中国物理B ›› 2016, Vol. 25 ›› Issue (3): 38505-038505.doi: 10.1088/1674-1056/25/3/038505

• INTERDISCIPLINARY PHYSICS AND RELATED AREAS OF SCIENCE AND TECHNOLOGY • 上一篇    下一篇

Design and fabrication of multi-channel photodetector array monolithic with arrayed waveguide grating

Qian-Qian Lv(吕倩倩), Pan Pan(潘盼), Han Ye(叶焓), Dong-Dong Yin(尹冬冬),Yu-Bing Wang(王玉冰), Xiao-Hong Yang(杨晓红), Qin Han(韩勤)   

  1. State Key Laboratory of Integrated Optoelectronics, Institute of Semiconductors, Chinese Academy of Science, Beijing 100083, China
  • 收稿日期:2015-07-23 修回日期:2015-12-01 出版日期:2016-03-05 发布日期:2016-03-05
  • 通讯作者: Qin Han E-mail:hanqin@semi.ac.cn
  • 基金资助:
    Project supported by the National High Technology Research and Development Program of China (Grant Nos. 2013AA031401, 2015AA016902, and 2015AA016904), the National Natural Science Foundation of China (Grant Nos. 61176053, 61274069, and 61435002), and the National Basic Research Program of China (Grant Nos. 2012CB933503 and 2013CB932904).

Design and fabrication of multi-channel photodetector array monolithic with arrayed waveguide grating

Qian-Qian Lv(吕倩倩), Pan Pan(潘盼), Han Ye(叶焓), Dong-Dong Yin(尹冬冬),Yu-Bing Wang(王玉冰), Xiao-Hong Yang(杨晓红), Qin Han(韩勤)   

  1. State Key Laboratory of Integrated Optoelectronics, Institute of Semiconductors, Chinese Academy of Science, Beijing 100083, China
  • Received:2015-07-23 Revised:2015-12-01 Online:2016-03-05 Published:2016-03-05
  • Contact: Qin Han E-mail:hanqin@semi.ac.cn
  • Supported by:
    Project supported by the National High Technology Research and Development Program of China (Grant Nos. 2013AA031401, 2015AA016902, and 2015AA016904), the National Natural Science Foundation of China (Grant Nos. 61176053, 61274069, and 61435002), and the National Basic Research Program of China (Grant Nos. 2012CB933503 and 2013CB932904).

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摘要： We have provided optical simulations of the evanescently coupled waveguide photodiodes integrated with a 13-channels AWGs. The photodiode could exhibit high internal efficiency by appropriate choice of layers geometry and refractive index. Aseamless joint structure has been designed and fabricated for integrating the output waveguides of AWGs with the evanescently coupled waveguide photodiode array. The highest simulation quantum efficiency could achieve 92% when the matching layer thickness of the PD is 120 nm and the insertion length is 2 μm. The fabricated PD with 320-nm-thick matching layer and 2-μm-length insertion matching layer present a responsivity of 0.87 A/W.

关键词: photodetector array, monolithic, evanescent coupling, arrayed waveguide grating

Abstract: We have provided optical simulations of the evanescently coupled waveguide photodiodes integrated with a 13-channels AWGs. The photodiode could exhibit high internal efficiency by appropriate choice of layers geometry and refractive index. Aseamless joint structure has been designed and fabricated for integrating the output waveguides of AWGs with the evanescently coupled waveguide photodiode array. The highest simulation quantum efficiency could achieve 92% when the matching layer thickness of the PD is 120 nm and the insertion length is 2 μm. The fabricated PD with 320-nm-thick matching layer and 2-μm-length insertion matching layer present a responsivity of 0.87 A/W.

Key words: photodetector array, monolithic, evanescent coupling, arrayed waveguide grating

中图分类号:  (Photodetectors (including infrared and CCD detectors))

  • 85.60.Gz
42.79.Sz (Optical communication systems, multiplexers, and demultiplexers?) 42.82.Bq (Design and performance testing of integrated-optical systems)