:2012-06-12 Online:2012-09-01 Published:2012-09-01
Contact: Li Xu-Feng, Pan Shi E-mail:xfli@mail.dlut.edu.cn; span@dlut.edu.cn
Supported by:
Project supported by the National Natural Science Foundation of China (Grant Nos. 10974025 and 61137005).

摘要/Abstract

摘要： The bowtie aperture surrounded by concentric gratings (the bull's eye structure) integrated on the near-field scanning optical microscopy (NSOM) probe (aluminum coated fiber tip) for nanolithography has been investigated using the finite-difference time domain (FDTD) method. By modifying the parameters of the bowtie aperture and the concentric gratings, a maximal field enhancement factor of 391.69 has been achieved, which is 18 times larger than that obtained from the single bowtie aperture. Additionally, the light spot depends on the gap size of the bowtie aperture and can be confined to sub-wavelength. The superiority of the combination of the bowtie aperture and the bull's eye structure is confirmed, and the mechanism for the electric field enhancement in this derived structure is analyzed.

关键词: surface plasmon polariton, nanolithography, finite difference time domain method

Abstract: The bowtie aperture surrounded by concentric gratings (the bull's eye structure) integrated on the near-field scanning optical microscopy (NSOM) probe (aluminum coated fiber tip) for nanolithography has been investigated using the finite-difference time domain (FDTD) method. By modifying the parameters of the bowtie aperture and the concentric gratings, a maximal field enhancement factor of 391.69 has been achieved, which is 18 times larger than that obtained from the single bowtie aperture. Additionally, the light spot depends on the gap size of the bowtie aperture and can be confined to sub-wavelength. The superiority of the combination of the bowtie aperture and the bull's eye structure is confirmed, and the mechanism for the electric field enhancement in this derived structure is analyzed.

Key words: surface plasmon polariton, nanolithography, finite difference time domain method

中图分类号: (Collective excitations (including excitons, polarons, plasmons and other charge-density excitations))

73.20.Mf

42.82.Cr (Fabrication techniques; lithography, pattern transfer) 02.60.Cb (Numerical simulation; solution of equations)

王硕, 李旭峰, 王乔, 郭英楠, 潘石. A functional probe with bowtie aperture and bull's eye structure for nanolithograph[J]. 中国物理B, 2012, 21(10): 107302-107302.

Wang Shuo (王硕), Li Xu-Feng (李旭峰), Wang Qiao (王乔), Guo Ying-Yan (郭英楠), Pan Shi (潘石). A functional probe with bowtie aperture and bull's eye structure for nanolithograph[J]. Chin. Phys. B, 2012, 21(10): 107302-107302.

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A functional probe with bowtie aperture and bull's eye structure for nanolithograph

A functional probe with bowtie aperture and bull's eye structure for nanolithograph

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