中国物理B ›› 1998, Vol. 7 ›› Issue (9): 688-694.doi: 10.1088/1004-423X/7/9/007

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MAGNETIC FIELD GRADIENT EFFECTS ON ION FLUX BEHAVIORS IN ECR PLASMA SOURCES

吴汉明1, 邵福球2, 王龙2, 姚鑫兹2   

  1. (1)Institute of Mechanics, Academia Sinica, Beijing 100080, China; (2)Institute of Physics, Academia Sinica, Beijing 100080, China
  • 收稿日期:1997-07-31 修回日期:1998-03-24 出版日期:1998-09-20 发布日期:1998-09-20

MAGNETIC FIELD GRADIENT EFFECTS ON ION FLUX BEHAVIORS IN ECR PLASMA SOURCES

Shao Fu-qiu (邵福球)a, Wang Long (王龙)a, Wu Han-ming (吴汉明)b, Yao Xin-zi (姚鑫兹)a   

  1. a Institute of Physics, Academia Sinica, Beijing 100080, China; b Institute of Mechanics, Academia Sinica, Beijing 100080, China
  • Received:1997-07-31 Revised:1998-03-24 Online:1998-09-20 Published:1998-09-20

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摘要： The available electron cyclotron resonance plasma source has been simulated in two-dimensional configuration space (z, r) and three-dimensional velocity space (Vz, Vr, V$\theta$). The simulation is focused on the magnetic field gradient effects on ion flux behaviors in electron cyclotron resonance plasma sources. The simulation results show that, when the magnetic field gradients increase, electron temperature, plasma density, ionization rate, and ion flux in Z-direction would decrease, while ion energy and plasma potential would increase.

Abstract: The available electron cyclotron resonance plasma source has been simulated in two-dimensional configuration space (z, r) and three-dimensional velocity space (Vz, Vr, V$\theta$). The simulation is focused on the magnetic field gradient effects on ion flux behaviors in electron cyclotron resonance plasma sources. The simulation results show that, when the magnetic field gradients increase, electron temperature, plasma density, ionization rate, and ion flux in Z-direction would decrease, while ion energy and plasma potential would increase.

中图分类号:  (Plasma sources)

  • 52.50.Dg
52.25.Jm (Ionization of plasmas) 52.65.-y (Plasma simulation)