中国物理B ›› 2023, Vol. 32 ›› Issue (2): 28101-028101.doi: 10.1088/1674-1056/ac6b2b

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Influence of the lattice parameter of the AlN buffer layer on the stress state of GaN film grown on (111) Si

Zhen-Zhuo Zhang(张臻琢)1,2, Jing Yang(杨静)1,†, De-Gang Zhao(赵德刚)1,3,‡, Feng Liang(梁锋)1, Ping Chen(陈平)1, and Zong-Shun Liu(刘宗顺)1   

  1. 1 State Key Laboratory of Integrated Optoelectronics, Institute of Semiconductor, Chinese Academy of Sciences, Beijing 100083, China;
    2 College of Materials Science and Opto-Electronic Technology, University of Chinese Academy of Sciences, Beijing 100049, China;
    3 Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China
  • 收稿日期:2022-03-15 修回日期:2022-04-07 接受日期:2022-04-28 出版日期:2023-01-10 发布日期:2023-01-10
  • 通讯作者: Jing Yang, De-Gang Zhao E-mail:yangjing333@semi.ac.cn;dgzhao@red.semi.ac.cn
  • 基金资助:
    Project supported by Beijing Municipal Science & Technology Commission, Administrative Commission of Zhongguancun Science Park (Grant Nos. Z211100007921022 and Z211100004821001), the National Natural Science Foundation of China (Grant Nos. 62034008, 62074142, 62074140, 61974162, 61904172, 61874175, 62127807, and U21B2061), Key Research and Development Program of Jiangsu Province (Grant No. BE2021008-1), Beijing Nova Program (Grant No. 202093), Strategic Priority Research Program of Chinese Academy of Sciences (Grant No. XDB43030101), and Youth Innovation Promotion Association of Chinese Academy of Sciences (Grant No. 2019115).

Influence of the lattice parameter of the AlN buffer layer on the stress state of GaN film grown on (111) Si

Zhen-Zhuo Zhang(张臻琢)1,2, Jing Yang(杨静)1,†, De-Gang Zhao(赵德刚)1,3,‡, Feng Liang(梁锋)1, Ping Chen(陈平)1, and Zong-Shun Liu(刘宗顺)1   

  1. 1 State Key Laboratory of Integrated Optoelectronics, Institute of Semiconductor, Chinese Academy of Sciences, Beijing 100083, China;
    2 College of Materials Science and Opto-Electronic Technology, University of Chinese Academy of Sciences, Beijing 100049, China;
    3 Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China
  • Received:2022-03-15 Revised:2022-04-07 Accepted:2022-04-28 Online:2023-01-10 Published:2023-01-10
  • Contact: Jing Yang, De-Gang Zhao E-mail:yangjing333@semi.ac.cn;dgzhao@red.semi.ac.cn
  • Supported by:
    Project supported by Beijing Municipal Science & Technology Commission, Administrative Commission of Zhongguancun Science Park (Grant Nos. Z211100007921022 and Z211100004821001), the National Natural Science Foundation of China (Grant Nos. 62034008, 62074142, 62074140, 61974162, 61904172, 61874175, 62127807, and U21B2061), Key Research and Development Program of Jiangsu Province (Grant No. BE2021008-1), Beijing Nova Program (Grant No. 202093), Strategic Priority Research Program of Chinese Academy of Sciences (Grant No. XDB43030101), and Youth Innovation Promotion Association of Chinese Academy of Sciences (Grant No. 2019115).

摘要: GaN films grown on (111) Si substrate with different lattice parameters of the AlN buffer layer by metal-organic chemical vapor deposition are studied. The stress states obtained by different test methods are compared and it is found that the lattice parameter of the AlN buffer layer may have a significant effect on the stress state in the initial stage of subsequent GaN film growth. A larger compressive stress is beneficial to improved surface morphology and crystal quality of GaN film. The results of further orthogonal experiments show that an important factor affecting the lattice parameter is the growth rate of the AlN buffer layer. This work may be helpful for realizing simple GaN-on-Si structures and thus reducing the costs of growth processes.

关键词: GaN, Si substrate, AlN buffer layer, stress control

Abstract: GaN films grown on (111) Si substrate with different lattice parameters of the AlN buffer layer by metal-organic chemical vapor deposition are studied. The stress states obtained by different test methods are compared and it is found that the lattice parameter of the AlN buffer layer may have a significant effect on the stress state in the initial stage of subsequent GaN film growth. A larger compressive stress is beneficial to improved surface morphology and crystal quality of GaN film. The results of further orthogonal experiments show that an important factor affecting the lattice parameter is the growth rate of the AlN buffer layer. This work may be helpful for realizing simple GaN-on-Si structures and thus reducing the costs of growth processes.

Key words: GaN, Si substrate, AlN buffer layer, stress control

中图分类号:  (III-V semiconductors)

  • 81.05.Ea
81.15.Gh (Chemical vapor deposition (including plasma-enhanced CVD, MOCVD, ALD, etc.))