Design, fabrication, and characterization of Ti/Au transition-edge sensor with different dimensions of suspended beams

doi:10.1088/1674-1056/abff20

中国物理B ›› 2021, Vol. 30 ›› Issue (11): 117401-117401.doi: 10.1088/1674-1056/abff20

Design, fabrication, and characterization of Ti/Au transition-edge sensor with different dimensions of suspended beams

Hong-Jun Zhang(张宏俊)¹, Ji Wen(文继)¹, Zhao-Hong Mo(莫钊洪)¹, Hong-Rui Liu(刘鸿瑞)², Xiao-Dong Wang(汪小东)¹, Zhong-Hua Xiong(熊忠华)¹, Jin-Wen Zhang(张锦文)^2,3,†, and Mao-Bing Shuai(帅茂兵)^1,‡

1 Institute of Materials, China Academy of Engineering Physics, Mianyang 621000, China;
2 Institute of Microelectronics, Peking University, Beijing 100871, China;
3 National Key Laboratory of Micro/Nano Fabrication Technology, Institute of Microelectronics, Peking University, Beijing 100871, China

收稿日期:2021-01-19 修回日期:2021-03-04 接受日期:2021-05-08 出版日期:2021-10-13 发布日期:2021-11-03
通讯作者: Jin-Wen Zhang, Mao-Bing Shuai E-mail:zhangjinwen@pku.edu.cn;shuaimb@sina.com

Design, fabrication, and characterization of Ti/Au transition-edge sensor with different dimensions of suspended beams

1 Institute of Materials, China Academy of Engineering Physics, Mianyang 621000, China;
2 Institute of Microelectronics, Peking University, Beijing 100871, China;
3 National Key Laboratory of Micro/Nano Fabrication Technology, Institute of Microelectronics, Peking University, Beijing 100871, China

Received:2021-01-19 Revised:2021-03-04 Accepted:2021-05-08 Online:2021-10-13 Published:2021-11-03
Contact: Jin-Wen Zhang, Mao-Bing Shuai E-mail:zhangjinwen@pku.edu.cn;shuaimb@sina.com

摘要/Abstract

摘要： For photon detection, superconducting transition-edge sensor (TES) micro-calorimeters are excellent energy-resolving devices. In this study, we report our recent work in developing Ti-/Au-based TES. The Ti/Au TES devices were designed and implemented with a thickness ratio of 1:1 and different suspended structures using micromachining technology. The characteristics were evaluated and analyzed, including surface morphology, 3D deformation of suspended Ti/Au TES device structure, I-V characteristics, and low-temperature superconductivity. The results showed that the surface of Ti/Au has good homogeneity and the surface roughness of Ti/Au is significantly increased compared with the substrate. The structure of Ti/Au bilayer film significantly affects the deformation of suspended devices, but the deformation does not affect the I-V characteristics of the devices. For devices with the Ti/Au bilayer (150μm×150μm) and beams (100μm×25μm), the transition temperature (T_c) is 253 mK with a width of 6 mK, and the value of the temperature sensitivity α is 95.1.

关键词: transition-edge sensor, Ti/Au, superconductivity film, microfabrication, deformation of suspended structure

Abstract: For photon detection, superconducting transition-edge sensor (TES) micro-calorimeters are excellent energy-resolving devices. In this study, we report our recent work in developing Ti-/Au-based TES. The Ti/Au TES devices were designed and implemented with a thickness ratio of 1:1 and different suspended structures using micromachining technology. The characteristics were evaluated and analyzed, including surface morphology, 3D deformation of suspended Ti/Au TES device structure, I-V characteristics, and low-temperature superconductivity. The results showed that the surface of Ti/Au has good homogeneity and the surface roughness of Ti/Au is significantly increased compared with the substrate. The structure of Ti/Au bilayer film significantly affects the deformation of suspended devices, but the deformation does not affect the I-V characteristics of the devices. For devices with the Ti/Au bilayer (150μm×150μm) and beams (100μm×25μm), the transition temperature (T_c) is 253 mK with a width of 6 mK, and the value of the temperature sensitivity α is 95.1.

Key words: transition-edge sensor, Ti/Au, superconductivity film, microfabrication, deformation of suspended structure

中图分类号: (Superconducting films and low-dimensional structures)

74.78.-w

Hong-Jun Zhang(张宏俊), Ji Wen(文继), Zhao-Hong Mo(莫钊洪), Hong-Rui Liu(刘鸿瑞), Xiao-Dong Wang(汪小东), Zhong-Hua Xiong(熊忠华), Jin-Wen Zhang(张锦文), and Mao-Bing Shuai(帅茂兵). Design, fabrication, and characterization of Ti/Au transition-edge sensor with different dimensions of suspended beams[J]. 中国物理B, 2021, 30(11): 117401-117401.

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Design, fabrication, and characterization of Ti/Au transition-edge sensor with different dimensions of suspended beams

Design, fabrication, and characterization of Ti/Au transition-edge sensor with different dimensions of suspended beams

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