中国物理B ›› 2025, Vol. 34 ›› Issue (7): 74203-074203.doi: 10.1088/1674-1056/adc18e

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Optimization of wide frequency range 6H-SiC MEMS chips for a fiber optic Fabry-Perot accelerometer

Mariano Mahissi(马依思·马里亚诺)1,2, Xinli Ma(马新莉)2,†, Weiming Cai(蔡卫明)2,‡, Xianmin Zhang(章献民)1, and Michel Dossou(多苏·米歇尔)3   

  1. 1 College of Information Science and Electronic Engineering, Zhejiang University, Hangzhou 310027, China;
    2 School of Information Science and Engineering, Ningbo Tech University, Ningbo 315100, China;
    3 Research Unit in Photonics and Wireless Communications, LETIA/EPAC, University of Abomey-Calavi, 01 BP 526 Abomey-Calavi, Benin
  • 收稿日期:2024-12-17 修回日期:2025-03-04 接受日期:2025-03-18 出版日期:2025-06-18 发布日期:2025-07-10
  • 通讯作者: Xinli Ma, Weiming Cai E-mail:maxinli@tju.edu.cn;caiwm@nit.zju.edu.cn
  • 基金资助:
    Project supported by the National Natural Science Foundation of China (Grant No. 32473216) and Ningbo Youth Science and Technology Innovation Leading Talent Project (Grant No. 2023QL004).

Optimization of wide frequency range 6H-SiC MEMS chips for a fiber optic Fabry-Perot accelerometer

Mariano Mahissi(马依思·马里亚诺)1,2, Xinli Ma(马新莉)2,†, Weiming Cai(蔡卫明)2,‡, Xianmin Zhang(章献民)1, and Michel Dossou(多苏·米歇尔)3   

  1. 1 College of Information Science and Electronic Engineering, Zhejiang University, Hangzhou 310027, China;
    2 School of Information Science and Engineering, Ningbo Tech University, Ningbo 315100, China;
    3 Research Unit in Photonics and Wireless Communications, LETIA/EPAC, University of Abomey-Calavi, 01 BP 526 Abomey-Calavi, Benin
  • Received:2024-12-17 Revised:2025-03-04 Accepted:2025-03-18 Online:2025-06-18 Published:2025-07-10
  • Contact: Xinli Ma, Weiming Cai E-mail:maxinli@tju.edu.cn;caiwm@nit.zju.edu.cn
  • Supported by:
    Project supported by the National Natural Science Foundation of China (Grant No. 32473216) and Ningbo Youth Science and Technology Innovation Leading Talent Project (Grant No. 2023QL004).

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摘要： Vibration detection using sensors with both wide working frequency range, good sensitivity, and other good performances is a topic of great interest in fields such as inertial navigation, deep-sea fishing boat engines condition monitoring, seismic monitoring, attitude, and heading reference system, $etc$. This paper investigates two 6H-SIC MEMS diaphragms, one triangular and the other square, used in a fiber optic Fabry-Perot (FP) accelerometer in an experimental scenario. The triangular chip shows a wide working frequency range of 630 Hz-5300 Hz, a natural frequency of 44.3 kHz, and a mechanical sensitivity of 0.154 nm/g. An optimal structure of the square chip used in a probe such as a fiber optic FP accelerometer also shows a wide working frequency range of 120 Hz-2300 Hz; a good sensitivity of 31.5 mV/g, a resonance frequency of 7873 Hz, an accuracy of 0.96% F.S., a frequency measurement error of 1.15%, and an excellent linearity of 0.9995.

关键词: triangular chip, accelerometer, MEMS, working frequency range, optical fiber

Abstract: Vibration detection using sensors with both wide working frequency range, good sensitivity, and other good performances is a topic of great interest in fields such as inertial navigation, deep-sea fishing boat engines condition monitoring, seismic monitoring, attitude, and heading reference system, $etc$. This paper investigates two 6H-SIC MEMS diaphragms, one triangular and the other square, used in a fiber optic Fabry-Perot (FP) accelerometer in an experimental scenario. The triangular chip shows a wide working frequency range of 630 Hz-5300 Hz, a natural frequency of 44.3 kHz, and a mechanical sensitivity of 0.154 nm/g. An optimal structure of the square chip used in a probe such as a fiber optic FP accelerometer also shows a wide working frequency range of 120 Hz-2300 Hz; a good sensitivity of 31.5 mV/g, a resonance frequency of 7873 Hz, an accuracy of 0.96% F.S., a frequency measurement error of 1.15%, and an excellent linearity of 0.9995.

Key words: triangular chip, accelerometer, MEMS, working frequency range, optical fiber

中图分类号:  (Quantum optics)

  • 42.50.-p
62.23.-c (Structural classes of nanoscale systems) 61.46.-w (Structure of nanoscale materials) 42.62.Eh (Metrological applications; optical frequency synthesizers for precision spectroscopy)