中国物理B ›› 2017, Vol. 26 ›› Issue (4): 47307-047307.doi: 10.1088/1674-1056/26/4/047307
所属专题: TOPICAL REVIEW — ZnO-related materials and devices
• TOPICAL REVIEW—ZnO-related materials and devices • 上一篇 下一篇
Yong-Hui Zhang(张永晖), Zeng-Xia Mei(梅增霞), Hui-Li Liang(梁会力), Xiao-Long Du(杜小龙)
收稿日期:
2016-09-14
修回日期:
2017-01-24
出版日期:
2017-04-05
发布日期:
2017-04-05
通讯作者:
Zeng-Xia Mei, Xiao-Long Du
E-mail:zxmei@iphy.ac.cn;xldu@iphy.ac.cn
基金资助:
Project supported by the National Natural Science Foundation of China (Grants Nos. 61306011, 11274366, 51272280, 11674405, and 11675280).
Yong-Hui Zhang(张永晖)1, Zeng-Xia Mei(梅增霞)1, Hui-Li Liang(梁会力)1, Xiao-Long Du(杜小龙)1,2
Received:
2016-09-14
Revised:
2017-01-24
Online:
2017-04-05
Published:
2017-04-05
Contact:
Zeng-Xia Mei, Xiao-Long Du
E-mail:zxmei@iphy.ac.cn;xldu@iphy.ac.cn
Supported by:
Project supported by the National Natural Science Foundation of China (Grants Nos. 61306011, 11274366, 51272280, 11674405, and 11675280).
摘要:
Flexible and transparent electronics enters into a new era of electronic technologies. Ubiquitous applications involve wearable electronics, biosensors, flexible transparent displays, radio-frequency identifications (RFIDs), etc. Zinc oxide (ZnO) and relevant materials are the most commonly used inorganic semiconductors in flexible and transparent devices, owing to their high electrical performances, together with low processing temperatures and good optical transparencies. In this paper, we review recent advances in flexible and transparent thin-film transistors (TFTs) based on ZnO and relevant materials. After a brief introduction, the main progress of the preparation of each component (substrate, electrodes, channel and dielectrics) is summarized and discussed. Then, the effect of mechanical bending on electrical performance is highlighted. Finally, we suggest the challenges and opportunities in future investigations.
中图分类号: (II-VI semiconductors)
张永晖, 梅增霞, 梁会力, 杜小龙. Review of flexible and transparent thin-film transistors based on zinc oxide and related materials[J]. 中国物理B, 2017, 26(4): 47307-047307.
Yong-Hui Zhang(张永晖), Zeng-Xia Mei(梅增霞), Hui-Li Liang(梁会力), Xiao-Long Du(杜小龙). Review of flexible and transparent thin-film transistors based on zinc oxide and related materials[J]. Chin. Phys. B, 2017, 26(4): 47307-047307.
[1] | Hoffman R L, Norris B J and Wager J F 2003 Appl. Phys. Lett. 82 733 |
[2] | Nomura K, Ohta H, Ueda K, Kamiya T, Hirano M and Hosono H 2003 Science 300 1269 |
[3] | Wager J F 2003 Science 300 1245 |
[4] | Nomura K, Ohta H, Takagi A, Kamiya T, Hirano M and Hosono H 2004 Nature 432 488 |
[5] | Carcia P F, McLean R S, Reilly M H and Nunes G Jr 2003 Appl. Phys. Lett. 82 1117 |
[6] | Park J S, Kim T W, Stryakhilev D, Lee J S, An S G, Pyo Y S, Lee D B, Mo Y G, Jin D U and Chung H K 2009 Appl. Phys. Lett. 95 13503 |
