中国物理B ›› 2014, Vol. 23 ›› Issue (4): 48102-048102.doi: 10.1088/1674-1056/23/4/048102

• INTERDISCIPLINARY PHYSICS AND RELATED AREAS OF SCIENCE AND TECHNOLOGY • 上一篇    下一篇

Influences of nitrogen flow rate on the structures and properties of Ti and N co-doped diamond-like carbon films deposited by arc ion plating

张林a b, 马国佳b, 林国强a, 马贺b, 韩克昌a   

  1. a Key Laboratory for Material Modification by Laser, Ion and Electron Beams, Dalian University of Technology, Dalian 116024, China;
    b Science and Technology on Power Beam Processes Laboratory, Beijing Aeronautical ManufacturingTechnology Research Institute, Beijing 100024, China
  • 收稿日期:2013-07-26 修回日期:2013-09-22 出版日期:2014-04-15 发布日期:2014-04-15
  • 基金资助:
    Project supported by the National Natural Science Foundation of China (Grant No. 51271047).

Influences of nitrogen flow rate on the structures and properties of Ti and N co-doped diamond-like carbon films deposited by arc ion plating

Zhang Lin (张林)a b, Ma Guo-Jia (马国佳)b, Lin Guo-Qiang (林国强)a, Ma He (马贺)b, Han Ke-Chang (韩克昌)a   

  1. a Key Laboratory for Material Modification by Laser, Ion and Electron Beams, Dalian University of Technology, Dalian 116024, China;
    b Science and Technology on Power Beam Processes Laboratory, Beijing Aeronautical ManufacturingTechnology Research Institute, Beijing 100024, China
  • Received:2013-07-26 Revised:2013-09-22 Online:2014-04-15 Published:2014-04-15
  • Contact: Zhang Lin E-mail:linzh1817@gmail.com
  • About author:81.15.Jj; 68.55.-a; 68.60.Bs; 61.05.cj
  • Supported by:
    Project supported by the National Natural Science Foundation of China (Grant No. 51271047).

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摘要： In this paper, Ti-C-N nanocomposite films are deposited under different nitrogen flow rates by pulsed bias arc ion plating using Ti and graphite targets in the Ar/N2 mixture gas. The surface morphologies, compositions, microstructures, and mechanical properties of the Ti-C-N films are investigated systematically by field emission scanning electron microscopy (FE-SEM), x-ray photoelectron spectroscopy (XPS), grazing incident x-ray diffraction (GIXRD), Raman spectra, and nano-indentation. The results show that the nanocrystalline Ti(C,N) phase precipitates in the film from GIXRD and XPS analysis, and Raman spectra prove the presence of diamond-like carbon, indicating the formation of nanocomposite film with microstructures comprising nanocrystalline Ti(C,N) phase embedded into a diamond-like matrix. The nitrogen flow rate has a significant effect on the composition, structure, and properties of the film. The nano-hardness and elastic modulus first increase and then decrease as nitrogen flow rate increases, reaching a maximum of 34.3 GPa and 383.2 GPa, at a nitrogen flow rate of 90 sccm, respectively.

关键词: arc ion plating, Ti-C-N film, nitrogen flow rate, microstructure

Abstract: In this paper, Ti-C-N nanocomposite films are deposited under different nitrogen flow rates by pulsed bias arc ion plating using Ti and graphite targets in the Ar/N2 mixture gas. The surface morphologies, compositions, microstructures, and mechanical properties of the Ti-C-N films are investigated systematically by field emission scanning electron microscopy (FE-SEM), x-ray photoelectron spectroscopy (XPS), grazing incident x-ray diffraction (GIXRD), Raman spectra, and nano-indentation. The results show that the nanocrystalline Ti(C,N) phase precipitates in the film from GIXRD and XPS analysis, and Raman spectra prove the presence of diamond-like carbon, indicating the formation of nanocomposite film with microstructures comprising nanocrystalline Ti(C,N) phase embedded into a diamond-like matrix. The nitrogen flow rate has a significant effect on the composition, structure, and properties of the film. The nano-hardness and elastic modulus first increase and then decrease as nitrogen flow rate increases, reaching a maximum of 34.3 GPa and 383.2 GPa, at a nitrogen flow rate of 90 sccm, respectively.

Key words: arc ion plating, Ti-C-N film, nitrogen flow rate, microstructure

中图分类号:  (Ion and electron beam-assisted deposition; ion plating)

  • 81.15.Jj
68.55.-a (Thin film structure and morphology) 68.60.Bs (Mechanical and acoustical properties) 61.05.cj (X-ray absorption spectroscopy: EXAFS, NEXAFS, XANES, etc.)