中国物理B ›› 2019, Vol. 28 ›› Issue (2): 24214-024214.doi: 10.1088/1674-1056/28/2/024214

• ELECTROMAGNETISM, OPTICS, ACOUSTICS, HEAT TRANSFER, CLASSICAL MECHANICS, AND FLUID DYNAMICS • 上一篇    下一篇

Influence of low-temperature sulfidation on the structure of ZnS thin films

Shuzhen Chen(陈书真), Ligang Song(宋力刚), Peng Zhang(张鹏), Xingzhong Cao(曹兴忠), Runsheng Yu(于润升), Baoyi Wang(王宝义), Long Wei(魏龙), Rengang Zhang(张仁刚)   

  1. 1 Department of Applied Physics, Wuhan University of Science and Technology, Wuhan 430081, China;
    2 Institute of High Energy Physics, Chinese Academy of Sciences, Beijing 100049, China;
    3 University of Chinese Academy of Sciences, Beijing 100049, China
  • 收稿日期:2018-10-10 修回日期:2018-12-02 出版日期:2019-02-05 发布日期:2019-02-05
  • 通讯作者: Peng Zhang, Rengang Zhang E-mail:zhangpeng@ihep.ac.cn;zhangrengang@wust.edu.cn
  • 基金资助:

    Project supported by the National Natural Science Foundation of China (Grant Nos. 11705212 and 11675188).

Influence of low-temperature sulfidation on the structure of ZnS thin films

Shuzhen Chen(陈书真)1,2, Ligang Song(宋力刚)2,3, Peng Zhang(张鹏)2, Xingzhong Cao(曹兴忠)2,3, Runsheng Yu(于润升)2,3, Baoyi Wang(王宝义)2,3, Long Wei(魏龙)2,3, Rengang Zhang(张仁刚)1   

  1. 1 Department of Applied Physics, Wuhan University of Science and Technology, Wuhan 430081, China;
    2 Institute of High Energy Physics, Chinese Academy of Sciences, Beijing 100049, China;
    3 University of Chinese Academy of Sciences, Beijing 100049, China
  • Received:2018-10-10 Revised:2018-12-02 Online:2019-02-05 Published:2019-02-05
  • Contact: Peng Zhang, Rengang Zhang E-mail:zhangpeng@ihep.ac.cn;zhangrengang@wust.edu.cn
  • Supported by:

    Project supported by the National Natural Science Foundation of China (Grant Nos. 11705212 and 11675188).

摘要:

ZnS thin films were prepared by sulfuring zinc thin films at different sulfuration temperatures. The crystal structure, surface morphology, defects, and optical properties of the thin films were characterized by x-ray diffraction (XRD), scanning electron microscopy (SEM), positron annihilation Doppler broadening, and UV-Vis spectrophotometer, respectively. It was found that the (200)-plane preferred orientation of the ZnS thin films changed to (111)-plane with increasing sulfidation temperature. Moreover, a number of large holes were generated at 420℃ and eliminated at 440℃. The concentration of defects was lowest when the sulfuration temperature was 440℃. The optical transmission of all samples was maintained at 60%-80% in the wavelength range of 400 nm-800 nm, and the band energy of the ZnS thin films was approximately 3.5 eV for all treatment temperatures except 430℃.

关键词: ZnS thin films, low-temperature sulfidation, Doppler broadening measurements

Abstract:

ZnS thin films were prepared by sulfuring zinc thin films at different sulfuration temperatures. The crystal structure, surface morphology, defects, and optical properties of the thin films were characterized by x-ray diffraction (XRD), scanning electron microscopy (SEM), positron annihilation Doppler broadening, and UV-Vis spectrophotometer, respectively. It was found that the (200)-plane preferred orientation of the ZnS thin films changed to (111)-plane with increasing sulfidation temperature. Moreover, a number of large holes were generated at 420℃ and eliminated at 440℃. The concentration of defects was lowest when the sulfuration temperature was 440℃. The optical transmission of all samples was maintained at 60%-80% in the wavelength range of 400 nm-800 nm, and the band energy of the ZnS thin films was approximately 3.5 eV for all treatment temperatures except 430℃.

Key words: ZnS thin films, low-temperature sulfidation, Doppler broadening measurements

中图分类号:  (Infrared transmitting materials)

  • 42.70.Km
42.79.Wc (Optical coatings) 68.37.-d (Microscopy of surfaces, interfaces, and thin films) 81.40.Tv (Optical and dielectric properties related to treatment conditions)