中国物理B ›› 1994, Vol. 3 ›› Issue (10): 730-735.doi: 10.1088/1004-423X/3/10/002

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NMR STUDIES OF HYDROGEN MICROSTURUCTURES IN HYDROGENATED AMORPHOUS SILICON FILMS

瞿学选, 陈坤基, 陈茂瑞, 胡澄, 李志锋, 冯端   

  1. State Key Laboratory of Solid State Microstructures and Department of Physics, Nanjing University, Nanjing 210008, China
  • 收稿日期:1993-09-02 出版日期:1994-10-20 发布日期:1994-10-20
  • 基金资助:
    Project supported by the National Natural Science Foundation of China.

NMR STUDIES OF HYDROGEN MICROSTURUCTURES IN HYDROGENATED AMORPHOUS SILICON FILMS

QU XUE-XUAN (瞿学选), CHEN KUN-JI (陈坤基), CHEN MAO-RUI (陈茂瑞), HU CHENG (胡澄), LI ZHI-FENG (李志锋), FENG DUAN (冯端)   

  1. State Key Laboratory of Solid State Microstructures and Department of Physics, Nanjing University, Nanjing 210008, China
  • Received:1993-09-02 Online:1994-10-20 Published:1994-10-20
  • Supported by:
    Project supported by the National Natural Science Foundation of China.

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摘要： Four kinds of a-Si: H films deposited in the PECVD system with different Ts are studied by 1H NMR technique. Direct evidence is given to confirm hydrogen atoms in the diluted and clustered phases. The local bonding configurations for hydrogen and the density of dangling bonds are analyzed by ESR and infrared absorption spectroscopy. The behaviour of hydrogen in a-Si; H films is discussed.

Abstract: Four kinds of a-Si: H films deposited in the PECVD system with different Ts are studied by 1H NMR technique. Direct evidence is given to confirm hydrogen atoms in the diluted and clustered phases. The local bonding configurations for hydrogen and the density of dangling bonds are analyzed by ESR and infrared absorption spectroscopy. The behaviour of hydrogen in a-Si; H films is discussed.

中图分类号:  (Thin film structure and morphology)

  • 68.55.-a
52.77.Dq (Plasma-based ion implantation and deposition) 81.15.Gh (Chemical vapor deposition (including plasma-enhanced CVD, MOCVD, ALD, etc.)) 76.60.-k (Nuclear magnetic resonance and relaxation) 78.30.Am (Elemental semiconductors and insulators) 61.43.Dq (Amorphous semiconductors, metals, and alloys)