中国物理B ›› 2017, Vol. 26 ›› Issue (12): 125201-125201.doi: 10.1088/1674-1056/26/12/125201

• PHYSICS OF GASES, PLASMAS, AND ELECTRIC DISCHARGES • 上一篇    下一篇

Effects of gas pressure on plasma characteristics in dual frequency argon capacitive glow discharges at low pressure by a self-consistent fluid model

Lu-Lu Zhao(赵璐璐), Yue Liu(刘悦), Tagra Samir   

  1. 1. Key Laboratory of Materials Modification by Laser, Ion and Electron Beams(Ministry of Education), School of Physics, Dalian University of Technology, Dalian 116024, China;
    2. School of Information Science and Engineering, Dalian Polytechnic University, Dalian 116034, China
  • 收稿日期:2017-06-29 修回日期:2017-08-30 出版日期:2017-12-05 发布日期:2017-12-05
  • 通讯作者: Yue Liu E-mail:liuyue@dlut.edu.cn
  • 基金资助:
    Project supported by the National Natural Science Foundation of China (Grant No. 51172101).

Effects of gas pressure on plasma characteristics in dual frequency argon capacitive glow discharges at low pressure by a self-consistent fluid model

Lu-Lu Zhao(赵璐璐)1,2, Yue Liu(刘悦)1, Tagra Samir1   

  1. 1. Key Laboratory of Materials Modification by Laser, Ion and Electron Beams(Ministry of Education), School of Physics, Dalian University of Technology, Dalian 116024, China;
    2. School of Information Science and Engineering, Dalian Polytechnic University, Dalian 116034, China
  • Received:2017-06-29 Revised:2017-08-30 Online:2017-12-05 Published:2017-12-05
  • Contact: Yue Liu E-mail:liuyue@dlut.edu.cn
  • Supported by:
    Project supported by the National Natural Science Foundation of China (Grant No. 51172101).

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摘要： A self-consistent fluid model for dual radio frequency argon capacitive glow discharges at low pressure is established. Numerical results are obtained by using a finite difference method to solve the model numerically, and the results are analyzed to study the effect of gas pressure on the plasma characteristics. It shows that when the gas pressure increases from 0.3 Torr (1 Torr=1.33322×102 Pa) to 1.5 Torr, the cycle-averaged plasma density and the ionization rate increase; the cycle-averaged ion current densities and ion energy densities on the electrodes electrode increase; the cycle-averaged electron temperature decreases. Also, the instantaneous electron density in the powered sheath region is presented and discussed. The cycle-averaged electric field has a complex behavior with the increasing of gas pressure, and its changes take place mainly in the two sheath regions. The cycle-averaged electron pressure heating, electron ohmic heating, electron heating, and electron energy loss are all influenced by the gas pressure. Two peaks of the electron heating appear in the sheath regions and the two peaks become larger and move to electrodes as the gas pressure increases.

关键词: dual frequency, gas pressure, glow discharge

Abstract: A self-consistent fluid model for dual radio frequency argon capacitive glow discharges at low pressure is established. Numerical results are obtained by using a finite difference method to solve the model numerically, and the results are analyzed to study the effect of gas pressure on the plasma characteristics. It shows that when the gas pressure increases from 0.3 Torr (1 Torr=1.33322×102 Pa) to 1.5 Torr, the cycle-averaged plasma density and the ionization rate increase; the cycle-averaged ion current densities and ion energy densities on the electrodes electrode increase; the cycle-averaged electron temperature decreases. Also, the instantaneous electron density in the powered sheath region is presented and discussed. The cycle-averaged electric field has a complex behavior with the increasing of gas pressure, and its changes take place mainly in the two sheath regions. The cycle-averaged electron pressure heating, electron ohmic heating, electron heating, and electron energy loss are all influenced by the gas pressure. Two peaks of the electron heating appear in the sheath regions and the two peaks become larger and move to electrodes as the gas pressure increases.

Key words: dual frequency, gas pressure, glow discharge

中图分类号:  (Ionization of plasmas)

  • 52.25.Jm
52.30.Ex (Two-fluid and multi-fluid plasmas) 52.50.Qt (Plasma heating by radio-frequency fields; ICR, ICP, helicons) 52.65.-y (Plasma simulation)