中国物理B ›› 2016, Vol. 25 ›› Issue (3): 38504-038504.doi: 10.1088/1674-1056/25/3/038504

• INTERDISCIPLINARY PHYSICS AND RELATED AREAS OF SCIENCE AND TECHNOLOGY • 上一篇    下一篇

Mobility enhancement of strained GaSb p-channel metal—oxide—semiconductor field-effect transistorswith biaxial compressive strain

Yan-Wen Chen(陈燕文), Zhen Tan(谭桢), Lian-Feng Zhao(赵连锋), Jing Wang(王敬), Yi-Zhou Liu(刘易周),Chen Si(司晨), Fang Yuan(袁方), Wen-Hui Duan(段文晖), Jun Xu(许军)   

  1. 1. Department of Physics, Tsinghua University, Beijing 100084, China;
    2. Tsinghua National Laboratory for Information Science and Technology, Institute of Microelectronics, Tsinghua University, Beijing 100084, China;
    3. Department of Electrical Engineering, Princeton University, Princeton, Princeton, NJ 08544, USA;
    4. School of Materials Science and Engineering, Beihang University, Beijing 100191, China
  • 收稿日期:2015-10-19 修回日期:2015-11-09 出版日期:2016-03-05 发布日期:2016-03-05
  • 通讯作者: Jun Xu E-mail:junxu@tsinghua.edu.cn
  • 基金资助:
    Project supported by the National Basic Research Program of China (Grant No. 2011CBA00602) and the National Science and Technology Major Project of the Ministry of Science and Technology of China (Grant No. 2011ZX02708-002).

Mobility enhancement of strained GaSb p-channel metal—oxide—semiconductor field-effect transistorswith biaxial compressive strain

Yan-Wen Chen(陈燕文)1, Zhen Tan(谭桢)2, Lian-Feng Zhao(赵连锋)2,3, Jing Wang(王敬)2, Yi-Zhou Liu(刘易周)1,Chen Si(司晨)4, Fang Yuan(袁方)2, Wen-Hui Duan(段文晖)1, Jun Xu(许军)2   

  1. 1. Department of Physics, Tsinghua University, Beijing 100084, China;
    2. Tsinghua National Laboratory for Information Science and Technology, Institute of Microelectronics, Tsinghua University, Beijing 100084, China;
    3. Department of Electrical Engineering, Princeton University, Princeton, Princeton, NJ 08544, USA;
    4. School of Materials Science and Engineering, Beihang University, Beijing 100191, China
  • Received:2015-10-19 Revised:2015-11-09 Online:2016-03-05 Published:2016-03-05
  • Contact: Jun Xu E-mail:junxu@tsinghua.edu.cn
  • Supported by:
    Project supported by the National Basic Research Program of China (Grant No. 2011CBA00602) and the National Science and Technology Major Project of the Ministry of Science and Technology of China (Grant No. 2011ZX02708-002).

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摘要： Various biaxial compressive strained GaSb p-channel metal-oxide-semiconductor field-effect transistors (MOSFETs) are experimentally and theoretically investigated. The biaxial compressive strained GaSb MOSFETs show a high peak mobility of 638 cm2/V·s, which is 3.86 times of the extracted mobility of the fabricated GaSb MOSFETs without strain. Meanwhile, first principles calculations show that the hole effective mass of GaSb depends on the biaxial compressive strain. The biaxial compressive strain brings a remarkable enhancement of the hole mobility caused by a significant reduction in the hole effective mass due to the modulation of the valence bands.

关键词: GaSb, metal-oxide-semiconductor field-effect transistor, strain, first principles calculations

Abstract: Various biaxial compressive strained GaSb p-channel metal-oxide-semiconductor field-effect transistors (MOSFETs) are experimentally and theoretically investigated. The biaxial compressive strained GaSb MOSFETs show a high peak mobility of 638 cm2/V·s, which is 3.86 times of the extracted mobility of the fabricated GaSb MOSFETs without strain. Meanwhile, first principles calculations show that the hole effective mass of GaSb depends on the biaxial compressive strain. The biaxial compressive strain brings a remarkable enhancement of the hole mobility caused by a significant reduction in the hole effective mass due to the modulation of the valence bands.

Key words: GaSb, metal-oxide-semiconductor field-effect transistor, strain, first principles calculations

中图分类号:  (Field effect devices)

  • 85.30.Tv
81.05.Ea (III-V semiconductors) 77.55.dj (For nonsilicon electronics (Ge, III-V, II-VI, organic electronics)) 71.15.Mb (Density functional theory, local density approximation, gradient and other corrections)