中国物理B ›› 2008, Vol. 17 ›› Issue (1): 228-231.doi: 10.1088/1674-1056/17/1/040

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A ministop band in a single-defect photonic crystal waveguide based on silicon on insulator

唐海侠, 左玉华, 余金中, 王启明   

  1. State Key Joint Laboratory of Integrated Optoelectronics, Institute of Semiconductors, Chinese Academy of Sciences,\ Beijing 100083, China
  • 出版日期:2008-01-20 发布日期:2008-01-20
  • 基金资助:
    Project supported by the National Natural Science Foundation of China (Grant Nos 60336010 and 60537010).

A ministop band in a single-defect photonic crystal waveguide based on silicon on insulator

Tang Hai-Xia(唐海侠)†, Zuo Yu-Hua(左玉华), Yu Jin-Zhong(余金中), and Wang Qi-Ming(王启明)   

  1. State Key Joint Laboratory of Integrated Optoelectronics, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China
  • Online:2008-01-20 Published:2008-01-20
  • Supported by:
    Project supported by the National Natural Science Foundation of China (Grant Nos 60336010 and 60537010).

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摘要： This paper reports that a two-dimensional single-defect photonic crystal waveguide in the \textit{$\Ga$-K} direction with triangular lattice on a silicon-on-insulator substrate is fabricated by the combination of electron beam lithography and inductively coupled plasma etching. A ministop band (MSB) is observed by the measurement of transmission characteristics. It results from the coupling between the two modes with the same symmetry, which is analysed from the stimulated band diagram by the effective index and the two-dimensional plane wave expansion methods. The parameter working on the MSB is the ratio of the radius of air holes to the lattice constant, $r/a$. It is obtained that the critical $r/a$ value determining the occurrence or disappearance of MSB is 0.36. When $r/a $ is larger than or equal to 0.36, the MSB occurs. However, when $r/a $ is smaller than 0.36, the MSB disappears.

关键词: photonic bandgap, photonic crystal waveguide, silicon-on-insulator, ministop band

Abstract: This paper reports that a two-dimensional single-defect photonic crystal waveguide in the $\varGamma$-$K$ direction with triangular lattice on a silicon-on-insulator substrate is fabricated by the combination of electron beam lithography and inductively coupled plasma etching. A ministop band (MSB) is observed by the measurement of transmission characteristics. It results from the coupling between the two modes with the same symmetry, which is analysed from the stimulated band diagram by the effective index and the two-dimensional plane wave expansion methods. The parameter working on the MSB is the ratio of the radius of air holes to the lattice constant, $r/a$. It is obtained that the critical $r/a$ value determining the occurrence or disappearance of MSB is 0.36. When $r/a $ is larger than or equal to 0.36, the MSB occurs. However, when $r/a $ is smaller than 0.36, the MSB disappears.

Key words: photonic bandgap, photonic crystal waveguide, silicon-on-insulator, ministop band

中图分类号:  (Photonic bandgap materials)

  • 42.70.Qs
42.79.Gn (Optical waveguides and couplers) 42.82.Cr (Fabrication techniques; lithography, pattern transfer) 52.77.Bn (Etching and cleaning)