[7] | Tripathi A K, Smits E C P, van der Putten J B P H, van Neer M, Myny K, Nag M, Steudel S, Vicca P, O'Neill K, van Veenendaal E, Genoe J, Heremans P and Gelinck G H 2011 Appl. Phys. Lett. 98 162102 |
[8] | Reyes P I, Ku C J, Duan Z, Lu Y, Solanki A and Lee K B 2011 Appl. Phys. Lett. 98 173702 |
[9] | Kamiya T and Hosono H 2010 Npg Asia Mater. 2 15 |
[10] | Dagdeviren C, Hwang S W, Su Y, Kim S, Cheng H, Gur O, Haney R, Omenetto F G, Huang Y and Rogers J A 2013 Small 9 3398 |
[11] | Fortunato E, Barquinha P and Martins R 2012 Adv. Mater. 24 2945 |
[12] | Petti L, Münzenrieder N, Vogt C, Faber H, Büthe L, Cantarella G, Bottacchi F, Anthopoulos T D and Tröster G 2016 Appl. Phys. Rev. 3 21303 |
[13] | Cherenack K, Zysset C, Kinkeldei T, Münzenrieder N and Tröster G 2010 Adv. Mater. 22 5178 |
[14] | Lee S, Jeon S, Chaji R and Nathan A 2015 Proc. IEEE 103 644 |
[15] | Makarov D, Melzer M, Karnaushenko D and Schmidt O G 2016 Appl. Phys. Rev. 3 11101 |
[16] | Karnaushenko D, Münzenrieder N, Karnaushenko D D, Koch B, Meyer A K, Baunack S, Petti L, Tröster G, Makarov D and Schmidt O G 2015 Adv. Mater. 27 6797 |
[17] | Münzenrieder N, Cantarella G, Vogt C, Petti L, Büthe L, Salvatore G A, Fang Y, Andri R, Lam Y, Libanori R, Widner D, Studart A R and Tröster G 2015 Adv. Electron. Mater. 1 1400038 |
[18] | Kwon J Y, Lee D J and Kim K B 2011 Electron. Mater. Lett. 7 1 |
[19] | Ahn B D, Jeon H J, Sheng J, Park J and Park J S 2015 Semicond. Sci. Technol. 30 64001 |
[20] | Mativenga M, Geng D, Kim B and Jang J 2015 ACS Appl. Mater. Interfaces 7 1578 |
[21] | Kim S J, Yoon S and Kim H J 2014 Jpn. J. Appl. Phys. 53 02BA02 |
[22] | Romeo A and Lacour SP 2015 37th Annual International Conference of the IEEE Engineering in Medicine and Biology Society (EMBC), August 25-29, 2015, Milano, Italy, p. 8014 |
[23] | Salvatore G A, Münzenrieder N, Kinkeldei T, Petti L, Zysset C, Strebel I, Büthe L and Tröster G 2014 Nat. Commun. 5 2982 |
[24] | Kagan C R and Andry P 2003 Thin-Film Transistors, 2nd edn. (New York: CRC Press) pp. 55-61 |
[25] | Fleischhaker F, Wloka V and Hennig I 2010 J. Mater. Chem. 20 6622 |
[26] | Cherenack K H, Munzenrieder N S and Troster G 2010 IEEE Electron Dev. Lett. 31 1254 |
[27] | Park K, Lee D K, Kim B S, Jeon H, Lee N E, Whang D, Lee H J, Kim Y J and Ahn J H 2010 Adv. Funct. Mater. 20 3577 |
[28] | Lee C Y, Lin M Y, Wu W H, Wang J Y, Chou Y, Su W F, Chen Y F and Lin C F 2010 Semicond. Sci. Technol. 25 105008 |
[29] | Song K, Noh J, Jun T, Jung Y, Kang H Y and Moon J 2010 Adv. Mater. 22 4308 |
[30] | Zhao D, Mourey D A and Jackson T N 2010 IEEE Electron Dev. Lett. 31 323 |
[31] | Kim D H, Cho N G, Kim H G and Kim I D 2010 Electrochem. Solid-State Lett. 13 H370 |
[32] | Nomura K, Aoki T, Nakamura K, Kamiya T, Nakanishi T, Hasegawa T, Kimura M, Kawase T, Hirano M and Hosono H 2010 Appl. Phys. Lett. 96 263509 |
