中国物理B ›› 2019, Vol. 28 ›› Issue (6): 67801-067801.doi: 10.1088/1674-1056/28/6/067801

• CONDENSED MATTER: ELECTRONIC STRUCTURE, ELECTRICAL, MAGNETIC, AND OPTICAL PROPERTIES • 上一篇    下一篇

Gradient refractive structured NiCr thin film absorber for pyroelectric infrared detectors

Yunlu Lian(练芸路), He Yu(于贺), Zhiqing Liang(梁志清), Xiang Dong(董翔)   

  1. School of Optoelectronic Information, University of Electronic Science and Technology of China(UESTC), Chengdu 610054, China
  • 收稿日期:2018-12-26 修回日期:2019-03-22 出版日期:2019-06-05 发布日期:2019-06-05
  • 通讯作者: He Yu E-mail:yuhe@uestc.edu.cn
  • 基金资助:

    Project supported by the National Natural Science Foundation of China (Grant Nos. 61875031 and 61421002).

Gradient refractive structured NiCr thin film absorber for pyroelectric infrared detectors

Yunlu Lian(练芸路), He Yu(于贺), Zhiqing Liang(梁志清), Xiang Dong(董翔)   

  1. School of Optoelectronic Information, University of Electronic Science and Technology of China(UESTC), Chengdu 610054, China
  • Received:2018-12-26 Revised:2019-03-22 Online:2019-06-05 Published:2019-06-05
  • Contact: He Yu E-mail:yuhe@uestc.edu.cn
  • Supported by:

    Project supported by the National Natural Science Foundation of China (Grant Nos. 61875031 and 61421002).

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摘要：

A gradient refractive structured NiCr film that has a high extinction coefficient at far infrared range (8-μm-24 μm) is presented as an absorber for pyroelectric infrared detectors. The absorber features high absorption efficiency due to the low reflection off the structured surface and high absorption across the film thickness. The refractive index and extinction coefficient are extracted using spectroscopic ellipsometry. It is found that the single NiCr film exhibits an increasing refractive index as the gas atmosphere pressure increases, hence the three-layer gradient NiCr absorber can be fabricated by adjusting the gas atmosphere pressure during sputtering deposition. Essential Macleod software has been used to generate an efficient film structure design and the calculations show similar absorptance trend compared to the experimental measurement result. The results indicate that the gradient refractive structured metal thin film absorber can provide high absorption for applications in thermal sensing.

关键词: pyroelectric infrared detector, spectroscopic ellipsometry, deposition, thermal sensing

Abstract:

A gradient refractive structured NiCr film that has a high extinction coefficient at far infrared range (8-μm-24 μm) is presented as an absorber for pyroelectric infrared detectors. The absorber features high absorption efficiency due to the low reflection off the structured surface and high absorption across the film thickness. The refractive index and extinction coefficient are extracted using spectroscopic ellipsometry. It is found that the single NiCr film exhibits an increasing refractive index as the gas atmosphere pressure increases, hence the three-layer gradient NiCr absorber can be fabricated by adjusting the gas atmosphere pressure during sputtering deposition. Essential Macleod software has been used to generate an efficient film structure design and the calculations show similar absorptance trend compared to the experimental measurement result. The results indicate that the gradient refractive structured metal thin film absorber can provide high absorption for applications in thermal sensing.

Key words: pyroelectric infrared detector, spectroscopic ellipsometry, deposition, thermal sensing

中图分类号:  (Metals, semimetals, and alloys)

  • 78.40.Kc
81.15.Cd (Deposition by sputtering) 81.05.Ea (III-V semiconductors)