中国物理B ›› 2018, Vol. 27 ›› Issue (9): 94212-094212.doi: 10.1088/1674-1056/27/9/094212

所属专题： TOPICAL REVIEW — Nanophotonics

• SPECIAL TOPIC—Recent advances in thermoelectric materials and devices • 上一篇    下一篇

Etching-assisted femtosecond laser microfabrication

Monan Liu(刘墨南), Mu-Tian Li(李木天), Han Yang(杨罕), Hong-Bo Sun(孙洪波)   

  1. 1 Department of Condensed Matter, College of Physics, Jilin University, Changchun 130012, China;
    2 State Key Laboratory on Integrated Optoelectronics, College of Electronic Science and Engineering, Jilin University, Changchun 130012, China
  • 收稿日期:2018-04-13 修回日期:2018-05-23 出版日期:2018-09-05 发布日期:2018-09-05
  • 通讯作者: Han Yang E-mail:yanghan@jlu.edu.cn
  • 基金资助:

    Project supported by the National Natural Science Foundation of China (Grant No. 51501070).

Etching-assisted femtosecond laser microfabrication

Monan Liu(刘墨南)1, Mu-Tian Li(李木天)2, Han Yang(杨罕)2, Hong-Bo Sun(孙洪波)2   

  1. 1 Department of Condensed Matter, College of Physics, Jilin University, Changchun 130012, China;
    2 State Key Laboratory on Integrated Optoelectronics, College of Electronic Science and Engineering, Jilin University, Changchun 130012, China
  • Received:2018-04-13 Revised:2018-05-23 Online:2018-09-05 Published:2018-09-05
  • Contact: Han Yang E-mail:yanghan@jlu.edu.cn
  • Supported by:

    Project supported by the National Natural Science Foundation of China (Grant No. 51501070).

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摘要：

Although femtosecond laser microfabrication is one of the most promising three-dimensional (3D) fabrication techniques, it could suffer from low fabrication efficiency for structures with high 3D complexities. By using etching as a main assistant technique, the processing can be speeded up and an improved structure surface quality can be provided. However, the assistance of a single technique cannot satisfy the increasing demands of fabrication and integration of highly functional 3D microstructures. Therefore, a multi-technique-based 3D microfabrication method is required. In this paper, we briefly review the recent development on etching-assisted femtosecond laser microfabrication (EAFLM). Various processing approaches have been proposed to further strengthen the flexibilities of the EAFLM. With the use of the multi-technique-based microfabrication method, 3D microstructure arrays can be rapidly defined on planar or curved surfaces with high structure qualities.

关键词: femtosecond laser, microfabrication, microlens array, etching

Abstract:

Although femtosecond laser microfabrication is one of the most promising three-dimensional (3D) fabrication techniques, it could suffer from low fabrication efficiency for structures with high 3D complexities. By using etching as a main assistant technique, the processing can be speeded up and an improved structure surface quality can be provided. However, the assistance of a single technique cannot satisfy the increasing demands of fabrication and integration of highly functional 3D microstructures. Therefore, a multi-technique-based 3D microfabrication method is required. In this paper, we briefly review the recent development on etching-assisted femtosecond laser microfabrication (EAFLM). Various processing approaches have been proposed to further strengthen the flexibilities of the EAFLM. With the use of the multi-technique-based microfabrication method, 3D microstructure arrays can be rapidly defined on planar or curved surfaces with high structure qualities.

Key words: femtosecond laser, microfabrication, microlens array, etching

中图分类号:  (Ultrafast processes; optical pulse generation and pulse compression)

  • 42.65.Re
42.30.-d (Imaging and optical processing)