[33] | Su N C, Wang S J, Huang C C, Chen Y H, Huang H Y, Chiang C K and Chin A 2010 IEEE Electron Dev. Lett. 31 680 |
[34] | Liu J, Buchholz D B, Hennek J W, Chang R P H, Facchetti A and Marks T J 2010 J. Am. Chem. Soc. 132 11934 |
[35] | Liu J, Buchholz D B, Chang R P H, Facchetti A and Marks T J 2010 Adv. Mater. 22 2333 |
[36] | Cheong W S, Bak J Y and Kim H S 2010 Jpn. J. Appl. Phys. 49 05EB10 |
[37] | Jun T, Song K, Jeong Y, Woo K, Kim D, Bae C and Moon J 2011 J. Mater. Chem. 21 1102 |
[38] | Jung Y, Jun T, Kim A, Song K, Yeo T H and Moon J 2011 J. Mater. Chem. 21 11879 |
[39] | Mativenga M, Choi M H, Choi J W and Jang J 2011 IEEE Electron Dev. Lett. 32 170 |
[40] | Kinkeldei T, Munzenrieder N, Zysset C, Cherenack K and Tröster G 2011 IEEE Electron Dev. Lett. 32 1743 |
[41] | Marrs M A, Moyer C D, Bawolek E J, Cordova R J, Trujillo J, Raupp G B and Vogt B D 2011 IEEE Trans. Electron Dev. 58 3428 |
[42] | Munzenrieder N, Zysset C, Kinkeldei T and Troster G 2012 IEEE Trans. Electron Dev. 59 2153 |
[43] | Lai H C, Tzeng B J, Pei Z, Chen C M and Huang C J 2012 SID Symp. Dig. Tech. Pap. 43 764 |
[44] | Erb R M, Cherenack K H, Stahel R E, Libanori R, Kinkeldei T, Münzenrieder N, Tröster G and Studart A R 2012 ACS Appl. Mater. Interfaces 4 2860 |
[45] | Kim D I, Hwang B U, Park J S, Jeon H S, Bae B S, Lee H J and Lee N E 2012 Org. Electron. 13 2401 |
[46] | Kim Y H, Heo J S, Kim T H, Park S, Yoon M H, Kim J, Oh M S, Yi G R, Noh Y Y and Park S K 2012 Nature 489 128 |
[47] | Ji L W, Wu C Z, Fang T H, Hsiao Y J, Meen T H, Water W, Chiu Z W and Lam K T 2013 IEEE Sens. J. 13 4940 |
[48] | Kim S H, Yoon J, Yun S O, Hwang Y, Jang H S and Ko H C 2013 Adv. Funct. Mater. 23 1375 |
[49] | Hong K, Kim S H, Lee K H and Frisbie C D 2013 Adv. Mater. 25 3413 |
[50] | Lin Y H, Faber H, Zhao K, Wang Q, Amassian A, McLachlan M and Anthopoulos T D 2013 Adv. Mater. 25 4340 |
[51] | Yang W, Song K, Jung Y, Jeong S and Moon J 2013 J. Mater. Chem. C 1 4275 |
[52] | Zhou J, Wu G, Guo L, Zhu L and Wan Q 2013 IEEE Electron Dev. Lett. 34 888 |
[53] | Seo J S, Jeon J H, Hwang Y H, Park H, Ryu M, Park S H K and Bae B S 2013 Sci. Rep. 3 2085 |
[54] | Hyung G W, Park J, Wang J X, Lee H W, Li Z H, Koo J R, Kwon S J, Cho E S, Kim W Y and Kim Y K 2013 Jpn. J. Appl. Phys. 52 71102 |
[55] | Hsu H H, Chang C Y and Cheng C H 2013 Phys. Status Solidi-Rapid Res. Lett. 7 285 |
[56] | Hsu H H, Chang C Y, Cheng C H, Yu S H, Su C Y and Su C Y 2013 Solid-State Electron. 89 194 |
[57] | Hsu H H, Chang C Y and Cheng C H 2013 IEEE Electron Dev. Lett. 34 768 |
[58] | Münzenrieder N, Petti L, Zysset C, Kinkeldei T, Salvatore G A and Tröster G 2013 IEEE Trans. Electron Dev. 60 2815 |
[59] | Münzenrieder N, Zysset C, Petti L, Kinkeldei T, Salvatore G A and Tröster G 2013 Solid-State Electron. 84 198 |
