中国物理B ›› 2023, Vol. 32 ›› Issue (3): 37302-037302.doi: 10.1088/1674-1056/aca39c
Meixia Cheng(程梅霞)1, Suzhen Luan(栾苏珍)1,†, Hailin Wang(王海林)1, and Renxu Jia(贾仁需)2
Meixia Cheng(程梅霞)1, Suzhen Luan(栾苏珍)1,†, Hailin Wang(王海林)1, and Renxu Jia(贾仁需)2
摘要: Ga$_{2}$O$_{3}$ is difficult to achieve p-type doping, which further hinders the development of Ga$_{2}$O$_{3}$-based power devices and is not conducive to the development of new devices with high power density and low power consumption. This paper expounds a $\beta $-Ga$_{2}$O$_{3}$/4H-SiC heterojunction lateral metal-oxide-semiconductor field-effect transistor (HJFET), which can make better use of the characteristics of PN junction by adding p-doped SiC in the channel region. Compared with the conventional devices, the threshold voltage of the heterojunction metal-oxide-semiconductor field-effect transistor (MOSFET) is greatly improved, and normally-off operation is realized, showing a positive threshold voltage of 0.82 V. Meanwhile, the off-state breakdown voltage of the device is up to 1817 V, and the maximum transconductance is 15.3 mS/mm. The optimal PFOM is obtained by simulating the thickness, length and doping of the SiC in each region of the epitaxial layer. This structure provides a feasible idea for high performance $\beta $-Ga$_{2}$O$_{3 }$ MOSFET.
中图分类号: (Metal-insulator-semiconductor structures (including semiconductor-to-insulator))