中国物理B ›› 2017, Vol. 26 ›› Issue (5): 57801-057801.doi: 10.1088/1674-1056/26/5/057801

• CONDENSED MATTER: ELECTRONIC STRUCTURE, ELECTRICAL, MAGNETIC, AND OPTICAL PROPERTIES • 上一篇    下一篇

Fabrication of broadband antireflection coatings using broadband optical monitoring mixed with time monitoring

Qi-Peng Lv(吕起鹏), Song-Wen Deng(邓淞文), Shao-Qian Zhang(张绍骞), Fa-Quan Gong(公发全), Gang Li(李刚)   

  1. 1 Key Laboratory of Chemical Lasers, Dalian Institute of Chemical Physics, Chinese Academy of Sciences, Dalian 116023, China;
    2 School of Materials Science and Engineering, Dalian University of Technology, Dalian 116024, China
  • 收稿日期:2016-11-08 修回日期:2016-12-29 出版日期:2017-05-05 发布日期:2017-05-05
  • 通讯作者: Gang Li E-mail:lig@dicp.ac.cn
  • 基金资助:
    Project supported by the National Natural Science Foundation of China (Grant Nos. 61308092 and 61505209).

Fabrication of broadband antireflection coatings using broadband optical monitoring mixed with time monitoring

Qi-Peng Lv(吕起鹏)1,2, Song-Wen Deng(邓淞文)1, Shao-Qian Zhang(张绍骞)1, Fa-Quan Gong(公发全)1, Gang Li(李刚)1   

  1. 1 Key Laboratory of Chemical Lasers, Dalian Institute of Chemical Physics, Chinese Academy of Sciences, Dalian 116023, China;
    2 School of Materials Science and Engineering, Dalian University of Technology, Dalian 116024, China
  • Received:2016-11-08 Revised:2016-12-29 Online:2017-05-05 Published:2017-05-05
  • Contact: Gang Li E-mail:lig@dicp.ac.cn
  • Supported by:
    Project supported by the National Natural Science Foundation of China (Grant Nos. 61308092 and 61505209).

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摘要： Multi-layer optical coatings with complex spectrum requirements, such as multi-band pass filters, notch filters, and ultra-broadband antireflection coating, which usually contain very thin layers and sensitive layers, are difficult to be fabricated using a quartz crystal monitoring method or a single wavelength optical monitoring system (SWLOMS). In this paper, a broadband antireflection (AR) coating applied in the wavelength range from 800 nm to 1800 nm was designed and deposited by ion beam sputtering (IBS). Ta2O5 and SiO2 were chosen as high and low refractive index coating materials, respectively. The optimized coating structure contains 9 non-quarter-wave (QW) layers totally with ultra-thin layers and sensitive layers in this coating stack. In order to obtain high transmittance, it is very important to realize the thickness accurate control on these thin layers and sensitive layers. A broadband optical monitoring mixed with time monitoring strategy was successfully used to control the layer thickness during the deposition process. At last, the measured transmittance of AR coating is quite close to the theoretical value. A 0.6% variation in short wavelength edge across the central 180 mm diameter is demonstrated. A spectrum shift of less than 0.5% for 2 continuous runs is also presented.

关键词: broadband optical monitoring, time monitoring, ultra-thin and sensitive layer, broadband antireflection coatings

Abstract: Multi-layer optical coatings with complex spectrum requirements, such as multi-band pass filters, notch filters, and ultra-broadband antireflection coating, which usually contain very thin layers and sensitive layers, are difficult to be fabricated using a quartz crystal monitoring method or a single wavelength optical monitoring system (SWLOMS). In this paper, a broadband antireflection (AR) coating applied in the wavelength range from 800 nm to 1800 nm was designed and deposited by ion beam sputtering (IBS). Ta2O5 and SiO2 were chosen as high and low refractive index coating materials, respectively. The optimized coating structure contains 9 non-quarter-wave (QW) layers totally with ultra-thin layers and sensitive layers in this coating stack. In order to obtain high transmittance, it is very important to realize the thickness accurate control on these thin layers and sensitive layers. A broadband optical monitoring mixed with time monitoring strategy was successfully used to control the layer thickness during the deposition process. At last, the measured transmittance of AR coating is quite close to the theoretical value. A 0.6% variation in short wavelength edge across the central 180 mm diameter is demonstrated. A spectrum shift of less than 0.5% for 2 continuous runs is also presented.

Key words: broadband optical monitoring, time monitoring, ultra-thin and sensitive layer, broadband antireflection coatings

中图分类号:  (Optical coatings)

  • 42.79.Wc
81.15.-z (Methods of deposition of films and coatings; film growth and epitaxy) 82.33.Ya (Chemistry of MOCVD and other vapor deposition methods)