中国物理B ›› 2023, Vol. 32 ›› Issue (2): 25205-025205.doi: 10.1088/1674-1056/ac7207
Influence of magnetic field on power deposition in high magnetic field helicon experiment
Yan Zhou(周岩)1,2,3, Peiyu Ji(季佩宇)2,3,4, Maoyang Li(李茂洋)1,2,3, Lanjian Zhuge(诸葛兰剑)5, and Xuemei Wu(吴雪梅)1,2,3,†
- 1 School of Physical Science and Technology, Soochow University, Suzhou 215006, China;
2 Collaborative Innovation Center of Suzhou Nano Science and Technology, Soochow University, Suzhou 215006, China;
3 The Key Laboratory of Thin Films of Jiangsu, Soochow University, Suzhou 215006, China;
4 School of Optoelectronic Engineering and Technology, Soochow University, Suzhou 215006, China;
5 Analysis and Testing Center, Soochow University, Suzhou 215123, China
Influence of magnetic field on power deposition in high magnetic field helicon experiment
Yan Zhou(周岩)1,2,3, Peiyu Ji(季佩宇)2,3,4, Maoyang Li(李茂洋)1,2,3, Lanjian Zhuge(诸葛兰剑)5, and Xuemei Wu(吴雪梅)1,2,3,†
- 1 School of Physical Science and Technology, Soochow University, Suzhou 215006, China;
2 Collaborative Innovation Center of Suzhou Nano Science and Technology, Soochow University, Suzhou 215006, China;
3 The Key Laboratory of Thin Films of Jiangsu, Soochow University, Suzhou 215006, China;
4 School of Optoelectronic Engineering and Technology, Soochow University, Suzhou 215006, China;
5 Analysis and Testing Center, Soochow University, Suzhou 215123, China
摘要： Based on high magnetic field helicon experiment (HMHX), HELIC code was used to study the effect of different magnetic fields on the power deposition under parabolic distribution. This paper is divided into three parts: preliminary calculation, actual discharge experiment and calculation. The results of preliminary calculation show that a magnetic field that is too small or too large cannot produce a good power deposition effect. When the magnetic field strength is 1200 Gs, a better power deposition can be obtained. The actual discharge experiment illustrates that the change of the magnetic field will have a certain influence on the discharge phenomenon. Finally, the results of verification calculation successfully verify the accuracy of the results of preliminary simulation. The results show that in the actual discharge experiment, it can achieve the best deposition effect when the magnetic field is 1185 Gs.
中图分类号: (Plasma heating by radio-frequency fields; ICR, ICP, helicons)
- 52.50.Qt