Influence of the lattice parameter of the AlN buffer layer on the stress state of GaN film grown on (111) Si
Zhen-Zhuo Zhang(张臻琢), Jing Yang(杨静), De-Gang Zhao(赵德刚), Feng Liang(梁锋), Ping Chen(陈平), and Zong-Shun Liu(刘宗顺)
Influence of the lattice parameter of the AlN buffer layer on the stress state of GaN film grown on (111) Si
Zhen-Zhuo Zhang(张臻琢), Jing Yang(杨静), De-Gang Zhao(赵德刚), Feng Liang(梁锋), Ping Chen(陈平), and Zong-Shun Liu(刘宗顺)
中国物理B
.
2023, (2): 28101
-028101
.
DOI: 10.1088/1674-1056/ac6b2b