[60] | Zysset C, Münzenrieder N, Petti L, Büthe L, Salvatore G A and Tröster G 2013 IEEE Electron Dev. Lett. 34 1394 |
[61] | Sharma B K, Jang B, Lee J E, Bae S H, Kim T W, Lee H J, Kim J H and Ahn J H 2013 Adv. Funct. Mater. 23 2024 |
[62] | Dai M K, Lian J T, Lin T Y and Chen Y F 2013 J. Mater. Chem. C 1 5064 |
[63] | Park S, Cho K, Yang K and Kim S 2014 J. Vac. Sci. Technol. B 32 62203 |
[64] | Wee D, Yoo S, Kang Y H, Kim Y H, Ka J W, Cho S Y, Lee C, Ryu J, Yi M H and Jang K S 2014 J. Mater. Chem. C 2 6395 |
[65] | Chen H, Cao Y, Zhang J and Zhou C 2014 Nat. Commun. 5 4097 |
[66] | Xu H, Pang J, Xu M, Li M, Guo Y, Chen Z, Wang L, Zou J, Tao H, Wang L and Peng J 2014 ECS J. Solid State Sci. Technol. 3 Q3035 |
[67] | Xu H, Luo D, Li M, Xu M, Zou J, Tao H, Lan L, Wang L, Peng J and Cao Y 2014 J. Mater. Chem. C 2 1255 |
[68] | Lai H C, Pei Z, Jian J R and Tzeng B J 2014 Appl. Phys. Lett. 105 33510 |
[69] | Ok K C, Park S H K, Hwang C S, Kim H, Shin H S, Bae J and Park J S 2014 Appl. Phys. Lett. 104 63508 |
[70] | Nakajima Y, Nakata M, Takei T, Fukagawa H, Motomura G, Tsuji H, Shimizu T, Fujisaki Y, Kurita T and Yamamoto T 2014 J. Soc. Inf. Disp. 22 137 |
[71] | Rim Y S, Chen H, Liu Y, Bae S H, Kim H J and Yang Y 2014 ACS Nano 8 9680 |
[72] | Petti L, Münzenrieder N, Salvatore G A, Zysset C, Kinkeldei T, Büthe L and Tröster G 2014 IEEE Trans. Electron Dev. 61 1085 |
[73] | Münzenrieder N, Voser P, Petti L, Zysset C, Büthe L, Vogt C, Salvatore G A and Tröster G 2014 IEEE Electron Dev. Lett. 35 69 |
[74] | Lee G J, Kim J, Kim J H, Jeong S M, Jang J E and Jeong J 2014 Semicond. Sci. Technol. 29 35003 |
[75] | Li H U and Jackson T N 2015 IEEE Electron Dev. Lett. 36 35 |
[76] | Liu N, Zhu L Q, Feng P, Wan C J, Liu Y H, Shi Y and Wan Q 2015 Sci. Rep. 5 18082 |
[77] | Kim J, Jeong S M and Jeong J 2015 Jpn. J. Appl. Phys. 54 114102 |
[78] | Honda W, Harada S, Ishida S, Arie T, Akita S and Takei K 2015 Adv. Mater. 27 4674 |
[79] | Jo J W, Kim J, Kim K T, Kang J G, Kim M G, Kim K H, Ko H, Kim Y H and Park S K 2015 Adv. Mater. 27 1182 |
[80] | Motomura G, Nakajima Y, Takei T, Tsuzuki T, Fukagawa H, Nakata M, Tsuji H, Shimizu T, Morii K, Hasegawa M, Fujisaki Y and Yamamoto T 2015 ITE Trans. Media Technol. Appl. 3 121 |
[81] | Jung S W, Koo J B, Park C W, Na B S, Oh J Y, Lee S S and Koo K W 2015 J. Vac. Sci. Technol. B 33 51201 |
[82] | Jin S H, Kang S K, Cho I T, Han S Y, Chung H U, Lee D J, Shin J, Baek G W, Kim T, Lee J H and Rogers J A 2015 ACS Appl. Mater. Interfaces 7 8268 |
[83] | Park M J, Yun D J, Ryu M K, Yang J H, Pi J E, Kwon O S, Kim G H, Hwang C S, Bak J Y and Yoon S M 2015 J. Mater. Chem. C 3 4779 |
[84] | Petti L, Frutiger A, Münzenrieder N, Salvatore G A, Büthe L, Vogt C, Cantarella G and Tröster G 2015 IEEE Electron Dev. Lett. 36 475 |
[85] | Tripathi A K, Myny K, Hou B, Wezenberg K and Gelinck G H 2015 IEEE Trans. Electron Dev. 62 4063 |
