中国物理B ›› 2010, Vol. 19 ›› Issue (11): 116201-110202.doi: 10.1088/1674-1056/19/11/116201

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Brillouin scattering study on elastic and piezoelectric properties of laser irradiated ZnO single crystals

刘洁, 蒋毅坚   

  1. Institute of Laser Engineering, Beijing University of Technology, Beijing 100124, China
  • 收稿日期:2010-05-17 修回日期:2010-07-13 出版日期:2010-11-15 发布日期:2010-11-15
  • 基金资助:
    Project supported by the National Natural Science Foundation of China (Grant No. 10974009).

Brillouin scattering study on elastic and piezoelectric properties of laser irradiated ZnO single crystals

Liu Jie(刘洁)† and Jiang Yi-Jian(蒋毅坚)   

  1. Institute of Laser Engineering, Beijing University of Technology, Beijing 100124, China
  • Received:2010-05-17 Revised:2010-07-13 Online:2010-11-15 Published:2010-11-15
  • Supported by:
    Project supported by the National Natural Science Foundation of China (Grant No. 10974009).

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摘要： Brillouin light scattering technique can be successfully used to determine the whole set of elastic and piezoelectric constants of a ZnO single crystal irradiated by different laser energy densities, into a micron range (radiation layer thickness). It is found that the scattering intensity, the linewidth and the Brillouin scattering shift of acoustic phonons are all strongly dependent on laser energy density. Based on the sound propagation equations and these results, the directional dependences of the compressional and shear moduli of the irradiated ZnO sample in the (001) plane are investigated. It is found that under an appropriate laser condition, 248 nm KrF excimer laser irradiation can significantly improve the surface quality and increase the elastic properties of ZnO single crystal. This procedure has potential applications in the fabrication of ZnO-based surface acoustic wave and optic-electronic devices.

Abstract: Brillouin light scattering technique can be successfully used to determine the whole set of elastic and piezoelectric constants of a ZnO single crystal irradiated by different laser energy densities, into a micron range (radiation layer thickness). It is found that the scattering intensity, the linewidth and the Brillouin scattering shift of acoustic phonons are all strongly dependent on laser energy density. Based on the sound propagation equations and these results, the directional dependences of the compressional and shear moduli of the irradiated ZnO sample in the (001) plane are investigated. It is found that under an appropriate laser condition, 248 nm KrF excimer laser irradiation can significantly improve the surface quality and increase the elastic properties of ZnO single crystal. This procedure has potential applications in the fabrication of ZnO-based surface acoustic wave and optic-electronic devices.

Key words: laser irradiation, ZnO single crystal, Brillouin scattering

中图分类号:  (Ultraviolet, visible, and infrared radiation effects (including laser radiation))

  • 61.80.Ba
61.82.Fk (Semiconductors) 62.20.D- (Elasticity) 77.65.Bn (Piezoelectric and electrostrictive constants) 78.35.+c (Brillouin and Rayleigh scattering; other light scattering) 81.40.Jj (Elasticity and anelasticity, stress-strain relations)