中国物理B ›› 2016, Vol. 25 ›› Issue (3): 38505-038505.doi: 10.1088/1674-1056/25/3/038505
• INTERDISCIPLINARY PHYSICS AND RELATED AREAS OF SCIENCE AND TECHNOLOGY • 上一篇 下一篇
Qian-Qian Lv(吕倩倩), Pan Pan(潘盼), Han Ye(叶焓), Dong-Dong Yin(尹冬冬),Yu-Bing Wang(王玉冰), Xiao-Hong Yang(杨晓红), Qin Han(韩勤)
Qian-Qian Lv(吕倩倩), Pan Pan(潘盼), Han Ye(叶焓), Dong-Dong Yin(尹冬冬),Yu-Bing Wang(王玉冰), Xiao-Hong Yang(杨晓红), Qin Han(韩勤)
摘要: We have provided optical simulations of the evanescently coupled waveguide photodiodes integrated with a 13-channels AWGs. The photodiode could exhibit high internal efficiency by appropriate choice of layers geometry and refractive index. Aseamless joint structure has been designed and fabricated for integrating the output waveguides of AWGs with the evanescently coupled waveguide photodiode array. The highest simulation quantum efficiency could achieve 92% when the matching layer thickness of the PD is 120 nm and the insertion length is 2 μm. The fabricated PD with 320-nm-thick matching layer and 2-μm-length insertion matching layer present a responsivity of 0.87 A/W.
中图分类号: (Photodetectors (including infrared and CCD detectors))