中国物理B ›› 2018, Vol. 27 ›› Issue (5): 55204-055204.doi: 10.1088/1674-1056/27/5/055204

• PHYSICS OF GASES, PLASMAS, AND ELECTRIC DISCHARGES • 上一篇    下一篇

A miniaturized 2.45 GHz ECR ion source at Peking University

Jia-Mei Wen(温佳美), Shi-Xiang Peng(彭士香), Hai-Tao Ren(任海涛), Tao Zhang(张滔), Jing-Feng Zhang(张景丰), Wen-Bin Wu(武文斌), Jiang Sun(孙江), Zhi-Yu Guo(郭之虞), Jia-Er Chen(陈佳洱)   

  1. State Key Laboratory of Nuclear Physics and Technology & Institute of Heavy Ion Physics, School of Physics, Peking University, Beijing 100871, China
  • 收稿日期:2018-01-12 修回日期:2018-03-10 出版日期:2018-05-05 发布日期:2018-05-05
  • 通讯作者: Shi-Xiang Peng E-mail:sxpeng@pku.edu.cn
  • 基金资助:

    Project supported by the National Basic Research Program of China (Grant No.2014CB845502) and the National Natural Science Foundation of China (Grant No.11575013).

A miniaturized 2.45 GHz ECR ion source at Peking University

Jia-Mei Wen(温佳美), Shi-Xiang Peng(彭士香), Hai-Tao Ren(任海涛), Tao Zhang(张滔), Jing-Feng Zhang(张景丰), Wen-Bin Wu(武文斌), Jiang Sun(孙江), Zhi-Yu Guo(郭之虞), Jia-Er Chen(陈佳洱)   

  1. State Key Laboratory of Nuclear Physics and Technology & Institute of Heavy Ion Physics, School of Physics, Peking University, Beijing 100871, China
  • Received:2018-01-12 Revised:2018-03-10 Online:2018-05-05 Published:2018-05-05
  • Contact: Shi-Xiang Peng E-mail:sxpeng@pku.edu.cn
  • Supported by:

    Project supported by the National Basic Research Program of China (Grant No.2014CB845502) and the National Natural Science Foundation of China (Grant No.11575013).

摘要:

A miniaturized 2.45 GHz permanent magnet electron cyclotron resonance (PMECR) ion source, which has the ability of producing a tens-mA H+ beam, has been built and tested at Peking University (PKU). Its plasma chamber dimension is Φ 30 mm×40 mm and the whole size of the ion source is Φ 180 mm×130 mm. This source has a unique structure with the whole source body embedded into the extraction system. It can be operated in both continuous wave (CW) mode and pulse mode. In the CW mode, more than 20 mA hydrogen ion beam at 40 kV can be obtained with the microwave power of 180 W and about 1 mA hydrogen ion beam is produced with a microwave power of 10 W. In the pulse mode, more than 50 mA hydrogen ion beam with a duty factor of 10% can be extracted when the peak microwave power is 1800 W.

关键词: miniaturized ECR ion source, hydrogen plasma, continuous wave (CW) beam, pulse beam

Abstract:

A miniaturized 2.45 GHz permanent magnet electron cyclotron resonance (PMECR) ion source, which has the ability of producing a tens-mA H+ beam, has been built and tested at Peking University (PKU). Its plasma chamber dimension is Φ 30 mm×40 mm and the whole size of the ion source is Φ 180 mm×130 mm. This source has a unique structure with the whole source body embedded into the extraction system. It can be operated in both continuous wave (CW) mode and pulse mode. In the CW mode, more than 20 mA hydrogen ion beam at 40 kV can be obtained with the microwave power of 180 W and about 1 mA hydrogen ion beam is produced with a microwave power of 10 W. In the pulse mode, more than 50 mA hydrogen ion beam with a duty factor of 10% can be extracted when the peak microwave power is 1800 W.

Key words: miniaturized ECR ion source, hydrogen plasma, continuous wave (CW) beam, pulse beam

中图分类号:  (Plasma heating by microwaves; ECR, LH, collisional heating)

  • 52.50.Sw
52.50.Dg (Plasma sources) 52.50.-b (Plasma production and heating) 52.59.-f (Intense particle beams and radiation sources)