Understanding hydrogen plasma processes based on the diagnostic results of 2.45 GHz ECRIS at Peking University

doi:10.1088/1674-1056/26/9/095204

中国物理B ›› 2017, Vol. 26 ›› Issue (9): 95204-095204.doi: 10.1088/1674-1056/26/9/095204

• PHYSICS OF GASES, PLASMAS, AND ELECTRIC DISCHARGES • 上一篇下一篇

Understanding hydrogen plasma processes based on the diagnostic results of 2.45 GHz ECRIS at Peking University

1 SKLNPTT&IHIP, School of Physics, Peking University, Beijing 100871, China;
2 University of Chinese Academy of Sciences, Beijing 100049, China

收稿日期:2017-02-24 修回日期:2017-05-19 出版日期:2017-09-05 发布日期:2017-09-05
通讯作者: Hai-Tao Ren E-mail:htren@pku.edu.cn
基金资助:
Project supported by the National Natural Science Foundation of China (Grant Nos. 11175009 and 11575013).

Understanding hydrogen plasma processes based on the diagnostic results of 2.45 GHz ECRIS at Peking University

Wen-Bin Wu(武文斌)¹, Hai-Tao Ren(任海涛)¹, Shi-Xiang Peng(彭士香)¹, Yuan Xu(徐源)¹, Jia-Mei Wen(温佳美)¹, Jiang Sun(孙江)¹, Ai-Lin Zhang(张艾霖)^1,2, Tao Zhang(张滔)¹, Jing-Feng Zhang(张景丰)¹, Jia-Er Chen(陈佳洱)^1,2

1 SKLNPTT&IHIP, School of Physics, Peking University, Beijing 100871, China;
2 University of Chinese Academy of Sciences, Beijing 100049, China

Received:2017-02-24 Revised:2017-05-19 Online:2017-09-05 Published:2017-09-05
Contact: Hai-Tao Ren E-mail:htren@pku.edu.cn
Supported by:
Project supported by the National Natural Science Foundation of China (Grant Nos. 11175009 and 11575013).

摘要/Abstract

摘要： Optical emission spectroscopy (OES), as a simple in situ method without disturbing the plasma, has been performed for the plasma diagnosis of a 2.45 GHz permanent magnet electron cyclotron resonance (PMECR) ion source at Peking University (PKU). A spectrum measurement platform has been set up with the quartz-chamber electron cyclotron resonance (ECR) ion source [Patent Number: ZL 201110026605.4] and experiments were carried out recently. The electron temperature and electron density inside the ECR plasma chamber have been measured with the method of line intensity ratio of noble gas. Hydrogen plasma processes inside the discharge chamber are discussed based on the diagnostic results. What is more, the superiority of the method of line intensity ratio of noble gas is indicated with a comparison to line intensity ratio of hydrogen. Details will be presented in this paper.

关键词: electron cyclotron resonance (ECR) ion source, hydrogen plasma, plasma diagnosis, optical emission spectroscopy

Abstract: Optical emission spectroscopy (OES), as a simple in situ method without disturbing the plasma, has been performed for the plasma diagnosis of a 2.45 GHz permanent magnet electron cyclotron resonance (PMECR) ion source at Peking University (PKU). A spectrum measurement platform has been set up with the quartz-chamber electron cyclotron resonance (ECR) ion source [Patent Number: ZL 201110026605.4] and experiments were carried out recently. The electron temperature and electron density inside the ECR plasma chamber have been measured with the method of line intensity ratio of noble gas. Hydrogen plasma processes inside the discharge chamber are discussed based on the diagnostic results. What is more, the superiority of the method of line intensity ratio of noble gas is indicated with a comparison to line intensity ratio of hydrogen. Details will be presented in this paper.

Key words: electron cyclotron resonance (ECR) ion source, hydrogen plasma, plasma diagnosis, optical emission spectroscopy

中图分类号: (Plasma heating by microwaves; ECR, LH, collisional heating)

52.50.Sw

52.50.Dg (Plasma sources) 52.70.-m (Plasma diagnostic techniques and instrumentation) 52.70.Kz (Optical (ultraviolet, visible, infrared) measurements)

武文斌, 任海涛, 彭士香, 徐源, 温佳美, 孙江, 张艾霖, 张滔, 张景丰, 陈佳洱. Understanding hydrogen plasma processes based on the diagnostic results of 2.45 GHz ECRIS at Peking University[J]. 中国物理B, 2017, 26(9): 95204-095204.

Wen-Bin Wu(武文斌), Hai-Tao Ren(任海涛), Shi-Xiang Peng(彭士香), Yuan Xu(徐源), Jia-Mei Wen(温佳美), Jiang Sun(孙江), Ai-Lin Zhang(张艾霖), Tao Zhang(张滔), Jing-Feng Zhang(张景丰), Jia-Er Chen(陈佳洱). Understanding hydrogen plasma processes based on the diagnostic results of 2.45 GHz ECRIS at Peking University[J]. Chin. Phys. B, 2017, 26(9): 95204-095204.

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Understanding hydrogen plasma processes based on the diagnostic results of 2.45 GHz ECRIS at Peking University

Understanding hydrogen plasma processes based on the diagnostic results of 2.45 GHz ECRIS at Peking University

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