Etching-assisted femtosecond laser microfabrication
刘墨南, 李木天, 杨罕, 孙洪波
Etching-assisted femtosecond laser microfabrication
Monan Liu(刘墨南), Mu-Tian Li(李木天), Han Yang(杨罕), Hong-Bo Sun(孙洪波)
中国物理B
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2018, (9): 94212
-094212
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DOI: 10.1088/1674-1056/27/9/094212