中国物理B ›› 2005, Vol. 14 ›› Issue (6): 1205-1208.doi: 10.1088/1009-1963/14/6/025

• CONDENSED MATTER: ELECTRONIC STRUCTURE, ELECTRICAL, MAGNETIC, AND OPTICAL PROPERTIES • 上一篇    下一篇

Lasing action of high quality ZnO thin film deposited by radio-frequency magnetron sputtering

姚志刚, 张希清, 商红凯, 滕小瑛, 王永生, 黄世华   

  1. Institute of Optoelectronic Technology, Beijing Jiaotong University, Beijing 100044, China
  • 收稿日期:2004-09-21 修回日期:2005-01-18 出版日期:2005-05-27 发布日期:2005-05-27
  • 基金资助:
    Project supported by the State Key Development Program for Basic Research of China (Grant No 2003CB314707), the National Natural Science Foundation of China (Grant No 60476005), and the Foundation of the State Education Commission of China for Returned Sc

Lasing action of high quality ZnO thin film deposited by radio-frequency magnetron sputtering

Yao Zhi-Gang (姚志刚), Zhang Xi-Qing (张希清), Shang Hong-Kai (商红凯), Teng Xiao-Ying (滕小瑛), Wang Yong-Sheng (王永生), Huang Shi-Hua (黄世华)   

  1. Institute of Optoelectronic Technology, Beijing Jiaotong University, Beijing 100044, China
  • Received:2004-09-21 Revised:2005-01-18 Online:2005-05-27 Published:2005-05-27
  • Supported by:
    Project supported by the State Key Development Program for Basic Research of China (Grant No 2003CB314707), the National Natural Science Foundation of China (Grant No 60476005), and the Foundation of the State Education Commission of China for Returned Sc

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摘要： ZnO thin films are deposited on SiO2 substrates by radio-frequency magnetron sputtering. A and B excitons are observed from the absorption spectra at room temperature. A, B and C excitons are observed from the reflectance spectra at 19 K. These results indicate that the obtained ZnO films have a good wurtzite structure. We obtain the stimulated emission resulting from electron-hole plasma. The lasing spectrum is observed, which consist of a large number of narrow peaks with an around 0.5 nm spacing in between, corresponding to a self-formed cavity length of around 31.5 μm. The self-formation of laser cavity in the ZnO thin film is closed related to its the hexagon structure.

Abstract: ZnO thin films are deposited on SiO2 substrates by radio-frequency magnetron sputtering. A and B excitons are observed from the absorption spectra at room temperature. A, B and C excitons are observed from the reflectance spectra at 19 K. These results indicate that the obtained ZnO films have a good wurtzite structure. We obtain the stimulated emission resulting from electron-hole plasma. The lasing spectrum is observed, which consist of a large number of narrow peaks with an around 0.5 nm spacing in between, corresponding to a self-formed cavity length of around 31.5 μm. The self-formation of laser cavity in the ZnO thin film is closed related to its the hexagon structure.

Key words: ZnO thin films, stimulated emission, absorption

中图分类号:  (II-VI semiconductors)

  • 78.66.Hf
78.30.Fs (III-V and II-VI semiconductors) 42.60.Da (Resonators, cavities, amplifiers, arrays, and rings) 78.45.+h (Stimulated emission) 81.15.Cd (Deposition by sputtering)