Graded index broadband antireflection coating prepared by glancing angle deposition for a high-power laser system

doi:10.1088/1674-1056/19/4/044210

中国物理B ›› 2010, Vol. 19 ›› Issue (4): 44210-044210.doi: 10.1088/1674-1056/19/4/044210

Graded index broadband antireflection coating prepared by glancing angle deposition for a high-power laser system

沈自才¹, 孔伟金², 王淑华², 卢朝靖², 邵建达³, 范正修³

(1)Beijing Institute of Spacecraft Environment Engineering, Beijing 100094, China; (2)College of Physics Science, Qingdao University, Qingdao 266071, China; (3)Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China

收稿日期:2008-11-24 修回日期:2009-07-06 出版日期:2010-04-15 发布日期:2010-04-15
基金资助:
Project supported by the National Natural Science Foundation of China (Grant No.~10804060), Higher Educational Science and Technology Program of Shandong Province of China (Grant No.~J08LI05).

Graded index broadband antireflection coating prepared by glancing angle deposition for a high-power laser system

Kong Wei-Jin(孔伟金)^a)^†, Shen Zi-Cai(沈自才)^b),Wang Shu-Hua(王淑华)^a),Shao Jian-Da(邵建达)^c), Fan Zheng-Xiu(范正修)^c), and Lu Chao-Jing(卢朝靖)^a)

^a College of Physics Science, Qingdao University, Qingdao 266071, China; ^b Beijing Institute of Spacecraft Environment Engineering, Beijing 100094, China; ^c Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China

Received:2008-11-24 Revised:2009-07-06 Online:2010-04-15 Published:2010-04-15
Supported by:
Project supported by the National Natural Science Foundation of China (Grant No.~10804060), Higher Educational Science and Technology Program of Shandong Province of China (Grant No.~J08LI05).

摘要/Abstract

摘要： This paper reports that SiO₂ is selected to fabricate broadband antireflection (AR) coatings on fused silica substrate by using glancing angle deposition and physical vapour deposition. Through accurate control of the graded index of the SiO₂ layer, transmittance of the graded broadband AR coating can achieve an average value of 98% across a spectral range of 300--1850~nm. Moreover, a laser-induced damage threshold measurement of the fabricated AR coating is performed by using a one-on-one protocol according to ISO11254-1, resulting in an average damage threshold of 17.2~J/cm$^{2}$.

Abstract: This paper reports that SiO₂ is selected to fabricate broadband antireflection (AR) coatings on fused silica substrate by using glancing angle deposition and physical vapour deposition. Through accurate control of the graded index of the SiO₂ layer, transmittance of the graded broadband AR coating can achieve an average value of 98% across a spectral range of 300--1850 nm. Moreover, a laser-induced damage threshold measurement of the fabricated AR coating is performed by using a one-on-one protocol according to ISO11254-1, resulting in an average damage threshold of 17.2 J/cm$^{2}$.

Key words: broadband antireflection coating, graded index, glancing angle deposition

中图分类号: (Optical coatings)

42.79.Wc

42.79.Ry (Gradient-index (GRIN) devices)

孔伟金, 沈自才, 王淑华, 邵建达, 范正修, 卢朝靖. Graded index broadband antireflection coating prepared by glancing angle deposition for a high-power laser system[J]. 中国物理B, 2010, 19(4): 44210-044210.

Kong Wei-Jin(孔伟金), Shen Zi-Cai(沈自才),Wang Shu-Hua(王淑华),Shao Jian-Da(邵建达), Fan Zheng-Xiu(范正修), and Lu Chao-Jing(卢朝靖). Graded index broadband antireflection coating prepared by glancing angle deposition for a high-power laser system[J]. Chin. Phys. B, 2010, 19(4): 44210-044210.

参考文献 20

[1]	Zhang B and Wang Z 2007 Acta Phys. Sin. 56 1404 (in Chinese)
[2]	Shen Z C, Shen J, Liu S J, Kong W J, Shao J D and Fan Z X 2007 Acta Phys. Sin. 56 1325 (in Chinese)
[3]	Chen D 2001 Solar Engery Materials and Solar Cells 68 313
[4]	Liu M C, Lee C C, Liao B H, Kaneko M, Nakahira K and Takano Y 2008 Appl. Opt. 47 214
[5]	Popta A C, Hawkeye M M, Sit J C and Brett M J 2004 Opt. Lett. 29 2545
[6]	Liu L and Su X R 2008 Chin. Phys. B 17 2170
[7]	Wang S M, Xia G D, Fu X Y, He H B, Shao J D and Fan Z X 2007 Thin Solid Film 515 3352
[8]	Macleod H A 1999 Thin Film Optical Filters 3 87
[9]	Robbie K and Brett M J 1997 J. Vac. Sci. Technol. A 15 1460
[10]	Lakhtakia A, Messier R, Brett M J and Robbie K 1996 Innovations Mater. Res. 1 165
[11]	Kennedy S R and Brett M J 2003 Appl. Opt. 42 4573
[12]	Hodgkinson I J and Wu Q H 1999 Appl. Phys. Lett. 74 1794
[13]	Wang S M, Fu X Y, Wang J G, Shao J D and Fan Z X 2006 Appl. Sur. Sci. 252 8734
[14]	Popta A C, Hawkeye M M, Sit J C and Brett M J 2004 Opt. Lett. 29 2545
[15]	ISO 11254-1:2000 2000 International Organization for Standardization} Switzerland
[16]	Zhao Y A, Wang T, Zhang D W, Shao J D and Fan Z X 2005 Appl. Surf. Sci. 245 335
[17]	Wang Y J, Zhao Y A, Gao W D and Fan Z X 2004 Opt. Eng. 43 87
[18]	Feng Y D, Wang Z M, Ma Y L and Zhang F J 2007 Chin. Phys. 16 1704
[19]	Aspnes D E, Theeten J B and Hottier F 1979 Phys. Rev. B 20 3292
[20]	Wang J G, Shao J D and Fan Z X 2005 Chin. Opt. Lett. 22 223

