中国物理B ›› 1999, Vol. 8 ›› Issue (3): 223-228.doi: 10.1088/1004-423X/8/3/010

• 8000 CROSSDISCIPLINARY PHYSICS AND RELATED AREAS OF SCIENCE AND TECHNOLOGY • 上一篇    

EMISSION AND MASS SPECTRAL ANALYSES OF LASER ABLATED AlN PLUMES

陈金海, 王培南, 郭钊, 李富铭   

  1. State Key Laboratory for Materials Modification by Laser, Ion and Electron Beams, Department of Physics, Fudan University, Shanghai 200433, China
  • 收稿日期:1998-06-22 修回日期:1998-10-08 出版日期:1999-03-20 发布日期:1999-03-20
  • 基金资助:
    Project supported by the National Natural Science Foundation of China (Grant No. 19774018) and the Shanghai Research Center of Applied Physics (Grant No. 98JC14011), China.

EMISSION AND MASS SPECTRAL ANALYSES OF LASER ABLATED AlN PLUMES

Chen Jin-hai (陈金海), Wang Pei-nan (王培南), Guo Zhao (郭钊), Li Fu-ming (李富铭)   

  1. State Key Laboratory for Materials Modification by Laser, Ion and Electron Beams, Department of Physics, Fudan University, Shanghai 200433, China
  • Received:1998-06-22 Revised:1998-10-08 Online:1999-03-20 Published:1999-03-20
  • Supported by:
    Project supported by the National Natural Science Foundation of China (Grant No. 19774018) and the Shanghai Research Center of Applied Physics (Grant No. 98JC14011), China.

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摘要： The emission spectrum of the 3Πi-3Πi (0－0) AlN band and some N+ and N emission lines have been studied in the visible region for the laser ablated plumes. The Stark-shift and Stark broadening were observed. The component species in the ablated plumes were analyzed by time of flight mass spectroscopy. The electron density and the temperature were calculated from the Stark-shift and Stark broadening of N(2D) emission line. The densities of AlN+, Al+, N+, AlN, N and Al were estimated by the mass spectra and the Saha equation.

Abstract: The emission spectrum of the 3Πi-3Πi (0－0) AlN band and some N+ and N emission lines have been studied in the visible region for the laser ablated plumes. The Stark-shift and Stark broadening were observed. The component species in the ablated plumes were analyzed by time of flight mass spectroscopy. The electron density and the temperature were calculated from the Stark-shift and Stark broadening of N(2D) emission line. The densities of AlN+, Al+, N+, AlN, N and Al were estimated by the mass spectra and the Saha equation.

中图分类号:  (III-V semiconductors)

  • 78.55.Cr
78.20.Jq (Electro-optical effects) 71.70.Ej (Spin-orbit coupling, Zeeman and Stark splitting, Jahn-Teller effect)