中国物理B ›› 2007, Vol. 16 ›› Issue (12): 3754-3759.doi: 10.1088/1009-1963/16/12/033

• CONDENSED MATTER: STRUCTURAL, MECHANICAL, AND THERMAL PROPERTIES • 上一篇    下一篇

New CMOS compatible super junction LDMOST with n-type buried layer

段宝兴1, 张 波2, 李肇基2   

  1. (1)Microelectronics Institute, Xidian University, Xi'an 710071, China; (2)State Key Laboratory of Electronic Thin Films and Integrated Devices, University of Electronic Science and Technology of China, Chengdu 610054, China
  • 出版日期:2007-12-20 发布日期:2007-12-20
  • 基金资助:
    Project supported by the National Natural Science Foundation of China (Grant No~60436030) and the Key Laboratory for Defence Science and Technology on Military Simulation Integrated Circuits (Grant No~9140C0903010604).

New CMOS compatible super junction LDMOST with n-type buried layer

Duan Bao-Xing(段宝兴)a)† , Zhang Bo(张波)b), and Li Zhao-Ji(李肇基)b)   

  1. a Microelectronics Institute, Xidian University, Xi'an 710071, China; b State Key Laboratory of Electronic Thin Films and Integrated Devices, University of Electronic Science and Technology of China, Chengdu 610054, China
  • Online:2007-12-20 Published:2007-12-20
  • Supported by:
    Project supported by the National Natural Science Foundation of China (Grant No~60436030) and the Key Laboratory for Defence Science and Technology on Military Simulation Integrated Circuits (Grant No~9140C0903010604).

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摘要： A new super-junction lateral double diffused MOSFET (LDMOST) structure is designed with n-type charge compensation layer embedded in the p$^{ - }$-substrate near the drain to suppress substrate-assisted depletion effect that results from the compensating charges imbalance between the pillars in the n-type buried layer. A high electric field peak is introduced in the surface by the pn junction between the p$^{ - }$-substrate and n-type buried layer, which given rise to a more uniform surface electric field distribution by modulation effect. The effect of reduced bulk field (REBULF) is introduced to improve the vertical breakdown voltage by reducing the high bulk electric field around the drain. The new structure features high breakdown voltage, low on-resistance and charges balance in the drift region due to n-type buried layer.

Abstract: A new super-junction lateral double diffused MOSFET (LDMOST) structure is designed with n-type charge compensation layer embedded in the p$^{ - }$-substrate near the drain to suppress substrate-assisted depletion effect that results from the compensating charges imbalance between the pillars in the n-type buried layer. A high electric field peak is introduced in the surface by the pn junction between the p$^{ - }$-substrate and n-type buried layer, which given rise to a more uniform surface electric field distribution by modulation effect. The effect of reduced bulk field (REBULF) is introduced to improve the vertical breakdown voltage by reducing the high bulk electric field around the drain. The new structure features high breakdown voltage, low on-resistance and charges balance in the drift region due to n-type buried layer.

Key words: super-junction, LDMOST, n-type buried layer, REBULF, breakdown voltage

中图分类号:  (Field effect devices)

  • 85.30.Tv
73.40.Qv (Metal-insulator-semiconductor structures (including semiconductor-to-insulator)) 73.50.Fq (High-field and nonlinear effects)