Graded index broadband antireflection coating prepared by glancing angle deposition for a high-power laser system

Graded index broadband antireflection coating prepared by glancing angle deposition for a high-power laser system

PDF (PC)

赞

可视化

摘要/Abstract

引用本文

使用本文

参考文献 20

相关文章 15

Metrics

本文评价

推荐阅读 0

[1]	Wenjia Yuan(袁文佳), Weidong Shen(沈伟东), Chen Xie(谢辰), Chenying Yang(杨陈楹), and Yueguang Zhang(章岳光). High-dispersive mirror for pulse stretcher in femtosecond fiber laser amplification system[J]. 中国物理B, 2022, 31(8): 87801-087801.
[2]	陈书真, 宋力刚, 张鹏, 曹兴忠, 于润升, 王宝义, 魏龙, 张仁刚. Influence of low-temperature sulfidation on the structure of ZnS thin films[J]. 中国物理B, 2019, 28(2): 24214-024214.
[3]	方美华, 田鹏宇, 朱茂东, 齐红基, 费涛, 吕金鹏, 刘会平. Laser-induced damage threshold in HfO₂/SiO₂ multilayer films irradiated by β-ray[J]. 中国物理B, 2019, 28(2): 24215-024215.
[4]	章瑛, 王胭脂, 赵娇玲, 邵建达, 阮双琛. Experimental demonstration of narrow-band rugate minus filters using rapidly alternating deposition technology[J]. 中国物理B, 2018, 27(5): 54217-054217.
[5]	吕起鹏, 邓淞文, 张绍骞, 公发全, 李刚. Fabrication of broadband antireflection coatings using broadband optical monitoring mixed with time monitoring[J]. 中国物理B, 2017, 26(5): 57801-057801.
[6]	张洪, 晋云霞, 王虎, 孔钒宇, 黄昊鹏, 崔云. Effects of annealing time on the structure, morphology and stress of gold-chromium bilayer film[J]. 中国物理B, 2016, 25(10): 104205-104205.
[7]	章瑛, 齐红基, 易葵, 王胭脂, 隋展, 邵建达. Analysis of the spatial filter of a dielectric multilayer film reflective cutoff filter-combination device[J]. 中国物理B, 2015, 24(10): 104216-104216.
[8]	章瑛, 齐红基, 易葵, 王胭脂, 隋展, 邵建达. An improved transmitting multi-layer thin-film filter[J]. 中国物理B, 2015, 24(5): 54212-054212.
[9]	杨彪, 李智勇, 俞育德, 余金中. High-efficiency focusing grating coupler with optimized ultra-short taper[J]. 中国物理B, 2014, 23(11): 114206-114206.
[10]	张俊超, 熊利民, 方明, 贺洪波. Wide-angle and broadband graded-refractive-index antireflection coatings[J]. Chin. Phys. B, 2013, 22(4): 44201-044201.
[11]	姚银华, 曹全喜. Infrared emissivities of Mn, Co co-doped ZnO powders[J]. Chin. Phys. B, 2012, 21(12): 124205-124205.
[12]	麻健勇, 许程, 强颖怀, 朱亚波. Broadband non-polarizing beam splitter based on guided mode resonance effect[J]. 中国物理B, 2011, 20(10): 104209-104209.
[13]	许程, 许林敏, 强颖怀, 朱亚波, 刘炯天, 麻健勇. Excellent polarization-independent reflector based on guided mode resonance effect[J]. 中国物理B, 2011, 20(10): 104210-104210.
[14]	汪剑鹏, 晋云霞, 麻健勇, 邵建达, 范正修. Analysis of restriction factors of widening diffraction bandwidth of multilayer dielectric grating[J]. 中国物理B, 2010, 19(10): 104201-104201.
[15]	汪剑鹏, 晋云霞, 麻健勇, 邵建达, 范正修. Study on guided-mode resonance characteristic of multilayer dielectric grating with broadband and wide using-angle[J]. 中国物理B, 2010, 19(5): 54202-054202.