[86] | Hsu H H, Chiu Y C, Chiou P and Cheng C H 2015 J. Alloys Compd. 643 Supplement 1 S133 |
[87] | Li Y S, He J C, Hsu S M, Lee C C, Su D Y, Tsai F Y and Cheng I C 2016 IEEE Electron Dev. Lett. 37 46 |
[88] | Zhang Y, Mei Z, Cui S, Liang H, Liu Y and Du X 2016 Adv. Electron. Mater. 2 1500486 |
[89] | Zhang L R, Huang C Y, Li G M, Zhou L, Wu W J, Xu M, Wang L, Ning H L, Yao R H and Peng J B 2016 IEEE Trans. Electron Dev. 63 1779 |
[90] | Wang B, Yu X, Guo P, Huang W, Zeng L, Zhou N, Chi L, Bedzyk M J, Chang R P H, Marks T J and Facchetti A 2016 Adv. Electron. Mater. 2 1500427 |
[91] | Park C B, Na H I, Yoo S S and Park K S 2016 Appl. Phys. Express 9 31101 |
[92] | Jung S W, Choi J S, Park J H, Koo J B, Park C W, Na B S, Oh J Y, Lim S C, Lee S S and Chu H Y 2016 J. Nanosci. Nanotechnol. 16 2752 |
[93] | Kim J, Kim J, Jo S, Kang J, Jo J W, Lee M, Moon J, Yang L, Kim M G, Kim Y H and Park S K 2016 Adv. Mater. 28 3078 |
[94] | Oh H, Cho K, Park S and Kim S 2016 Microelectron. Eng. 159 179 |
[95] | Zeumault A, Ma S and Holbery J 2016 Phys. Status Solidi A 213 2189 |
[96] | Nakata M, Motomura G, Nakajima Y, Takei T, Tsuji H, Fukagawa H, Shimizu T, Tsuzuki T, Fujisaki Y and Yamamoto T 2016 J. Soc. Inf. Disp. 24 3 |
[97] | Narushima S, Mizoguchi H, Shimizu K, Ueda K, Ohta H, Hirano M, Kamiya T and Hosono H 2003 Adv. Mater. 15 1409 |
[98] | Schein F L, Wenckstern H von and Grundmann M 2013 Appl. Phys. Lett. 102 92109 |
[99] | Schein F L, Winter M, Böntgen T, Wenckstern H von and Grundmann M 2014 Appl. Phys. Lett. 104 22104 |
[100] | Schlupp P, Schein F L, von Wenckstern H and Grundmann M 2015 Adv. Electron. Mater. 1 1400023 |
[101] | Chen W C, Hsu P C, Chien C W, Chang K M, Hsu C J, Chang C H, Lee W K, Chou W F, Hsieh H H and Wu C C 2014 J. Phys. Appl. Phys. 47 365101 |
[102] | Pal B N, Sun J, Jung B J, Choi E, Andreou A G and Katz H E 2008 Adv. Mater. 20 1023 |
[103] | Brillson L J, Dong Y, Tuomisto F, Svensson B G, Kuznetsov A Y, Doutt D, Mosbacker H L, Cantwell G, Zhang J, Song J J, Fang Z Q and Look D C 2012 J. Vac. Sci. Technol. B 30 50801 |
[104] | Brillson L J and Lu Y 2011 J. Appl. Phys. 109 121301 |
[105] | Chasin A, Nag M, Bhoolokam A, Myny K, Steudel S, Schols S, Genoe J, Gielen G and Heremans P 2013 IEEE Trans. Electron Dev. 60 3407 |
[106] | Zhang J, Li Y, Zhang B, Wang H, Xin Q and Song A 2015 Nat. Commun. 6 7561 |
[107] | Sugimura T, Tsuzuku T, Kasai Y, Iiyama K and Takamiya S 2000 Jpn. J. Appl. Phys. 39 4521 |
[108] | Hemour S and Wu K 2014 Proc. IEEE 102 1667 |
[109] | Grover S and Moddel G 2011 IEEE J. Photovolt. 1 78 |
[110] | Kimura Y, Sun Y, Maemoto T, Sasa S, Kasai S and Inoue M 2013 Jpn. J. Appl. Phys. 52 06GE09 |
[111] | Lee D 2016 CES 2016: Hands-on with LG's roll-up flexible screen, January 5, 2016, BBC News |
