中国物理B ›› 1993, Vol. 2 ›› Issue (6): 464-469.doi: 10.1088/1004-423X/2/6/008

• 8000 CROSSDISCIPLINARY PHYSICS AND RELATED AREAS OF SCIENCE AND TECHNOLOGY • 上一篇    

STUDIES ON INFRARED AND PHOTOLUMINESCENCE PROPERTIES OF CdIn2O4 FILMS DEPOSITED BY RF REACTIVE SPUTTERING

蒋生蕊, 彭栋梁   

  1. Department of Physics, Lanzhou University, Lanzhou 730001, China
  • 收稿日期:1992-06-11 出版日期:1993-06-20 发布日期:1993-06-20
  • 基金资助:
    Project supported by the National Natural Science Foundation of China.

STUDIES ON INFRARED AND PHOTOLUMINESCENCE PROPERTIES OF CdIn2O4 FILMS DEPOSITED BY RF REACTIVE SPUTTERING

JIANG SHENG-RUI (蒋生蕊), PENG DONG-LIANG (彭栋梁)   

  1. Department of Physics, Lanzhou University, Lanzhou 730001, China
  • Received:1992-06-11 Online:1993-06-20 Published:1993-06-20
  • Supported by:
    Project supported by the National Natural Science Foundation of China.

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摘要： Transparent and conductive CdIn2O4(CIO) thin films were prepared successfully by rf reactive sputtering from a Cd-In alloy target in an Ar+O2 atmosphere. The measurement of transmission and reflection spectra, at wavelengths between 0.2 and 6.0μm, and photoluminescence spectrum of the films are reported. The optical properties of the films are analyzed and discussed in detail. Two reasonable methods for calculating the effective mass of the free carrier in the films are presented.

Abstract: Transparent and conductive CdIn2O4(CIO) thin films were prepared successfully by rf reactive sputtering from a Cd-In alloy target in an Ar+O2 atmosphere. The measurement of transmission and reflection spectra, at wavelengths between 0.2 and 6.0μm, and photoluminescence spectrum of the films are reported. The optical properties of the films are analyzed and discussed in detail. Two reasonable methods for calculating the effective mass of the free carrier in the films are presented.

中图分类号:  (Other semiconductors)

  • 78.66.Li
78.55.Hx (Other solid inorganic materials) 78.30.Hv (Other nonmetallic inorganics) 81.15.Cd (Deposition by sputtering) 68.55.A- (Nucleation and growth) 71.18.+y (Fermi surface: calculations and measurements; effective mass, g factor)