Study of nanocrystalline VO2 thin films prepared by magnetron sputtering and post-oxidation

doi:10.1088/1674-1056/19/10/106103

中国物理B ›› 2010, Vol. 19 ›› Issue (10): 106103-106103.doi: 10.1088/1674-1056/19/10/106103

Study of nanocrystalline VO₂ thin films prepared by magnetron sputtering and post-oxidation

罗振飞, 吴志明, 许向东, 王涛, 蒋亚东

School of Optoelectronic Information, State Key Laboratory of Electronic Thin Films and Integrated Devices, University of Electronic Science and Technology of China, Chengdu 610054, China

收稿日期:2009-12-09 修回日期:2010-04-12 出版日期:2010-10-15 发布日期:2010-10-15
基金资助:
Project partly supported by the National Natural Science Foundation of China (Grant No. 60736005).

Study of nanocrystalline VO₂ thin films prepared by magnetron sputtering and post-oxidation

Luo Zhen-Fei(罗振飞)^†, Wu Zhi-Ming(吴志明)^‡, Xu Xiang-Dong(许向东), Wang Tao(王涛), and Jiang Ya-Dong(蒋亚东)

School of Optoelectronic Information, State Key Laboratory of Electronic Thin Films and Integrated Devices, University of Electronic Science and Technology of China, Chengdu 610054, China

Received:2009-12-09 Revised:2010-04-12 Online:2010-10-15 Published:2010-10-15
Supported by:
Project partly supported by the National Natural Science Foundation of China (Grant No. 60736005).

摘要/Abstract

摘要： Nanocrystalline VO₂ thin films were deposited onto glass slides by direct current magnetron sputtering and post-oxidation. These films undergo semiconductor--metal transition at 70 du, accompanied by a resistance drop of two magnitude orders. The crystal structures and surface morphologies of the VO₂ films were characterized by x-ray diffraction (XRD) and atomic force microscope (AFM), respectively. Results reveal that the average grain size of VO₂ nanograins measured by XRD is smaller than those measured by AFM. In addition, Raman characterization indicates that stoichiometric VO₂ and oxygen-rich VO₂ phases coexist in the films, which is supported by x-ray photoelectron spectroscopy (XPS) results. Finally, the optical properties of the VO₂ films in UV-visible range were also evaluated. The optical band gap corresponding to 2p--3d inter-band transition was deduced according to the transmission and reflection spectra. And the deduced value, E_opt2p-3d=1.81 eV, is in good agreement with that previously obtained by theoretical calculation.

Abstract: Nanocrystalline VO₂ thin films were deposited onto glass slides by direct current magnetron sputtering and post-oxidation. These films undergo semiconductor–metal transition at 70 $^\circ$C, accompanied by a resistance drop of two magnitude orders. The crystal structures and surface morphologies of the VO₂ films were characterized by x-ray diffraction (XRD) and atomic force microscope (AFM), respectively. Results reveal that the average grain size of VO₂ nanograins measured by XRD is smaller than those measured by AFM. In addition, Raman characterization indicates that stoichiometric VO₂ and oxygen-rich VO₂ phases coexist in the films, which is supported by x-ray photoelectron spectroscopy (XPS) results. Finally, the optical properties of the VO₂ films in UV-visible range were also evaluated. The optical band gap corresponding to 2p–3d inter-band transition was deduced according to the transmission and reflection spectra. And the deduced value, E_opt2p–3d=1.81 eV, is in good agreement with that previously obtained by theoretical calculation.

Key words: nanocrystal, vanadium dioxide, magnetron sputtering, post-oxidation

中图分类号: (Nanocrystals)

61.46.Hk

68.55.-a (Thin film structure and morphology) 78.30.Hv (Other nonmetallic inorganics) 78.66.Li (Other semiconductors) 81.15.Cd (Deposition by sputtering) 81.16.Pr (Micro- and nano-oxidation)

罗振飞, 吴志明, 许向东, 王涛, 蒋亚东. Study of nanocrystalline VO₂ thin films prepared by magnetron sputtering and post-oxidation[J]. 中国物理B, 2010, 19(10): 106103-106103.

Luo Zhen-Fei(罗振飞), Wu Zhi-Ming(吴志明), Xu Xiang-Dong(许向东), Wang Tao(王涛), and Jiang Ya-Dong(蒋亚东). Study of nanocrystalline VO₂ thin films prepared by magnetron sputtering and post-oxidation[J]. Chin. Phys. B, 2010, 19(10): 106103-106103.

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Study of nanocrystalline VO₂ thin films prepared by magnetron sputtering and post-oxidation

Study of nanocrystalline VO₂ thin films prepared by magnetron sputtering and post-oxidation

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