[112] | Cervant E 2015 Report: flexible displays will dominate the future with foldable, rollable and even stretchable panels, September 8, 2015, Android Auth. |
[113] | Park J S, Maeng W J, Kim H S and Park J S 2012 Thin Solid Films 520 1679 |
[114] | Choi C H, Lin L Y, Cheng C C and Chang C 2015 ECS J. Solid State Sci. Technol. 4 P3044 |
[115] | Rim Y S, Bae S H, Chen H, De Marco N and Yang Y 2016 Adv. Mater. 28 4415 |
[116] | Harris K D, Elias A L and Chung H J 2015 J. Mater. Sci. 51 2771 |
[117] | Ni H, Liu J, Wang Z and Yang S 2015 J. Ind. Eng. Chem. 28 16 |
[118] | Chien C W, Wu C H, Tsai Y T, Kung Y C, Lin C Y, Hsu P C, Hsieh H H, Wu C C, Yeh Y H, Leu C M and Lee T M 2011 IEEE Trans. Electron Dev. 58 1440 |
[119] | Cantarella G, Münzenrieder N, Petti L, Vogt C, Büthe L, Salvatore G A, Daus A and Tröster G 2015 IEEE Electron Dev. Lett. 36 781 |
[120] | Rogers J A, Someya T and Huang Y 2010 Science 327 1603 |
[121] | Wagner S, Lacour S P, Jones J, Hsu P I, Sturm J C, Li T and Suo Z 2004 Phys. E Low-Dimens. Syst. Nanostructures 25 326 |
[122] | Sekitani T and Someya T 2012 MRS Bull. 37 236 |
[123] | http://www.corning.com/in/en/products/display-glass/products/corning-willow-glass.html |
[124] | Leterrier Y 2003 Prog. Mater. Sci. 48 1 |
[125] | Knez M, Nielsch K and Niinistö L 2007 Adv. Mater. 19 3425 |
[126] | Kim H, Lee H B R and Maeng W J 2009 Thin Solid Films 517 2563 |
[127] | Münzenrieder N, Salvatore G A, Petti L, Zysset C, Büthe L, Vogt C, Cantarella G and Tröster G 2014 Appl. Phys. Lett. 105 263504 |
[128] | Kamiya T, Nomura K and Hosono H 2009 J. Disp. Technol. 5 273 |
[129] | Dehuff N L, Kettenring E S, Hong D, Chiang H Q, Wager J F, Hoffman R L, Park C H and Keszler D A 2005 J. Appl. Phys. 97 64505 |
[130] | Chiang H Q, Wager J F, Hoffman R L, Jeong J and Keszler D A 2005 Appl. Phys. Lett. 86 13503 |
[131] | Jackson W B, Hoffman R L and Herman G S 2005 Appl. Phys. Lett. 87 193503 |
[132] | Janotti A and Van de Walle C G 2009 Rep. Prog. Phys. 72 126501 |
[133] | Janotti A and Walle C G V de 2005 Appl. Phys. Lett. 87 122102 |
[134] | Liu L, Mei Z, Tang A, Azarov A, Kuznetsov A, Xue Q K and Du X 2016 Phys. Rev. B 93 235305 |
[135] | Suresh A, Wellenius P, Dhawan A and Muth J 2007 Appl. Phys. Lett. 90 123512 |
[136] | Saji K J, Jayaraj M K, Nomura K, Kamiya T and Hosono H 2008 J. Electrochem. Soc. 155 H390 |
[137] | Jeon I Y, Lee J Y and Yoon D H 2013 J. Nanosci. Nanotechnol. 13 1741 |
[138] | Kim K A, Bak J Y, Choi J S and Yoon S M 2014 Ceram. Int. 40 7829 |
[139] | Lee Y G and Choi W S 2013 Electron. Mater. Lett. 9 719 |
[140] | Chong E, Jo K C and Lee S Y 2010 Appl. Phys. Lett. 96 152102 |
[141] | Kim C J, Kim S, Lee J H, Park J S, Kim S, Park J, Lee E, Lee J, Park Y, Kim J H, Shin S T and Chung U I 2009 Appl. Phys. Lett. 95 252103 |
[142] | Park J S, Kim K, Park Y G, Mo Y G, Kim H D and Jeong J K 2009 Adv. Mater. 21 329 |
