中国物理B ›› 1993, Vol. 2 ›› Issue (4): 280-285.doi: 10.1088/1004-423X/2/4/006

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ORDER ALLOY IN GexSi1-x/Si(100) STRAINED-LAYER SUPERLATFICES

褚一鸣1, 俞鸣人2, 余是东3, 李齐3, 冯端3   

  1. (1)Institute of Semiconductors, Academia Sinica, Beijing 100083, China; (2)National Laboratory of Applied surface Science, Fudan University, Shanghai 200433, China; (3)National Laboratory of Solid State Microstructures, Nanjing University, Nanjing 210008, China
  • 收稿日期:1992-05-09 出版日期:1993-04-20 发布日期:1993-04-20

ORDER ALLOY IN GexSi1-x/Si(100) STRAINED-LAYER SUPERLATFICES

YU SHI-DONG (余是东)a, LI QI (李齐)a, FENG DUAN (冯端)a, YU MING-REN (俞鸣人)b, CHU YI-MING (褚一鸣)c   

  1. a National Laboratory of Solid State Microstructures, Nanjing University, Nanjing 210008, China; b National Laboratory of Applied surface Science, Fudan University, Shanghai 200433, China; c Institute of Semiconductors, Academia Sinica, Beijing 100083, China
  • Received:1992-05-09 Online:1993-04-20 Published:1993-04-20

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摘要： The GexSi1-x/Si(100) strained-layer superlattices have been investigated by means of the transmission electron microscopy of the cross-sectional specimen (XTEM) and the high resolution electron microscopy (HREM), The order alloy with a period of modulation twice as large as the lattice constant along <100> zone axis has been found in the alloy layers of the superlattices with x≈0.4-0.5. This order struc-ture makes the superlattices inhomogeneously strained. The result of the compuler simulation shows that the order alloy exhibits an altemating stack of 2 monolayers of Ge atoms and 2 monolayers of Si atoms along the <100> zone axis. Thc calculated elastic strain energy of the disorder alloy reported in the litera-ture is very close to that of the order alloy along <100> zone axis. Thus, during the MBE growth of the alloy layers, both the disorder and order alloys can be formed along <100> zone axis.

Abstract: The GexSi1-x/Si(100) strained-layer superlattices have been investigated by means of the transmission electron microscopy of the cross-sectional specimen (XTEM) and the high resolution electron microscopy (HREM), The order alloy with a period of modulation twice as large as the lattice constant alongzone axis has been found in the alloy layers of the superlattices with x≈0.4-0.5. This order struc-ture makes the superlattices inhomogeneously strained. The result of the compuler simulation shows that the order alloy exhibits an altemating stack of 2 monolayers of Ge atoms and 2 monolayers of Si atoms along thezone axis. Thc calculated elastic strain energy of the disorder alloy reported in the litera-ture is very close to that of the order alloy alongzone axis. Thus, during the MBE growth of the alloy layers, both the disorder and order alloys can be formed alongzone axis.

中图分类号:  (Superlattices)

  • 68.65.Cd
68.60.Bs (Mechanical and acoustical properties) 68.37.Lp (Transmission electron microscopy (TEM)) 81.15.Hi (Molecular, atomic, ion, and chemical beam epitaxy) 68.35.Gy (Mechanical properties; surface strains)