Diagnosis of a low pressure capacitively coupled argon plasma by using a simple collisional-radiative model

doi:10.1088/1674-1056/20/1/015207

中国物理B ›› 2011, Vol. 20 ›› Issue (1): 15207-015207.doi: 10.1088/1674-1056/20/1/015207

• PHYSICS OF GASES, PLASMAS, AND ELECTRIC DISCHARGES • 上一篇下一篇

Diagnosis of a low pressure capacitively coupled argon plasma by using a simple collisional-radiative model

虞一青, 辛煜, 宁兆元

Jiangsu Key Laboratory of Thin Films, School of Physical Science and Technology, Soochow University, Suzhou 215006, China

收稿日期:2010-04-07 修回日期:2010-08-02 出版日期:2011-01-15 发布日期:2011-01-15
基金资助:
Project supported by the National Natural Science Foundation of China (Grant Nos. 10635010 and 10775103).

Diagnosis of a low pressure capacitively coupled argon plasma by using a simple collisional-radiative model

Yu Yi-Qing(虞一青), Xin Yu(辛煜)^†, and Ning Zhao-Yuan(宁兆元)^‡

Jiangsu Key Laboratory of Thin Films, School of Physical Science and Technology, Soochow University, Suzhou 215006, China

Received:2010-04-07 Revised:2010-08-02 Online:2011-01-15 Published:2011-01-15
Supported by:
Project supported by the National Natural Science Foundation of China (Grant Nos. 10635010 and 10775103).

摘要/Abstract

摘要： This paper proposes a simple collisional-radiative model to characterise capacitively coupled argon plasmas driven by conventional radio frequency in combination with optical emission spectroscopy and Langmuir probe measurements. Two major processes are considered in this model, electron-impact excitation and the spontaneous radiative decay. The diffusion loss term, which is found to be important for the two metastable states (4s[3/2]₂, 4s'[1/2]₀), is also taken into account. Behaviours of representative metastable and radiative states are discussed. Two emission lines (located at 696.5 nm and 750.4 nm) are selected and intensities are measured to obtain populated densities of the corresponding radiative states in the argon plasma. The calculated results agree well with that measured by Langmuir probe, indicating that the current model combined with optical emission spectroscopy is a candidate tool for electron density and temperature measurement in radio frequency capacitively coupled discharges.

Abstract: This paper proposes a simple collisional-radiative model to characterise capacitively coupled argon plasmas driven by conventional radio frequency in combination with optical emission spectroscopy and Langmuir probe measurements. Two major processes are considered in this model, electron-impact excitation and the spontaneous radiative decay. The diffusion loss term, which is found to be important for the two metastable states (4s[3/2]₂, 4s'[1/2]₀), is also taken into account. Behaviours of representative metastable and radiative states are discussed. Two emission lines (located at 696.5 nm and 750.4 nm) are selected and intensities are measured to obtain populated densities of the corresponding radiative states in the argon plasma. The calculated results agree well with that measured by Langmuir probe, indicating that the current model combined with optical emission spectroscopy is a candidate tool for electron density and temperature measurement in radio frequency capacitively coupled discharges.

Key words: capacitively coupled plasma, collisional-radiative model, optical emission spectroscopy, Langmuir probe

中图分类号: (High-frequency and RF discharges)

52.80.Pi

52.70.Kz (Optical (ultraviolet, visible, infrared) measurements) 52.25.Os (Emission, absorption, and scattering of electromagnetic radiation ?)

虞一青, 辛煜, 宁兆元. Diagnosis of a low pressure capacitively coupled argon plasma by using a simple collisional-radiative model[J]. 中国物理B, 2011, 20(1): 15207-015207.

Yu Yi-Qing(虞一青), Xin Yu(辛煜), and Ning Zhao-Yuan(宁兆元). Diagnosis of a low pressure capacitively coupled argon plasma by using a simple collisional-radiative model[J]. Chin. Phys. B, 2011, 20(1): 15207-015207.

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Diagnosis of a low pressure capacitively coupled argon plasma by using a simple collisional-radiative model

Diagnosis of a low pressure capacitively coupled argon plasma by using a simple collisional-radiative model

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