[143] | Chong E, Kim S H and Lee S Y 2010 Appl. Phys. Lett. 97 252112 |
[144] | Chong E, Chun Y S and Lee S Y 2010 Appl. Phys. Lett. 97 102102 |
[145] | Noh J, Jung M, Jung Y, Yeom C, Pyo M and Cho G 2015 Proc. IEEE 103 554 |
[146] | Subramanian V, Cen J, Vornbrock A de la F, Grau G, Kang H, Kitsomboonloha R, Soltman D and Tseng H Y 2015 Proc. IEEE 103 567 |
[147] | Grau G and Subramanian V 2016 Adv. Electron. Mater. 2 1500328 |
[148] | Lim N, Kim J, Lee S, Kim N and Cho G 2009 IEEE Trans. Adv. Packag. 32 72 |
[149] | Sekitani T, Nakajima H, Maeda H, Fukushima T, Aida T, Hata K and Someya T 2009 Nat. Mater. 8 494 |
[150] | Chang J B, Liu V, Subramanian V, Sivula K, Luscombe C, Murphy A, Liu J and Fréchet J M J 2006 J. Appl. Phys. 100 14506 |
[151] | Niinistö L, Nieminen M, Päiväsaari J, Niinistö J, Putkonen M and Nieminen M 2004 Phys. Status Solidi A 201 1443 |
[152] | Jen S H, Bertrand J A and George S M 2011 J. Appl. Phys. 109 84305 |
[153] | Pecunia V, Banger K and Sirringhaus H 2015 Adv. Electron. Mater. 1 1400024 |
[154] | Facchetti A, Yoon M H and Marks T J 2005 Adv. Mater. 17 1705 |
[155] | Kim D H, Choi S H, Cho N G, Chang Y, Kim H G, Hong J M and Kim I D 2009 Electrochem. Solid-State Lett. 12 H296 |
[156] | Hwang B U, Kim D I, Cho S W, Yun M G, Kim H J, Kim Y J, Cho H K and Lee N E 2014 Org. Electron. 15 1458 |
[157] | Shannon R D 1993 J. Appl. Phys. 73 348 |
[158] | Han W, Lee H S, Bangi U K H, Yoo B and Park H H 2016 Polym. Adv. Technol. 27 245 |
[159] | Chen R, Kim H, McIntyre P C and Bent S F 2005 Chem. Mater. 17 536 |
[160] | Lee J P, Jang Y J and Sung M M 2003 Adv. Funct. Mater. 13 873 |
[161] | Minami T 2005 Semicond. Sci. Technol. 20 S35 |
[162] | Pasquarelli R M, Ginley D S and O'Hayre R 2011 Chem. Soc. Rev. 40 5406 |
[163] | Leterrier Y, Médico L, Demarco F, Månson J A E, Betz U, Escolà M F, Kharrazi Olsson M and Atamny F 2004 Thin Solid Films 460 156 |
[164] | Kim Y S, Hwang W J, Eun K T and Choa S H 2011 Appl. Surf. Sci. 257 8134 |
[165] | Park Y S, Kim H K, Jeong S W and Cho W J 2010 Thin Solid Films 518 3071 |
[166] | Ko Y D, Lee C H, Moon D K and Kim Y S 2013 Thin Solid Films 547 32 |
[167] | Bender M, Seelig W, Daube C, Frankenberger H, Ocker B and Stollenwerk J 1998 Thin Solid Films 326 67 |
[168] | Park Y S, Choi K H, Kim H K and Kang J W 2010 Electrochem. Solid-State Lett. 13 J39 |
[169] | Park Y S and Kim H K 2010 J. Vac. Sci. Technol. A 28 41 |
[170] | Kim H K and Lim J W 2012 Nanoscale Res. Lett. 7 67 |
[171] | Cho S W, Jeong J A, Bae J H, Moon J M, Choi K H, Jeong S W, Park N J, Kim J J, Lee S H, Kang J W, Yi M S and Kim H K 2008 Thin Solid Films 516 7881 |
[172] | Park Y S, Choi K H and Kim H K 2009 J. Phys. Appl. Phys. 42 235109 |
[173] | Park Y S, Park H K, Jeong J A, Kim H K, Choi K H, Na S I and Kim D Y 2009 J. Electrochem. Soc. 156 H588 |
