Effects of deposition temperature on optical properties of MgF2 over-coated Al mirrors in the VUV

doi:10.1088/1674-1056/ab457a

中国物理B ›› 2019, Vol. 28 ›› Issue (11): 117801-117801.doi: 10.1088/1674-1056/ab457a

• CONDENSED MATTER: ELECTRONIC STRUCTURE, ELECTRICAL, MAGNETIC, AND OPTICAL PROPERTIES • 上一篇下一篇

Effects of deposition temperature on optical properties of MgF₂ over-coated Al mirrors in the VUV

Chun Guo(郭春), Bin-Cheng Li(李斌成), Ming-Dong Kong(孔明东), Da-Wei Lin(林大伟)

1 Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209, China;
2 Key Laboratory of Optical Engineering, Chinese Academy of Sciences, Chengdu 610209, China;
3 School of Optoelectronic Information, University of Electronic Science and Technology of China, Chengdu 610054, China;
4 University of Chinese Academy of Sciences, Beijing 100049, China

收稿日期:2019-04-08 修回日期:2019-09-12 出版日期:2019-11-05 发布日期:2019-11-05
通讯作者: Chun Guo E-mail:guochunyouxiang@126.com
基金资助:
Project supported by the West Light Foundation of the Chinese Academy of Sciences and the National Natural Science Foundation of China (Grant No. 61805247).

Effects of deposition temperature on optical properties of MgF₂ over-coated Al mirrors in the VUV

Chun Guo(郭春)^1,2, Bin-Cheng Li(李斌成)³, Ming-Dong Kong(孔明东)^1,4, Da-Wei Lin(林大伟)¹

1 Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209, China;
2 Key Laboratory of Optical Engineering, Chinese Academy of Sciences, Chengdu 610209, China;
3 School of Optoelectronic Information, University of Electronic Science and Technology of China, Chengdu 610054, China;
4 University of Chinese Academy of Sciences, Beijing 100049, China

Received:2019-04-08 Revised:2019-09-12 Online:2019-11-05 Published:2019-11-05
Contact: Chun Guo E-mail:guochunyouxiang@126.com
Supported by:
Project supported by the West Light Foundation of the Chinese Academy of Sciences and the National Natural Science Foundation of China (Grant No. 61805247).

摘要/Abstract

摘要： Both long-term environmental durability and high reflectance of protected-Al mirrors are of great importance for developing the optical instruments in the vacuum ultraviolet (VUV) applications. In this paper, the dependence of spectral property and environmental durability of MgF₂ over-coated Al mirrors using a 3-step method on deposition temperature of the outermost MgF₂ layer are investigated in detail. Optics (reflectance), structure (surface morphology and crystalline), and environmental durability (humidity test) are characterized and discussed. The results show that both optical and moisture-resistant properties of MgF₂ over-coated Al mirrors are dependent on MgF₂ deposition temperature, and the optimal deposition temperature for the outermost MgF₂ layer should be between 250℃ and 300℃ for MgF₂ over-coated Al mirrors to have both reasonably high reflectance in the VUV spectral range and high moisture resistance for long lifetime applications.

关键词: protected-Al mirrors, reflectance, vacuum ultraviolet, MgF₂

Abstract: Both long-term environmental durability and high reflectance of protected-Al mirrors are of great importance for developing the optical instruments in the vacuum ultraviolet (VUV) applications. In this paper, the dependence of spectral property and environmental durability of MgF₂ over-coated Al mirrors using a 3-step method on deposition temperature of the outermost MgF₂ layer are investigated in detail. Optics (reflectance), structure (surface morphology and crystalline), and environmental durability (humidity test) are characterized and discussed. The results show that both optical and moisture-resistant properties of MgF₂ over-coated Al mirrors are dependent on MgF₂ deposition temperature, and the optimal deposition temperature for the outermost MgF₂ layer should be between 250℃ and 300℃ for MgF₂ over-coated Al mirrors to have both reasonably high reflectance in the VUV spectral range and high moisture resistance for long lifetime applications.

Key words: protected-Al mirrors, reflectance, vacuum ultraviolet, MgF₂

中图分类号: (Optical properties of bulk materials and thin films)

78.20.-e

42.79.Fm (Reflectors, beam splitters, and deflectors) 78.40.-q (Absorption and reflection spectra: visible and ultraviolet)

郭春, 李斌成, 孔明东, 林大伟. Effects of deposition temperature on optical properties of MgF₂ over-coated Al mirrors in the VUV[J]. 中国物理B, 2019, 28(11): 117801-117801.

Chun Guo(郭春), Bin-Cheng Li(李斌成), Ming-Dong Kong(孔明东), Da-Wei Lin(林大伟). Effects of deposition temperature on optical properties of MgF₂ over-coated Al mirrors in the VUV[J]. Chin. Phys. B, 2019, 28(11): 117801-117801.

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Effects of deposition temperature on optical properties of MgF₂ over-coated Al mirrors in the VUV

Effects of deposition temperature on optical properties of MgF₂ over-coated Al mirrors in the VUV

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