中国物理B ›› 2021, Vol. 30 ›› Issue (9): 96107-096107.doi: 10.1088/1674-1056/ac11e1
Nanoscale structural investigation of Zn1-xMgxO alloy films on polar and nonpolar ZnO substrates with different Mg contents
Xin Liang(梁信)1, Hua Zhou(周华)2,†, Hui-Qiong Wang(王惠琼)1,3,‡, Lihua Zhang(张丽华)4, Kim Kisslinger4, and Junyong Kang(康俊勇)1
- 1 Key Laboratory of Semiconductors and Applications of Fujian Province, Collaborative Innovation Center for Optoelectronic Semiconductors and Efficient Devices, Department of Physics, Xiamen University, Xiamen 361005, China;
2 School of Physics, Shandong University, Jinan 250100, China;
3 Department of Physics, Xiamen University Malaysia, Sepang 43900, Selangor, Malaysia;
4 Center for Functional Nanomaterials, Brookhaven National Laboratory, Upton, New York 11973, USA
Nanoscale structural investigation of Zn1-xMgxO alloy films on polar and nonpolar ZnO substrates with different Mg contents
Xin Liang(梁信)1, Hua Zhou(周华)2,†, Hui-Qiong Wang(王惠琼)1,3,‡, Lihua Zhang(张丽华)4, Kim Kisslinger4, and Junyong Kang(康俊勇)1
- 1 Key Laboratory of Semiconductors and Applications of Fujian Province, Collaborative Innovation Center for Optoelectronic Semiconductors and Efficient Devices, Department of Physics, Xiamen University, Xiamen 361005, China;
2 School of Physics, Shandong University, Jinan 250100, China;
3 Department of Physics, Xiamen University Malaysia, Sepang 43900, Selangor, Malaysia;
4 Center for Functional Nanomaterials, Brookhaven National Laboratory, Upton, New York 11973, USA
摘要： Zn1-xMgxO alloy films are important deep ultraviolet photoelectric materials. In this work, we used plasma-assisted molecular beam epitaxy to prepare Zn1-xMgxO films with different magnesium contents on polar (0001) and nonpolar (1010) ZnO substrates. The nanoscale structural features of the grown alloy films as well as the interfaces were investigated. It was observed that the cubic phases of the alloy films emerged when the Mg content reached 20% and 37% for the alloy films grown on the (0001) and (1010) ZnO substrates, respectively. High-resolution transmission electron microscopy images revealed cubic phases without visible hexagonal phases for the alloy films with more than 70% magnesium, and the cubic phases exhibited three-fold and two-fold rotations for the alloy films on the polar (0001) and nonpolar (1010) ZnO substrates, respectively. This work aims to provide references for monitoring the Zn1-xMgxO film structure with respect to different substrate orientations.
中图分类号: (III-V and II-VI semiconductors)
- 61.72.uj