中国物理B ›› 2023, Vol. 32 ›› Issue (2): 28502-028502.doi: 10.1088/1674-1056/ac7b1d

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Enhancement of holding voltage by a modified low-voltage trigger silicon-controlled rectifier structure for electrostatic discharge protection

Yuankang Chen(陈远康), Yuanliang Zhou(周远良), Jie Jiang(蒋杰), Tingke Rao(饶庭柯), Wugang Liao(廖武刚), and Junjie Liu(刘俊杰)   

  1. College of Electronics and Information Engineering, Shenzhen University, Shenzhen 518060, China
  • 收稿日期:2022-03-26 修回日期:2022-06-17 接受日期:2022-06-22 出版日期:2023-01-10 发布日期:2023-01-10
  • 通讯作者: Wugang Liao E-mail:wgliao@szu.edu.cn
  • 基金资助:
    Project supported by the National Natural Science Foundation of China (Grant No. 61904110)

Enhancement of holding voltage by a modified low-voltage trigger silicon-controlled rectifier structure for electrostatic discharge protection

Yuankang Chen(陈远康), Yuanliang Zhou(周远良), Jie Jiang(蒋杰), Tingke Rao(饶庭柯), Wugang Liao(廖武刚), and Junjie Liu(刘俊杰)   

  1. College of Electronics and Information Engineering, Shenzhen University, Shenzhen 518060, China
  • Received:2022-03-26 Revised:2022-06-17 Accepted:2022-06-22 Online:2023-01-10 Published:2023-01-10
  • Contact: Wugang Liao E-mail:wgliao@szu.edu.cn
  • Supported by:
    Project supported by the National Natural Science Foundation of China (Grant No. 61904110)

摘要: A novel structure of low-voltage trigger silicon-controlled rectifiers (LVTSCRs) with low trigger voltage and high holding voltage is proposed for electrostatic discharge (ESD) protection. The proposed ESD protection device possesses an ESD implant and a floating structure. This improvement enhances the current discharge capability of the gate-grounded NMOS and weakens the current gain of the silicon-controlled rectifier current path. According to the simulation results, the proposed device retains a low trigger voltage characteristic of LVTSCRs and simultaneously increases the holding voltage to 5.53 V, providing an effective way to meet the ESD protection requirement of the 5 V CMOS process.

关键词: electrostatic discharge, floating n-well, low-voltage trigger silicon-controlled rectifier

Abstract: A novel structure of low-voltage trigger silicon-controlled rectifiers (LVTSCRs) with low trigger voltage and high holding voltage is proposed for electrostatic discharge (ESD) protection. The proposed ESD protection device possesses an ESD implant and a floating structure. This improvement enhances the current discharge capability of the gate-grounded NMOS and weakens the current gain of the silicon-controlled rectifier current path. According to the simulation results, the proposed device retains a low trigger voltage characteristic of LVTSCRs and simultaneously increases the holding voltage to 5.53 V, providing an effective way to meet the ESD protection requirement of the 5 V CMOS process.

Key words: electrostatic discharge, floating n-well, low-voltage trigger silicon-controlled rectifier

中图分类号:  (Semiconductor-device characterization, design, and modeling)

  • 85.30.De