中国物理B ›› 2019, Vol. 28 ›› Issue (11): 117801-117801.doi: 10.1088/1674-1056/ab457a

• CONDENSED MATTER: ELECTRONIC STRUCTURE, ELECTRICAL, MAGNETIC, AND OPTICAL PROPERTIES • 上一篇    下一篇

Effects of deposition temperature on optical properties of MgF2 over-coated Al mirrors in the VUV

Chun Guo(郭春), Bin-Cheng Li(李斌成), Ming-Dong Kong(孔明东), Da-Wei Lin(林大伟)   

  1. 1 Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209, China;
    2 Key Laboratory of Optical Engineering, Chinese Academy of Sciences, Chengdu 610209, China;
    3 School of Optoelectronic Information, University of Electronic Science and Technology of China, Chengdu 610054, China;
    4 University of Chinese Academy of Sciences, Beijing 100049, China
  • 收稿日期:2019-04-08 修回日期:2019-09-12 出版日期:2019-11-05 发布日期:2019-11-05
  • 通讯作者: Chun Guo E-mail:guochunyouxiang@126.com
  • 基金资助:
    Project supported by the West Light Foundation of the Chinese Academy of Sciences and the National Natural Science Foundation of China (Grant No. 61805247).

Effects of deposition temperature on optical properties of MgF2 over-coated Al mirrors in the VUV

Chun Guo(郭春)1,2, Bin-Cheng Li(李斌成)3, Ming-Dong Kong(孔明东)1,4, Da-Wei Lin(林大伟)1   

  1. 1 Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209, China;
    2 Key Laboratory of Optical Engineering, Chinese Academy of Sciences, Chengdu 610209, China;
    3 School of Optoelectronic Information, University of Electronic Science and Technology of China, Chengdu 610054, China;
    4 University of Chinese Academy of Sciences, Beijing 100049, China
  • Received:2019-04-08 Revised:2019-09-12 Online:2019-11-05 Published:2019-11-05
  • Contact: Chun Guo E-mail:guochunyouxiang@126.com
  • Supported by:
    Project supported by the West Light Foundation of the Chinese Academy of Sciences and the National Natural Science Foundation of China (Grant No. 61805247).

摘要: Both long-term environmental durability and high reflectance of protected-Al mirrors are of great importance for developing the optical instruments in the vacuum ultraviolet (VUV) applications. In this paper, the dependence of spectral property and environmental durability of MgF2 over-coated Al mirrors using a 3-step method on deposition temperature of the outermost MgF2 layer are investigated in detail. Optics (reflectance), structure (surface morphology and crystalline), and environmental durability (humidity test) are characterized and discussed. The results show that both optical and moisture-resistant properties of MgF2 over-coated Al mirrors are dependent on MgF2 deposition temperature, and the optimal deposition temperature for the outermost MgF2 layer should be between 250℃ and 300℃ for MgF2 over-coated Al mirrors to have both reasonably high reflectance in the VUV spectral range and high moisture resistance for long lifetime applications.

关键词: protected-Al mirrors, reflectance, vacuum ultraviolet, MgF2

Abstract: Both long-term environmental durability and high reflectance of protected-Al mirrors are of great importance for developing the optical instruments in the vacuum ultraviolet (VUV) applications. In this paper, the dependence of spectral property and environmental durability of MgF2 over-coated Al mirrors using a 3-step method on deposition temperature of the outermost MgF2 layer are investigated in detail. Optics (reflectance), structure (surface morphology and crystalline), and environmental durability (humidity test) are characterized and discussed. The results show that both optical and moisture-resistant properties of MgF2 over-coated Al mirrors are dependent on MgF2 deposition temperature, and the optimal deposition temperature for the outermost MgF2 layer should be between 250℃ and 300℃ for MgF2 over-coated Al mirrors to have both reasonably high reflectance in the VUV spectral range and high moisture resistance for long lifetime applications.

Key words: protected-Al mirrors, reflectance, vacuum ultraviolet, MgF2

中图分类号:  (Optical properties of bulk materials and thin films)

  • 78.20.-e
42.79.Fm (Reflectors, beam splitters, and deflectors) 78.40.-q (Absorption and reflection spectra: visible and ultraviolet)