中国物理B ›› 2016, Vol. 25 ›› Issue (7): 78107-078107.doi: 10.1088/1674-1056/25/7/078107

• INTERDISCIPLINARY PHYSICS AND RELATED AREAS OF SCIENCE AND TECHNOLOGY • 上一篇    下一篇

Hexagonal boron nitride hollow capsules with collapsed surfaces: Chemical vapor deposition with single-source precursor ammonium fluoroborate

Xiaopeng Li(李肖鹏), Jun Zhang(张军), Chao Yu(郁超), Xiaoxi Liu(刘晓喜), Saleem Abbas, Jie Li(李杰), Yanming Xue(薛彦明), Chengchun Tang(唐成春)   

  1. 1 School of Material Science and Engineering, Hebei University of Technology, Tianjin 300130, China;
    2 World Premier International Center for Materials Nanoarchitectonics (WPI-MANA), National Institute for Materials Science (NIMS), Namiki 1-1, Tsukuba, Ibaraki 305-0044, Japan
  • 收稿日期:2016-01-10 修回日期:2016-02-25 出版日期:2016-07-05 发布日期:2016-07-05
  • 通讯作者: Yanming Xue, Chengchun Tang E-mail:XUE.Yanming@nims.go.jp;tangcc@hebut.edu.cn
  • 基金资助:

    Project supported by the National Natural Science Foundation of China (Grant Nos. 51332005, 51372066, 51172060, 51202055, and 21103056).

Hexagonal boron nitride hollow capsules with collapsed surfaces: Chemical vapor deposition with single-source precursor ammonium fluoroborate

Xiaopeng Li(李肖鹏)1, Jun Zhang(张军)1, Chao Yu(郁超)1, Xiaoxi Liu(刘晓喜)1, Saleem Abbas1, Jie Li(李杰)1, Yanming Xue(薛彦明)2, Chengchun Tang(唐成春)1   

  1. 1 School of Material Science and Engineering, Hebei University of Technology, Tianjin 300130, China;
    2 World Premier International Center for Materials Nanoarchitectonics (WPI-MANA), National Institute for Materials Science (NIMS), Namiki 1-1, Tsukuba, Ibaraki 305-0044, Japan
  • Received:2016-01-10 Revised:2016-02-25 Online:2016-07-05 Published:2016-07-05
  • Contact: Yanming Xue, Chengchun Tang E-mail:XUE.Yanming@nims.go.jp;tangcc@hebut.edu.cn
  • Supported by:

    Project supported by the National Natural Science Foundation of China (Grant Nos. 51332005, 51372066, 51172060, 51202055, and 21103056).

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摘要：

SBA-15 (mesoporous SiO2) is used to stabilize and transfer F- in the NH4BF4 CVD reaction for the first time, and a large-scale crystalline h-BN phase can be prepared. We successfully fabricate hollow h-BN capsules with collapsed surfaces in our designed NH4BF4 CVD system. Optimum temperature conditions are obtained, and a detailed formation mechanism is further proposed. The successful SBA-15-assisted NH4BF4 CVD route is of importance and enriches the engineering technology in the h-BN single-source CVD reaction.

关键词: hollow capsule, hexagonal boron nitride, chemical vapor deposition, ammonium fluoroborate

Abstract:

SBA-15 (mesoporous SiO2) is used to stabilize and transfer F- in the NH4BF4 CVD reaction for the first time, and a large-scale crystalline h-BN phase can be prepared. We successfully fabricate hollow h-BN capsules with collapsed surfaces in our designed NH4BF4 CVD system. Optimum temperature conditions are obtained, and a detailed formation mechanism is further proposed. The successful SBA-15-assisted NH4BF4 CVD route is of importance and enriches the engineering technology in the h-BN single-source CVD reaction.

Key words: hollow capsule, hexagonal boron nitride, chemical vapor deposition, ammonium fluoroborate

中图分类号:  (Nanoscale materials and structures: fabrication and characterization)

  • 81.07.-b
81.05.Je (Ceramics and refractories (including borides, carbides, hydrides, nitrides, oxides, and silicides)) 81.15.Gh (Chemical vapor deposition (including plasma-enhanced CVD, MOCVD, ALD, etc.)) 78.30.Hv (Other nonmetallic inorganics)