Sphere-shaped SiGe micro/nanostructures with tunable Ge composition and size formed by laser irradiation

doi:10.1088/1674-1056/ac0347

中国物理B ›› 2021, Vol. 30 ›› Issue (9): 96104-096104.doi: 10.1088/1674-1056/ac0347

Sphere-shaped SiGe micro/nanostructures with tunable Ge composition and size formed by laser irradiation

Xinxin Li(李欣欣)^1,2,3, Zhen Deng(邓震)^1,3,4,†, Sen Wang(王森)^1,2,3, Jinbiao Liu(刘金彪)^2,5, Jun Li(李俊)⁶, Yang Jiang(江洋)^1,3, Ziguang Ma(马紫光)^1,3, Chunhua Du(杜春花)^1,3,4, Haiqiang Jia(贾海强)^1,3,7, Wenxin Wang(王文新)^1,3,7, and Hong Chen(陈弘)^1,3,7,‡

1 Key Laboratory for Renewable Energy, Beijing Key Laboratory for New Energy Materials and Devices, Beijing National Laboratory for Condensed Matter Physics, Institute of Physics, Chinese Academy of Sciences, Beijing 100190, China;
2 University of Chinese Academy of Sciences, Beijing 100049, China;
3 Center of Materials and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China;
4 The Yangtze River Delta Physics Research Center, Liyang 213000, China;
5 Key Laboratory of Microelectronics Devices and Integrated Technology, Institute of Microelectronics, Chinese Academy of Sciences, China;
6 Beijing National Laboratory for Condensed Matter Physics, Institute of Physics, Chinese Academy of Sciences, Beijing 100190, China;
7 Songshan Lake Materials Laboratory, Dongguan 523808, China

收稿日期:2021-04-07 修回日期:2021-05-15 接受日期:2021-05-20 出版日期:2021-08-19 发布日期:2021-09-10
通讯作者: Zhen Deng, Hong Chen E-mail:zhen.deng@iphy.ac.cn;hchen@iphy.ac.cn
基金资助:
Project supported by the National Natural Science Foundation of China (Grant Nos. 62004218, 61991441, and 61804176), the Strategic Priority Research Program of Chinese Academy of Sciences (Grant No. XDB01000000), and the Youth Innovation Promotion Association of Chinese Academy of Sciences (Grant No. 2021005).

Sphere-shaped SiGe micro/nanostructures with tunable Ge composition and size formed by laser irradiation

1 Key Laboratory for Renewable Energy, Beijing Key Laboratory for New Energy Materials and Devices, Beijing National Laboratory for Condensed Matter Physics, Institute of Physics, Chinese Academy of Sciences, Beijing 100190, China;
2 University of Chinese Academy of Sciences, Beijing 100049, China;
3 Center of Materials and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China;
4 The Yangtze River Delta Physics Research Center, Liyang 213000, China;
5 Key Laboratory of Microelectronics Devices and Integrated Technology, Institute of Microelectronics, Chinese Academy of Sciences, China;
6 Beijing National Laboratory for Condensed Matter Physics, Institute of Physics, Chinese Academy of Sciences, Beijing 100190, China;
7 Songshan Lake Materials Laboratory, Dongguan 523808, China

Received:2021-04-07 Revised:2021-05-15 Accepted:2021-05-20 Online:2021-08-19 Published:2021-09-10
Contact: Zhen Deng, Hong Chen E-mail:zhen.deng@iphy.ac.cn;hchen@iphy.ac.cn
Supported by:
Project supported by the National Natural Science Foundation of China (Grant Nos. 62004218, 61991441, and 61804176), the Strategic Priority Research Program of Chinese Academy of Sciences (Grant No. XDB01000000), and the Youth Innovation Promotion Association of Chinese Academy of Sciences (Grant No. 2021005).

摘要/Abstract

摘要： SiGe spheres with different diameters are successfully fabricated on a virtual SiGe template using a laser irradiation method. The results from scanning electron microscopy and micro-Raman spectroscopy reveal that the diameter and Ge composition of the SiGe spheres can be well controlled by adjusting the laser energy density. In addition, the transmission electron microscopy results show that Ge composition inside the SiGe spheres is almost uniform in a well-defined, nearly spherical outline. As a convenient method to prepare sphere-shaped SiGe micro/nanostructures with tunable Ge composition and size, this technique is expected to be useful for SiGe-based material growth and micro/optoelectronic device fabrication.

关键词: SiGe, micro/nanospheres, laser irradiation

Abstract: SiGe spheres with different diameters are successfully fabricated on a virtual SiGe template using a laser irradiation method. The results from scanning electron microscopy and micro-Raman spectroscopy reveal that the diameter and Ge composition of the SiGe spheres can be well controlled by adjusting the laser energy density. In addition, the transmission electron microscopy results show that Ge composition inside the SiGe spheres is almost uniform in a well-defined, nearly spherical outline. As a convenient method to prepare sphere-shaped SiGe micro/nanostructures with tunable Ge composition and size, this technique is expected to be useful for SiGe-based material growth and micro/optoelectronic device fabrication.

Key words: SiGe, micro/nanospheres, laser irradiation

中图分类号: (Ge and Si)

61.72.uf

81.16.-c (Methods of micro- and nanofabrication and processing) 61.80.Ba (Ultraviolet, visible, and infrared radiation effects (including laser radiation))

Xinxin Li(李欣欣), Zhen Deng(邓震), Sen Wang(王森), Jinbiao Liu(刘金彪), Jun Li(李俊), Yang Jiang(江洋), Ziguang Ma(马紫光), Chunhua Du(杜春花), Haiqiang Jia(贾海强), Wenxin Wang(王文新), and Hong Chen(陈弘). Sphere-shaped SiGe micro/nanostructures with tunable Ge composition and size formed by laser irradiation[J]. 中国物理B, 2021, 30(9): 96104-096104.

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Sphere-shaped SiGe micro/nanostructures with tunable Ge composition and size formed by laser irradiation

Sphere-shaped SiGe micro/nanostructures with tunable Ge composition and size formed by laser irradiation

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