中国物理B ›› 2022, Vol. 31 ›› Issue (7): 75203-075203.doi: 10.1088/1674-1056/ac40fd

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Plasma-wave interaction in helicon plasmas near the lower hybrid frequency

Yide Zhao(赵以德)1, Jinwei Bai(白进纬)2, Yong Cao(曹勇)2, Siyu Wu(吴思宇)2, Eduardo Ahedo3, Mario Merino3, and Bin Tian(田滨)2,†   

  1. 1 Science and Technology on Vacuum Technology and Physics Laboratory, Lanzhou Institute of Physics, Lanzhou 730000, China;
    2 School of Mechanical Engineering and Automation, Harbin Institute of Technology, Shenzhen 518055, China;
    3 Equipo de Propulsión Espacial y Plasmas(EP2), Universidad Carlos III de Madrid, 28911 Leganés, Spain
  • 收稿日期:2021-09-16 修回日期:2021-12-06 接受日期:2021-12-08 出版日期:2022-06-09 发布日期:2022-06-13
  • 通讯作者: Bin Tian E-mail:tianbin@hit.edu.cn
  • 基金资助:
    Project supported by the Open Fund for Science and Technology on Vacuum Technology and Physics Laboratory, Lanzhou Institute of Physics (Grant No. ZWK1703). The authors also acknowledge the support of the National Natural Science Foundation of China (Grant No. 51907039) and Shenzhen Technology Project (Grant Nos. JCYJ20190806142603534 and ZDSYS201707280904031). The contribution of E. Ahedo and M. Merino has been supported by the ESPEOS project (Grant No. PID2019-108034RB-I00/AEI/10.13039/501100011033), funded by the Agencia Estatal de Investigacion (Spanish National Research Agency).

Plasma-wave interaction in helicon plasmas near the lower hybrid frequency

Yide Zhao(赵以德)1, Jinwei Bai(白进纬)2, Yong Cao(曹勇)2, Siyu Wu(吴思宇)2, Eduardo Ahedo3, Mario Merino3, and Bin Tian(田滨)2,†   

  1. 1 Science and Technology on Vacuum Technology and Physics Laboratory, Lanzhou Institute of Physics, Lanzhou 730000, China;
    2 School of Mechanical Engineering and Automation, Harbin Institute of Technology, Shenzhen 518055, China;
    3 Equipo de Propulsión Espacial y Plasmas(EP2), Universidad Carlos III de Madrid, 28911 Leganés, Spain
  • Received:2021-09-16 Revised:2021-12-06 Accepted:2021-12-08 Online:2022-06-09 Published:2022-06-13
  • Contact: Bin Tian E-mail:tianbin@hit.edu.cn
  • Supported by:
    Project supported by the Open Fund for Science and Technology on Vacuum Technology and Physics Laboratory, Lanzhou Institute of Physics (Grant No. ZWK1703). The authors also acknowledge the support of the National Natural Science Foundation of China (Grant No. 51907039) and Shenzhen Technology Project (Grant Nos. JCYJ20190806142603534 and ZDSYS201707280904031). The contribution of E. Ahedo and M. Merino has been supported by the ESPEOS project (Grant No. PID2019-108034RB-I00/AEI/10.13039/501100011033), funded by the Agencia Estatal de Investigacion (Spanish National Research Agency).

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摘要： We study the characteristics of plasma-wave interaction in helicon plasmas near the lower hybrid frequency. The (0D) dispersion relation is derived to analyze the properties of the wave propagation and a 1D cylindrical plasma-wave interaction model is established to investigate the power deposition and to implement the parametric analysis. It is concluded that the lower hybrid resonance is the main mechanism of the power deposition in helicon plasmas when the RF frequency is near the lower hybrid frequency and the power deposition mainly concentrates on a very thin layer near the boundary. Therefore, it causes that the plasma resistance has a large local peak near the lower hybrid frequency and the variation of the plasma density and the parallel wavenumber lead to the frequency shifting of the local peaks. It is found that the magnetic field is still proportional to the plasma density for the local maximum plasma resistance and the slope changes due to the transition.

关键词: helicon plasmas, lower hybrid frequency, power deposition

Abstract: We study the characteristics of plasma-wave interaction in helicon plasmas near the lower hybrid frequency. The (0D) dispersion relation is derived to analyze the properties of the wave propagation and a 1D cylindrical plasma-wave interaction model is established to investigate the power deposition and to implement the parametric analysis. It is concluded that the lower hybrid resonance is the main mechanism of the power deposition in helicon plasmas when the RF frequency is near the lower hybrid frequency and the power deposition mainly concentrates on a very thin layer near the boundary. Therefore, it causes that the plasma resistance has a large local peak near the lower hybrid frequency and the variation of the plasma density and the parallel wavenumber lead to the frequency shifting of the local peaks. It is found that the magnetic field is still proportional to the plasma density for the local maximum plasma resistance and the slope changes due to the transition.

Key words: helicon plasmas, lower hybrid frequency, power deposition

中图分类号:  (Plasma sources)

  • 52.50.Dg
52.50.Qt (Plasma heating by radio-frequency fields; ICR, ICP, helicons)