Positronium diffusion in porous methylsilsesquioxanethin films

doi:10.1088/1674-1056/19/1/013601

中国物理B ›› 2010, Vol. 19 ›› Issue (1): 13601-13601.doi: 10.1088/1674-1056/19/1/013601

• ATOMIC AND MOLECULAR PHYSICS • 上一篇下一篇

Positronium diffusion in porous methylsilsesquioxanethin films

胡一帆¹, 董锡杰², 吴玉莹²

(1)School of Physics, Huazhong University of Science and Technology, Wuhan 430074, China; (2)Wuhan High Magnetic Field Center, Huazhong University of Science and Technology, Wuhan 430074, China;School of Physics, Huazhong University of Science and Technology, Wuhan 430074, China

收稿日期:2008-10-07 修回日期:2009-08-13 出版日期:2010-01-15 发布日期:2010-01-15
基金资助:
Project supported by the National Natural Science Foundation of China (Grant No. 60476011).

Positronium diffusion in porous methylsilsesquioxanethin films

Dong Xi-Jie(董锡杰)^a)b), Hu Yi-Fan(胡一帆)^b)†, and Wu Yu-Ying(吴玉莹)^a)b)

^a Wuhan High Magnetic Field Center, Huazhong University of Science and Technology, Wuhan 430074, China; ^b School of Physics, Huazhong University of Science and Technology, Wuhan 430074, China

Received:2008-10-07 Revised:2009-08-13 Online:2010-01-15 Published:2010-01-15
Supported by:
Project supported by the National Natural Science Foundation of China (Grant No. 60476011).

摘要/Abstract

摘要： Depth profiled positronium (Ps) annihilation lifetime spectroscopy (PALS) is an extremely useful probe of the pore characteristics in nanoporous low-dielectric (low-k) constant thin films. PALS has also been considered as a potential probe to investigate diffusion barrier integrity and the structural changes of porous low-k films during their integration with Cu. Hence, it is essential to understand the diffusion behaviour of positronium/Cu atoms in the films. In this work, based on the fact that porous materials possess characteristics of statistical self-similarity, a fractal model, the Menger sponge model, has been applied to simulate the structure of a promising dielectric, porous methylsilsesquioxane (MSQ) films. The diffusion behaviour of Ps out of the fractal model and into the surrounding vacuum is studied by means of the diffusion equation and traditional advective--diffusive theory. Predictive results from our model show good agreement with measurement data.

Abstract: Depth profiled positronium (Ps) annihilation lifetime spectroscopy (PALS) is an extremely useful probe of the pore characteristics in nanoporous low-dielectric (low-k) constant thin films. PALS has also been considered as a potential probe to investigate diffusion barrier integrity and the structural changes of porous low-k films during their integration with Cu. Hence, it is essential to understand the diffusion behaviour of positronium/Cu atoms in the films. In this work, based on the fact that porous materials possess characteristics of statistical self-similarity, a fractal model, the Menger sponge model, has been applied to simulate the structure of a promising dielectric, porous methylsilsesquioxane (MSQ) films. The diffusion behaviour of Ps out of the fractal model and into the surrounding vacuum is studied by means of the diffusion equation and traditional advective--diffusive theory. Predictive results from our model show good agreement with measurement data.

Key words: positronium, porous methylsisesquioxane thin films, low-k, Menger sponge model

中图分类号: (Positron annihilation)

78.70.Bj

66.30.Ny (Chemical interdiffusion; diffusion barriers) 66.30.Pa (Diffusion in nanoscale solids) 77.22.Ch (Permittivity (dielectric function)) 78.66.Qn (Polymers; organic compounds)

董锡杰, 胡一帆, 吴玉莹. Positronium diffusion in porous methylsilsesquioxanethin films[J]. 中国物理B, 2010, 19(1): 13601-13601.

Dong Xi-Jie(董锡杰), Hu Yi-Fan(胡一帆), and Wu Yu-Ying(吴玉莹). Positronium diffusion in porous methylsilsesquioxanethin films[J]. Chin. Phys. B, 2010, 19(1): 13601-13601.

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Positronium diffusion in porous methylsilsesquioxanethin films

Positronium diffusion in porous methylsilsesquioxanethin films

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