中国物理B ›› 2016, Vol. 25 ›› Issue (10): 104205-104205.doi: 10.1088/1674-1056/25/10/104205

• ELECTROMAGNETISM, OPTICS, ACOUSTICS, HEAT TRANSFER, CLASSICAL MECHANICS, AND FLUID DYNAMICS • 上一篇    下一篇

Effects of annealing time on the structure, morphology and stress of gold-chromium bilayer film

Hong Zhang(张洪), Yun-Xia Jin(晋云霞), Hu Wang(王虎), Fang-Yu Kong(孔钒宇), Hao-Peng Huang(黄昊鹏), Yun Cui(崔云)   

  1. 1 University of Chinese Academy of Sciences, Beijing 100049, China;
    2 Key Laboratory of Materials for High Power Laser, Shanghai Institute of Optics and Fine Mechanics, Shanghai 201800, China
  • 收稿日期:2016-03-10 修回日期:2016-05-03 出版日期:2016-10-05 发布日期:2016-10-05
  • 通讯作者: Yun-Xia Jin E-mail:yxjin@siom.ac.cn
  • 基金资助:
    Project supported by the National Natural Science Foundation of China (Grant No. 61405225).

Effects of annealing time on the structure, morphology and stress of gold-chromium bilayer film

Hong Zhang(张洪)1,2, Yun-Xia Jin(晋云霞)2, Hu Wang(王虎)1,2, Fang-Yu Kong(孔钒宇)2, Hao-Peng Huang(黄昊鹏)1,2, Yun Cui(崔云)2   

  1. 1 University of Chinese Academy of Sciences, Beijing 100049, China;
    2 Key Laboratory of Materials for High Power Laser, Shanghai Institute of Optics and Fine Mechanics, Shanghai 201800, China
  • Received:2016-03-10 Revised:2016-05-03 Online:2016-10-05 Published:2016-10-05
  • Contact: Yun-Xia Jin E-mail:yxjin@siom.ac.cn
  • Supported by:
    Project supported by the National Natural Science Foundation of China (Grant No. 61405225).

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摘要： In this work, a 200-nm-thick gold film with a 10-nm-thick chromium layer used as an adhesive layer is fabricated on fused silica by the electron beam evaporation method. The effects of annealing time at 300 ℃ on the structure, morphology and stress of the film are studied. We find that chromium could diffuse to the surface of the film by formatting a solid solution with gold during annealing. Meanwhile, chromium is oxidized on the surface and diffused downward along the grain grooves in the gold film. The various operant mechanisms that change the residual stresses of gold films for different annealing times are discussed.

关键词: gold-chromium film, film stress, diffusion

Abstract: In this work, a 200-nm-thick gold film with a 10-nm-thick chromium layer used as an adhesive layer is fabricated on fused silica by the electron beam evaporation method. The effects of annealing time at 300 ℃ on the structure, morphology and stress of the film are studied. We find that chromium could diffuse to the surface of the film by formatting a solid solution with gold during annealing. Meanwhile, chromium is oxidized on the surface and diffused downward along the grain grooves in the gold film. The various operant mechanisms that change the residual stresses of gold films for different annealing times are discussed.

Key words: gold-chromium film, film stress, diffusion

中图分类号:  (Optical coatings)

  • 42.79.Wc
68.35.Gy (Mechanical properties; surface strains) 68.35.Fx (Diffusion; interface formation) 42.70.Hj (Laser materials)