中国物理B ›› 2003, Vol. 12 ›› Issue (3): 325-327.doi: 10.1088/1009-1963/12/3/314
韩德栋, 康晋锋, 林长海, 韩汝琦
Han De-Dong (韩德栋), Kang Jin-Feng (康晋锋), Lin Chang-Hai (林长海), Han Ru-Qi (韩汝琦)
摘要: Ultra-thin HfO_2 gate-dielectric films were fabricated by ion-beam sputtering a sintered HfO_2 target and subsequently annealed at different temperatures and atmospheres. We have studied the capacitance-voltage, current-voltage, and breakdown characteristics of the gate dielectrics. The results show that electrical characteristics of HfO_2 gate dielectric are related to the annealing temperature. With increase annealing temperature, the largest value of capacitance decreases, the equivalent oxide thickness increases, the leakage current reduces, and the breakdown voltage decreases.
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