[174] | Choi K H, Nam H J, Jeong J A, Cho S W, Kim H K, Kang J W, Kim D G and Cho W J 2008 Appl. Phys. Lett. 92 223302 |
[175] | Park H K, Jeong J A, Park Y S, Na S I, Kim D Y and Kim H K 2009 Electrochem. Solid-State Lett. 12 H309 |
[176] | Choi Y Y, Kim H K, Koo H W, Kim T W and Lee S N 2011 J. Vac. Sci. Technol. A 29 61502 |
[177] | Lim J W, Oh S I, Eun K, Choa S H, Koo H W, Kim T W and Kim H K 2012 Jpn. J. Appl. Phys. 51 115801 |
[178] | Lee J, Lee P, Lee H, Lee D, Lee S S and Ko S H 2012 Nanoscale 4 6408 |
[179] | Yu Z, Zhang Q, Li L, Chen Q, Niu X, Liu J and Pei Q 2011 Adv. Mater. 23 664 |
[180] | Lim J W, Cho D Y, Eun K, Choa S H, Na S I, Kim J and Kim H K 2012 Sol. Energy Mater. Sol. Cells 105 69 |
[181] | Lee J Y, Connor S T, Cui Y and Peumans P 2008 Nano Lett. 8 689 |
[182] | Hu L, Kim H S, Lee J Y, Peumans P and Cui Y 2010 ACS Nano 4 2955 |
[183] | Zhang K, Han K, Shi S, Bahl G and Tawfick S 2016 Adv. Electron. Mater. 2 1600003 |
[184] | Kim H J and Kim Y J 2014 IOP Conf. Ser. Mater. Sci. Eng. 62 12022 |
[185] | Lee M H, Hsu S M, Shen J D and Liu C 2015 Microelectron. Eng. 138 77 |
[186] | Dauzou F, Bouten P C P, Dabirian A, Leterrier Y, Ballif C and Morales-Masis M 2016 Org. Electron. 35 136 |
[187] | Gleskovas H, Wagner S and Suo Z 1999 MRS Online Proceedings Library Archive 557 p. 653 |
[188] | Gleskova H, Wagner S and Suo Z 1999 Appl. Phys. Lett. 75 3011 |
[189] | Suo Z, Ma E Y, Gleskova H and Wagner S 1999 Appl. Phys. Lett. 74 1177 |
[190] | Sekitani T, Iba S, Kato Y, Noguchi Y, Someya T and Sakurai T 2005 Appl. Phys. Lett. 87 173502 |
[191] | Park S K, Han J I, Moon D G and Kim W K 2003 Jpn. J. Appl. Phys. 42 623 |
[192] | Gleskova H, Wagner S and Suo Z 2000 J. Non-Cryst. Solids 266-269, Part 2 1320 |
[193] | Chen B W, Chang T C, Hung Y J, Hsieh T Y, Tsai M Y, Liao P Y, Chen B Y, Tu Y H, Lin Y Y, Tsai W W and Yan J Y 2015 Appl. Phys. Lett. 106 183503 |
[194] | Munzenrieder N, Cherenack K H and Troster G 2011 IEEE Trans. Electron Dev. 58 2041 |
[195] | Heremans P, Tripathi A K, de Jamblinne de Meux A, Smits E C P, Hou B, Pourtois G and Gelinck G H 2016 Adv. Mater. 28 4266 |
[196] | Rockett A 2008 The Materials Science of Semiconductors (Springer US) pp. 195-235 |
[197] | Song K, Young Koo C, Jun T, Lee D, Jeong Y and Moon J 2011 J. Cryst. Growth 326 23 |
[198] | Yoo Y B, Park J H, Lee S J, Song K M and Baik H K 2012 Jpn. J. Appl. Phys. 51 40201 |
[199] | Hwang Y H, Kim K S and Cho W J 2014 Jpn. J. Appl. Phys. 53 04EF12 |
[200] | Moon S W and Cho W J 2015 J. Semicond. Technol. Sci. 15 249 |
[201] | Oh S M, Jo K W and Cho W J 2015 Curr. Appl. Phys. 15, Supplement 2 |
[202] | Hwang Y H, Seo S J, Jeon J H and Bae B S 2012 Electrochem. Solid-State Lett. 15 H91 |
[203] | Yang Y H, Yang S S and Chou K S 2010 IEEE Electron Dev. Lett. 31 969 |
[204] | Park J, Kim C S, Ahn B D, Ryu H and Kim H S 2015 J. Electroceramics 35 106 |
|