中国物理B ›› 1996, Vol. 5 ›› Issue (9): 677-691.doi: 10.1088/1004-423X/5/9/006

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NUMERICAL SIMULATION OF ECR PLASMA SOURCES

吴汉明1, 邵福球2, 王龙2, 姚鑫兹2   

  1. (1)Institute of Mechanics, Academia Sinica, Beijing 100080, China; (2)Institute of Physics, Academia Sinica, Beijing 100080, China
  • 收稿日期:1995-06-26 出版日期:1996-09-20 发布日期:1996-09-20
  • 基金资助:
    Project supported by the National Natural Science Foundation of China.

NUMERICAL SIMULATION OF ECR PLASMA SOURCES

SHAO FU-QIU (邵福球)a, WANG LONG (王龙)a, YAO XIN-ZI (姚鑫兹)a, WU HAN-MIN (吴汉明)b   

  1. a Institute of Physics, Academia Sinica, Beijing 100080, China; b Institute of Mechanics, Academia Sinica, Beijing 100080, China
  • Received:1995-06-26 Online:1996-09-20 Published:1996-09-20
  • Supported by:
    Project supported by the National Natural Science Foundation of China.

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摘要： The available electron cyclotron resonance plasma source has been simulated in two-dimensional configuration space (z, r) and three-dimensional velocity space (Vz, Vr, Vθ). Using a hybrid model, we treat ions as particles and electrons as fluid. The motion of ions and electrons is determined by external magnetic field and self- consistent electrostatic field. For a given magnetic distribution, the spatial profiles of electron temperature, plasma potential, plasma density and ionization rate have been obtained. The influences of microwave power, neutral gas pressure and magnetic field on plasma parameters have been studied. The comparisons between simulation and experimental results are made and the explanations for some physical phenomena are given.

Abstract: The available electron cyclotron resonance plasma source has been simulated in two-dimensional configuration space (z, r) and three-dimensional velocity space (Vz, Vr, V$\theta$). Using a hybrid model, we treat ions as particles and electrons as fluid. The motion of ions and electrons is determined by external magnetic field and self- consistent electrostatic field. For a given magnetic distribution, the spatial profiles of electron temperature, plasma potential, plasma density and ionization rate have been obtained. The influences of microwave power, neutral gas pressure and magnetic field on plasma parameters have been studied. The comparisons between simulation and experimental results are made and the explanations for some physical phenomena are given.

中图分类号:  (Plasma sources)

  • 52.50.Dg
52.65.Ww (Hybrid methods) 52.25.Jm (Ionization of plasmas) 52.20.Fs (Electron collisions) 52.20.Hv (Atomic, molecular, ion, and heavy-particle collisions) 52.40.Kh (Plasma sheaths)